2/18/2013	11:33:58 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/18/2013	11:33:58 AM	Recipe started at 11:33 AM
2/18/2013	11:33:58 AM	Helium valve closed
2/18/2013	11:33:58 AM	H2 valve closed
2/18/2013	11:33:58 AM	BCl3 valve closed
2/18/2013	11:33:58 AM	PH3 valve closed
2/18/2013	11:33:58 AM	SiCl4 pre valve closed
2/18/2013	11:33:58 AM	SiCl4 post valve closed
2/18/2013	11:33:58 AM	Main Vac valve closed
2/18/2013	11:33:58 AM	Bypass valve closed
2/18/2013	11:33:58 AM	Bubbler valve closed
2/18/2013	11:33:58 AM	Helium MFC set to  0.000000
2/18/2013	11:33:58 AM	H2 MFC set to  0.000000
2/18/2013	11:33:58 AM	BCl3 MFC set to  0.000000
2/18/2013	11:33:58 AM	PH3 MFC set to  0.000000
2/18/2013	11:33:58 AM	SiCl4 MFC set to  0.000000
2/18/2013	11:33:58 AM	Bypass solenoid MFC set to  0.000000
2/18/2013	11:33:58 AM	Tube furnace set to 0
2/18/2013	11:34:01 AM	H2 valve closed
2/18/2013	11:34:01 AM	BCl3 valve closed
2/18/2013	11:34:01 AM	PH3 valve closed
2/18/2013	11:34:01 AM	SiCl4 pre valve closed
2/18/2013	11:34:01 AM	SiCl4 post valve closed
2/18/2013	11:34:01 AM	Main Vac valve closed
2/18/2013	11:34:01 AM	Bypass valve closed
2/18/2013	11:34:01 AM	Bubbler valve closed
2/18/2013	11:34:01 AM	Helium valve opened
2/18/2013	11:34:01 AM	Helium MFC set to  500.000000
2/18/2013	11:34:01 AM	H2 MFC set to  0.000000
2/18/2013	11:34:01 AM	BCl3 MFC set to  0.000000
2/18/2013	11:34:01 AM	PH3 MFC set to  0.000000
2/18/2013	11:34:01 AM	SiCl4 MFC set to  0.000000
2/18/2013	11:34:01 AM	Bypass solenoid MFC set to  0.000000
2/18/2013	11:34:02 AM	Tube furnace set to 0
2/18/2013	11:35:14 AM	Helium valve closed
2/18/2013	11:35:14 AM	H2 valve closed
2/18/2013	11:35:14 AM	BCl3 valve closed
2/18/2013	11:35:14 AM	PH3 valve closed
2/18/2013	11:35:14 AM	SiCl4 pre valve closed
2/18/2013	11:35:14 AM	SiCl4 post valve closed
2/18/2013	11:35:14 AM	Main Vac valve closed
2/18/2013	11:35:14 AM	Bypass valve closed
2/18/2013	11:35:14 AM	Bubbler valve closed
2/18/2013	11:35:14 AM	Helium MFC set to  0.000000
2/18/2013	11:35:14 AM	H2 MFC set to  0.000000
2/18/2013	11:35:14 AM	BCl3 MFC set to  0.000000
2/18/2013	11:35:14 AM	PH3 MFC set to  0.000000
2/18/2013	11:35:14 AM	SiCl4 MFC set to  0.000000
2/18/2013	11:35:14 AM	Bypass solenoid MFC set to  0.000000
2/18/2013	11:35:14 AM	Tube furnace set to 0
2/18/2013	11:35:15 AM	Run finished at 11:35 AM
2/18/2013	11:35:15 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/18/2013	11:45:59 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/18/2013	11:46:00 AM	Recipe started at 11:46 AM
2/18/2013	11:46:00 AM	Helium valve closed
2/18/2013	11:46:00 AM	H2 valve closed
2/18/2013	11:46:00 AM	BCl3 valve closed
2/18/2013	11:46:00 AM	PH3 valve closed
2/18/2013	11:46:00 AM	SiCl4 pre valve closed
2/18/2013	11:46:00 AM	SiCl4 post valve closed
2/18/2013	11:46:00 AM	Main Vac valve closed
2/18/2013	11:46:00 AM	Bubbler valve closed
2/18/2013	11:46:00 AM	Bypass valve opened
2/18/2013	11:46:00 AM	Helium MFC set to  0.000000
2/18/2013	11:46:00 AM	H2 MFC set to  0.000000
2/18/2013	11:46:00 AM	BCl3 MFC set to  0.000000
2/18/2013	11:46:00 AM	PH3 MFC set to  0.000000
2/18/2013	11:46:00 AM	SiCl4 MFC set to  0.000000
2/18/2013	11:46:00 AM	Bypass solenoid MFC set to  0.000000
2/18/2013	11:46:00 AM	Tube furnace set to 0
2/18/2013	11:47:23 AM	Helium valve closed
2/18/2013	11:47:23 AM	H2 valve closed
2/18/2013	11:47:23 AM	BCl3 valve closed
2/18/2013	11:47:23 AM	PH3 valve closed
2/18/2013	11:47:23 AM	SiCl4 pre valve closed
2/18/2013	11:47:23 AM	SiCl4 post valve closed
2/18/2013	11:47:23 AM	Main Vac valve closed
2/18/2013	11:47:23 AM	Bubbler valve closed
2/18/2013	11:47:23 AM	Bypass valve opened
2/18/2013	11:47:23 AM	Helium MFC set to  0.000000
2/18/2013	11:47:23 AM	H2 MFC set to  0.000000
2/18/2013	11:47:23 AM	BCl3 MFC set to  0.000000
2/18/2013	11:47:23 AM	PH3 MFC set to  0.000000
2/18/2013	11:47:23 AM	SiCl4 MFC set to  0.000000
2/18/2013	11:47:23 AM	Bypass solenoid MFC set to  0.000000
2/18/2013	11:47:23 AM	Tube furnace set to 0
2/18/2013	11:48:23 AM	Helium valve closed
2/18/2013	11:48:23 AM	H2 valve closed
2/18/2013	11:48:23 AM	BCl3 valve closed
2/18/2013	11:48:23 AM	PH3 valve closed
2/18/2013	11:48:23 AM	SiCl4 pre valve closed
2/18/2013	11:48:23 AM	SiCl4 post valve closed
2/18/2013	11:48:23 AM	Bypass valve closed
2/18/2013	11:48:23 AM	Bubbler valve closed
2/18/2013	11:48:23 AM	Main Vac valve opened
2/18/2013	11:48:23 AM	Helium MFC set to  0.000000
2/18/2013	11:48:23 AM	H2 MFC set to  0.000000
2/18/2013	11:48:23 AM	BCl3 MFC set to  0.000000
2/18/2013	11:48:23 AM	PH3 MFC set to  0.000000
2/18/2013	11:48:23 AM	SiCl4 MFC set to  0.000000
2/18/2013	11:48:23 AM	Bypass solenoid MFC set to  0.000000
2/18/2013	11:48:23 AM	Tube furnace set to 0
2/18/2013	11:48:24 AM	Run finished at 11:48 AM
2/18/2013	11:48:25 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/18/2013	11:50:42 AM	Recipe started at 11:50 AM
2/18/2013	11:50:42 AM	Helium valve closed
2/18/2013	11:50:42 AM	H2 valve closed
2/18/2013	11:50:42 AM	BCl3 valve closed
2/18/2013	11:50:42 AM	PH3 valve closed
2/18/2013	11:50:42 AM	SiCl4 pre valve closed
2/18/2013	11:50:42 AM	SiCl4 post valve closed
2/18/2013	11:50:42 AM	Bypass valve closed
2/18/2013	11:50:42 AM	Bubbler valve closed
2/18/2013	11:50:42 AM	Main Vac valve opened
2/18/2013	11:50:42 AM	Helium MFC set to  0.000000
2/18/2013	11:50:42 AM	H2 MFC set to  0.000000
2/18/2013	11:50:42 AM	BCl3 MFC set to  0.000000
2/18/2013	11:50:42 AM	PH3 MFC set to  0.000000
2/18/2013	11:50:42 AM	SiCl4 MFC set to  0.000000
2/18/2013	11:50:42 AM	Bypass solenoid MFC set to  0.000000
2/18/2013	11:50:42 AM	Tube furnace set to 150
2/18/2013	11:51:12 AM	H2 valve closed
2/18/2013	11:51:12 AM	BCl3 valve closed
2/18/2013	11:51:12 AM	PH3 valve closed
2/18/2013	11:51:12 AM	SiCl4 pre valve closed
2/18/2013	11:51:12 AM	SiCl4 post valve closed
2/18/2013	11:51:12 AM	Bypass valve closed
2/18/2013	11:51:12 AM	Bubbler valve closed
2/18/2013	11:51:12 AM	Helium valve opened
2/18/2013	11:51:12 AM	Main Vac valve opened
2/18/2013	11:51:12 AM	Helium MFC set to  20.000000
2/18/2013	11:51:12 AM	H2 MFC set to  0.000000
2/18/2013	11:51:12 AM	BCl3 MFC set to  0.000000
2/18/2013	11:51:12 AM	PH3 MFC set to  0.000000
2/18/2013	11:51:12 AM	SiCl4 MFC set to  0.000000
2/18/2013	11:51:13 AM	Bypass solenoid MFC set to  0.000000
2/18/2013	11:51:13 AM	Tube furnace set to 150
2/18/2013	11:51:43 AM	Helium valve closed
2/18/2013	11:51:43 AM	H2 valve closed
2/18/2013	11:51:43 AM	BCl3 valve closed
2/18/2013	11:51:43 AM	PH3 valve closed
2/18/2013	11:51:43 AM	SiCl4 pre valve closed
2/18/2013	11:51:43 AM	SiCl4 post valve closed
2/18/2013	11:51:43 AM	Bypass valve closed
2/18/2013	11:51:43 AM	Bubbler valve closed
2/18/2013	11:51:43 AM	Main Vac valve opened
2/18/2013	11:51:43 AM	Helium MFC set to  0.000000
2/18/2013	11:51:43 AM	H2 MFC set to  0.000000
2/18/2013	11:51:43 AM	BCl3 MFC set to  0.000000
2/18/2013	11:51:43 AM	PH3 MFC set to  0.000000
2/18/2013	11:51:43 AM	SiCl4 MFC set to  0.000000
2/18/2013	11:51:43 AM	Bypass solenoid MFC set to  0.000000
2/18/2013	11:51:43 AM	Tube furnace set to 150
2/18/2013	11:52:13 AM	H2 valve closed
2/18/2013	11:52:13 AM	BCl3 valve closed
2/18/2013	11:52:13 AM	PH3 valve closed
2/18/2013	11:52:13 AM	SiCl4 pre valve closed
2/18/2013	11:52:13 AM	SiCl4 post valve closed
2/18/2013	11:52:13 AM	Bypass valve closed
2/18/2013	11:52:13 AM	Bubbler valve closed
2/18/2013	11:52:13 AM	Helium valve opened
2/18/2013	11:52:13 AM	Main Vac valve opened
2/18/2013	11:52:13 AM	Helium MFC set to  20.000000
2/18/2013	11:52:13 AM	H2 MFC set to  0.000000
2/18/2013	11:52:13 AM	BCl3 MFC set to  0.000000
2/18/2013	11:52:13 AM	PH3 MFC set to  0.000000
2/18/2013	11:52:13 AM	SiCl4 MFC set to  0.000000
2/18/2013	11:52:13 AM	Bypass solenoid MFC set to  0.000000
2/18/2013	11:52:13 AM	Tube furnace set to 150
2/18/2013	11:52:43 AM	Helium valve closed
2/18/2013	11:52:43 AM	H2 valve closed
2/18/2013	11:52:43 AM	BCl3 valve closed
2/18/2013	11:52:43 AM	PH3 valve closed
2/18/2013	11:52:43 AM	SiCl4 pre valve closed
2/18/2013	11:52:43 AM	SiCl4 post valve closed
2/18/2013	11:52:43 AM	Bypass valve closed
2/18/2013	11:52:43 AM	Bubbler valve closed
2/18/2013	11:52:43 AM	Main Vac valve opened
2/18/2013	11:52:43 AM	Helium MFC set to  0.000000
2/18/2013	11:52:43 AM	H2 MFC set to  0.000000
2/18/2013	11:52:43 AM	BCl3 MFC set to  0.000000
2/18/2013	11:52:43 AM	PH3 MFC set to  0.000000
2/18/2013	11:52:43 AM	SiCl4 MFC set to  0.000000
2/18/2013	11:52:43 AM	Bypass solenoid MFC set to  0.000000
2/18/2013	11:52:43 AM	Tube furnace set to 150
2/18/2013	11:53:13 AM	H2 valve closed
2/18/2013	11:53:13 AM	BCl3 valve closed
2/18/2013	11:53:13 AM	PH3 valve closed
2/18/2013	11:53:13 AM	SiCl4 pre valve closed
2/18/2013	11:53:13 AM	SiCl4 post valve closed
2/18/2013	11:53:13 AM	Bypass valve closed
2/18/2013	11:53:13 AM	Bubbler valve closed
2/18/2013	11:53:13 AM	Helium valve opened
2/18/2013	11:53:13 AM	Main Vac valve opened
2/18/2013	11:53:13 AM	Helium MFC set to  20.000000
2/18/2013	11:53:13 AM	H2 MFC set to  0.000000
2/18/2013	11:53:13 AM	BCl3 MFC set to  0.000000
2/18/2013	11:53:14 AM	PH3 MFC set to  0.000000
2/18/2013	11:53:14 AM	SiCl4 MFC set to  0.000000
2/18/2013	11:53:14 AM	Bypass solenoid MFC set to  0.000000
2/18/2013	11:53:14 AM	Tube furnace set to 150
2/18/2013	11:55:14 AM	Helium valve closed
2/18/2013	11:55:14 AM	H2 valve closed
2/18/2013	11:55:14 AM	BCl3 valve closed
2/18/2013	11:55:14 AM	PH3 valve closed
2/18/2013	11:55:14 AM	SiCl4 pre valve closed
2/18/2013	11:55:14 AM	SiCl4 post valve closed
2/18/2013	11:55:14 AM	Bypass valve closed
2/18/2013	11:55:14 AM	Bubbler valve closed
2/18/2013	11:55:14 AM	Main Vac valve opened
2/18/2013	11:55:14 AM	Helium MFC set to  0.000000
2/18/2013	11:55:14 AM	H2 MFC set to  0.000000
2/18/2013	11:55:14 AM	BCl3 MFC set to  0.000000
2/18/2013	11:55:14 AM	PH3 MFC set to  0.000000
2/18/2013	11:55:14 AM	SiCl4 MFC set to  0.000000
2/18/2013	11:55:14 AM	Bypass solenoid MFC set to  0.000000
2/18/2013	11:55:14 AM	Tube furnace set to 150
2/18/2013	11:55:44 AM	H2 valve closed
2/18/2013	11:55:44 AM	BCl3 valve closed
2/18/2013	11:55:44 AM	PH3 valve closed
2/18/2013	11:55:44 AM	SiCl4 pre valve closed
2/18/2013	11:55:44 AM	SiCl4 post valve closed
2/18/2013	11:55:44 AM	Bypass valve closed
2/18/2013	11:55:44 AM	Bubbler valve closed
2/18/2013	11:55:44 AM	Helium valve opened
2/18/2013	11:55:44 AM	Main Vac valve opened
2/18/2013	11:55:44 AM	Helium MFC set to  20.000000
2/18/2013	11:55:44 AM	H2 MFC set to  0.000000
2/18/2013	11:55:44 AM	BCl3 MFC set to  0.000000
2/18/2013	11:55:44 AM	PH3 MFC set to  0.000000
2/18/2013	11:55:44 AM	SiCl4 MFC set to  0.000000
2/18/2013	11:55:44 AM	Bypass solenoid MFC set to  0.000000
2/18/2013	11:55:44 AM	Tube furnace set to 150
2/18/2013	11:56:14 AM	Helium valve closed
2/18/2013	11:56:14 AM	H2 valve closed
2/18/2013	11:56:14 AM	BCl3 valve closed
2/18/2013	11:56:14 AM	PH3 valve closed
2/18/2013	11:56:14 AM	SiCl4 pre valve closed
2/18/2013	11:56:14 AM	SiCl4 post valve closed
2/18/2013	11:56:14 AM	Bypass valve closed
2/18/2013	11:56:14 AM	Bubbler valve closed
2/18/2013	11:56:14 AM	Main Vac valve opened
2/18/2013	11:56:14 AM	Helium MFC set to  0.000000
2/18/2013	11:56:14 AM	H2 MFC set to  0.000000
2/18/2013	11:56:14 AM	BCl3 MFC set to  0.000000
2/18/2013	11:56:14 AM	PH3 MFC set to  0.000000
2/18/2013	11:56:14 AM	SiCl4 MFC set to  0.000000
2/18/2013	11:56:14 AM	Bypass solenoid MFC set to  0.000000
2/18/2013	11:56:14 AM	Tube furnace set to 150
2/18/2013	11:56:44 AM	H2 valve closed
2/18/2013	11:56:44 AM	BCl3 valve closed
2/18/2013	11:56:44 AM	PH3 valve closed
2/18/2013	11:56:44 AM	SiCl4 pre valve closed
2/18/2013	11:56:44 AM	SiCl4 post valve closed
2/18/2013	11:56:44 AM	Bypass valve closed
2/18/2013	11:56:44 AM	Bubbler valve closed
2/18/2013	11:56:44 AM	Helium valve opened
2/18/2013	11:56:44 AM	Main Vac valve opened
2/18/2013	11:56:44 AM	Helium MFC set to  20.000000
2/18/2013	11:56:44 AM	H2 MFC set to  0.000000
2/18/2013	11:56:44 AM	BCl3 MFC set to  0.000000
2/18/2013	11:56:45 AM	PH3 MFC set to  0.000000
2/18/2013	11:56:45 AM	SiCl4 MFC set to  0.000000
2/18/2013	11:56:45 AM	Bypass solenoid MFC set to  0.000000
2/18/2013	11:56:45 AM	Tube furnace set to 150
2/18/2013	11:57:15 AM	Helium valve closed
2/18/2013	11:57:15 AM	H2 valve closed
2/18/2013	11:57:15 AM	BCl3 valve closed
2/18/2013	11:57:15 AM	PH3 valve closed
2/18/2013	11:57:15 AM	SiCl4 pre valve closed
2/18/2013	11:57:15 AM	SiCl4 post valve closed
2/18/2013	11:57:15 AM	Bypass valve closed
2/18/2013	11:57:15 AM	Bubbler valve closed
2/18/2013	11:57:15 AM	Main Vac valve opened
2/18/2013	11:57:15 AM	Helium MFC set to  0.000000
2/18/2013	11:57:15 AM	H2 MFC set to  0.000000
2/18/2013	11:57:15 AM	BCl3 MFC set to  0.000000
2/18/2013	11:57:15 AM	PH3 MFC set to  0.000000
2/18/2013	11:57:15 AM	SiCl4 MFC set to  0.000000
2/18/2013	11:57:15 AM	Bypass solenoid MFC set to  0.000000
2/18/2013	11:57:15 AM	Tube furnace set to 150
2/18/2013	11:57:45 AM	H2 valve closed
2/18/2013	11:57:45 AM	BCl3 valve closed
2/18/2013	11:57:45 AM	PH3 valve closed
2/18/2013	11:57:45 AM	SiCl4 pre valve closed
2/18/2013	11:57:45 AM	SiCl4 post valve closed
2/18/2013	11:57:45 AM	Bypass valve closed
2/18/2013	11:57:45 AM	Bubbler valve closed
2/18/2013	11:57:45 AM	Helium valve opened
2/18/2013	11:57:45 AM	Main Vac valve opened
2/18/2013	11:57:45 AM	Helium MFC set to  20.000000
2/18/2013	11:57:45 AM	H2 MFC set to  0.000000
2/18/2013	11:57:45 AM	BCl3 MFC set to  0.000000
2/18/2013	11:57:45 AM	PH3 MFC set to  0.000000
2/18/2013	11:57:45 AM	SiCl4 MFC set to  0.000000
2/18/2013	11:57:45 AM	Bypass solenoid MFC set to  0.000000
2/18/2013	11:57:45 AM	Tube furnace set to 150
2/18/2013	11:59:45 AM	Helium valve closed
2/18/2013	11:59:45 AM	H2 valve closed
2/18/2013	11:59:45 AM	BCl3 valve closed
2/18/2013	11:59:45 AM	PH3 valve closed
2/18/2013	11:59:45 AM	SiCl4 pre valve closed
2/18/2013	11:59:45 AM	SiCl4 post valve closed
2/18/2013	11:59:45 AM	Bypass valve closed
2/18/2013	11:59:45 AM	Bubbler valve closed
2/18/2013	11:59:45 AM	Main Vac valve opened
2/18/2013	11:59:45 AM	Helium MFC set to  0.000000
2/18/2013	11:59:45 AM	H2 MFC set to  0.000000
2/18/2013	11:59:45 AM	BCl3 MFC set to  0.000000
2/18/2013	11:59:45 AM	PH3 MFC set to  0.000000
2/18/2013	11:59:45 AM	SiCl4 MFC set to  0.000000
2/18/2013	11:59:45 AM	Bypass solenoid MFC set to  0.000000
2/18/2013	11:59:45 AM	Tube furnace set to 150
2/18/2013	12:00:15 PM	H2 valve closed
2/18/2013	12:00:15 PM	BCl3 valve closed
2/18/2013	12:00:15 PM	PH3 valve closed
2/18/2013	12:00:15 PM	SiCl4 pre valve closed
2/18/2013	12:00:15 PM	SiCl4 post valve closed
2/18/2013	12:00:15 PM	Bypass valve closed
2/18/2013	12:00:15 PM	Bubbler valve closed
2/18/2013	12:00:15 PM	Helium valve opened
2/18/2013	12:00:15 PM	Main Vac valve opened
2/18/2013	12:00:15 PM	Helium MFC set to  20.000000
2/18/2013	12:00:15 PM	H2 MFC set to  0.000000
2/18/2013	12:00:15 PM	BCl3 MFC set to  0.000000
2/18/2013	12:00:15 PM	PH3 MFC set to  0.000000
2/18/2013	12:00:15 PM	SiCl4 MFC set to  0.000000
2/18/2013	12:00:15 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	12:00:16 PM	Tube furnace set to 150
2/18/2013	12:00:46 PM	Helium valve closed
2/18/2013	12:00:46 PM	H2 valve closed
2/18/2013	12:00:46 PM	BCl3 valve closed
2/18/2013	12:00:46 PM	PH3 valve closed
2/18/2013	12:00:46 PM	SiCl4 pre valve closed
2/18/2013	12:00:46 PM	SiCl4 post valve closed
2/18/2013	12:00:46 PM	Bypass valve closed
2/18/2013	12:00:46 PM	Bubbler valve closed
2/18/2013	12:00:46 PM	Main Vac valve opened
2/18/2013	12:00:46 PM	Helium MFC set to  0.000000
2/18/2013	12:00:46 PM	H2 MFC set to  0.000000
2/18/2013	12:00:46 PM	BCl3 MFC set to  0.000000
2/18/2013	12:00:46 PM	PH3 MFC set to  0.000000
2/18/2013	12:00:46 PM	SiCl4 MFC set to  0.000000
2/18/2013	12:00:46 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	12:00:46 PM	Tube furnace set to 150
2/18/2013	12:01:16 PM	H2 valve closed
2/18/2013	12:01:16 PM	BCl3 valve closed
2/18/2013	12:01:16 PM	PH3 valve closed
2/18/2013	12:01:16 PM	SiCl4 pre valve closed
2/18/2013	12:01:16 PM	SiCl4 post valve closed
2/18/2013	12:01:16 PM	Bypass valve closed
2/18/2013	12:01:16 PM	Bubbler valve closed
2/18/2013	12:01:16 PM	Helium valve opened
2/18/2013	12:01:16 PM	Main Vac valve opened
2/18/2013	12:01:16 PM	Helium MFC set to  20.000000
2/18/2013	12:01:16 PM	H2 MFC set to  0.000000
2/18/2013	12:01:16 PM	BCl3 MFC set to  0.000000
2/18/2013	12:01:16 PM	PH3 MFC set to  0.000000
2/18/2013	12:01:16 PM	SiCl4 MFC set to  0.000000
2/18/2013	12:01:16 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	12:01:16 PM	Tube furnace set to 150
2/18/2013	12:03:16 PM	Helium valve closed
2/18/2013	12:03:16 PM	H2 valve closed
2/18/2013	12:03:16 PM	BCl3 valve closed
2/18/2013	12:03:16 PM	PH3 valve closed
2/18/2013	12:03:16 PM	SiCl4 pre valve closed
2/18/2013	12:03:16 PM	SiCl4 post valve closed
2/18/2013	12:03:16 PM	Bypass valve closed
2/18/2013	12:03:16 PM	Bubbler valve closed
2/18/2013	12:03:16 PM	Main Vac valve opened
2/18/2013	12:03:16 PM	Helium MFC set to  0.000000
2/18/2013	12:03:16 PM	H2 MFC set to  0.000000
2/18/2013	12:03:16 PM	BCl3 MFC set to  0.000000
2/18/2013	12:03:16 PM	PH3 MFC set to  0.000000
2/18/2013	12:03:16 PM	SiCl4 MFC set to  0.000000
2/18/2013	12:03:16 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	12:03:16 PM	Tube furnace set to 150
2/18/2013	12:03:46 PM	H2 valve closed
2/18/2013	12:03:46 PM	BCl3 valve closed
2/18/2013	12:03:46 PM	PH3 valve closed
2/18/2013	12:03:46 PM	SiCl4 pre valve closed
2/18/2013	12:03:46 PM	SiCl4 post valve closed
2/18/2013	12:03:46 PM	Bypass valve closed
2/18/2013	12:03:46 PM	Bubbler valve closed
2/18/2013	12:03:46 PM	Helium valve opened
2/18/2013	12:03:46 PM	Main Vac valve opened
2/18/2013	12:03:46 PM	Helium MFC set to  20.000000
2/18/2013	12:03:46 PM	H2 MFC set to  0.000000
2/18/2013	12:03:46 PM	BCl3 MFC set to  0.000000
2/18/2013	12:03:46 PM	PH3 MFC set to  0.000000
2/18/2013	12:03:46 PM	SiCl4 MFC set to  0.000000
2/18/2013	12:03:46 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	12:03:47 PM	Tube furnace set to 150
2/18/2013	12:04:17 PM	Helium valve closed
2/18/2013	12:04:17 PM	H2 valve closed
2/18/2013	12:04:17 PM	BCl3 valve closed
2/18/2013	12:04:17 PM	PH3 valve closed
2/18/2013	12:04:17 PM	SiCl4 pre valve closed
2/18/2013	12:04:17 PM	SiCl4 post valve closed
2/18/2013	12:04:17 PM	Bypass valve closed
2/18/2013	12:04:17 PM	Bubbler valve closed
2/18/2013	12:04:17 PM	Main Vac valve opened
2/18/2013	12:04:17 PM	Helium MFC set to  0.000000
2/18/2013	12:04:17 PM	H2 MFC set to  0.000000
2/18/2013	12:04:17 PM	BCl3 MFC set to  0.000000
2/18/2013	12:04:17 PM	PH3 MFC set to  0.000000
2/18/2013	12:04:17 PM	SiCl4 MFC set to  0.000000
2/18/2013	12:04:17 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	12:04:17 PM	Tube furnace set to 150
2/18/2013	12:04:47 PM	H2 valve closed
2/18/2013	12:04:47 PM	BCl3 valve closed
2/18/2013	12:04:47 PM	PH3 valve closed
2/18/2013	12:04:47 PM	SiCl4 pre valve closed
2/18/2013	12:04:47 PM	SiCl4 post valve closed
2/18/2013	12:04:47 PM	Bypass valve closed
2/18/2013	12:04:47 PM	Bubbler valve closed
2/18/2013	12:04:47 PM	Helium valve opened
2/18/2013	12:04:47 PM	Main Vac valve opened
2/18/2013	12:04:47 PM	Helium MFC set to  20.000000
2/18/2013	12:04:47 PM	H2 MFC set to  0.000000
2/18/2013	12:04:47 PM	BCl3 MFC set to  0.000000
2/18/2013	12:04:47 PM	PH3 MFC set to  0.000000
2/18/2013	12:04:47 PM	SiCl4 MFC set to  0.000000
2/18/2013	12:04:47 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	12:04:47 PM	Tube furnace set to 150
2/18/2013	12:06:47 PM	Helium valve closed
2/18/2013	12:06:47 PM	H2 valve closed
2/18/2013	12:06:47 PM	BCl3 valve closed
2/18/2013	12:06:47 PM	PH3 valve closed
2/18/2013	12:06:47 PM	SiCl4 pre valve closed
2/18/2013	12:06:47 PM	SiCl4 post valve closed
2/18/2013	12:06:47 PM	Bypass valve closed
2/18/2013	12:06:47 PM	Bubbler valve closed
2/18/2013	12:06:47 PM	Main Vac valve opened
2/18/2013	12:06:47 PM	Helium MFC set to  0.000000
2/18/2013	12:06:47 PM	H2 MFC set to  0.000000
2/18/2013	12:06:47 PM	BCl3 MFC set to  0.000000
2/18/2013	12:06:47 PM	PH3 MFC set to  0.000000
2/18/2013	12:06:47 PM	SiCl4 MFC set to  0.000000
2/18/2013	12:06:47 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	12:06:47 PM	Tube furnace set to 150
2/18/2013	12:06:48 PM	Run finished at 12:06 PM
2/18/2013	12:13:19 PM	Recipe started at 12:13 PM
2/18/2013	12:13:19 PM	Helium valve closed
2/18/2013	12:13:19 PM	H2 valve closed
2/18/2013	12:13:19 PM	BCl3 valve closed
2/18/2013	12:13:19 PM	PH3 valve closed
2/18/2013	12:13:19 PM	SiCl4 pre valve closed
2/18/2013	12:13:19 PM	SiCl4 post valve closed
2/18/2013	12:13:19 PM	Bypass valve closed
2/18/2013	12:13:19 PM	Bubbler valve closed
2/18/2013	12:13:19 PM	Main Vac valve opened
2/18/2013	12:13:19 PM	Helium MFC set to  0.000000
2/18/2013	12:13:19 PM	H2 MFC set to  0.000000
2/18/2013	12:13:19 PM	BCl3 MFC set to  0.000000
2/18/2013	12:13:19 PM	PH3 MFC set to  0.000000
2/18/2013	12:13:19 PM	SiCl4 MFC set to  0.000000
2/18/2013	12:13:19 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	12:13:19 PM	Tube furnace set to 150
2/18/2013	12:13:49 PM	H2 valve closed
2/18/2013	12:13:49 PM	BCl3 valve closed
2/18/2013	12:13:49 PM	PH3 valve closed
2/18/2013	12:13:49 PM	SiCl4 pre valve closed
2/18/2013	12:13:49 PM	SiCl4 post valve closed
2/18/2013	12:13:49 PM	Bypass valve closed
2/18/2013	12:13:49 PM	Bubbler valve closed
2/18/2013	12:13:49 PM	Helium valve opened
2/18/2013	12:13:49 PM	Main Vac valve opened
2/18/2013	12:13:49 PM	Helium MFC set to  20.000000
2/18/2013	12:13:49 PM	H2 MFC set to  0.000000
2/18/2013	12:13:49 PM	BCl3 MFC set to  0.000000
2/18/2013	12:13:49 PM	PH3 MFC set to  0.000000
2/18/2013	12:13:49 PM	SiCl4 MFC set to  0.000000
2/18/2013	12:13:49 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	12:13:49 PM	Tube furnace set to 150
2/18/2013	12:14:19 PM	Helium valve closed
2/18/2013	12:14:19 PM	H2 valve closed
2/18/2013	12:14:19 PM	BCl3 valve closed
2/18/2013	12:14:19 PM	PH3 valve closed
2/18/2013	12:14:19 PM	SiCl4 pre valve closed
2/18/2013	12:14:19 PM	SiCl4 post valve closed
2/18/2013	12:14:19 PM	Bypass valve closed
2/18/2013	12:14:19 PM	Bubbler valve closed
2/18/2013	12:14:19 PM	Main Vac valve opened
2/18/2013	12:14:19 PM	Helium MFC set to  0.000000
2/18/2013	12:14:19 PM	H2 MFC set to  0.000000
2/18/2013	12:14:19 PM	BCl3 MFC set to  0.000000
2/18/2013	12:14:19 PM	PH3 MFC set to  0.000000
2/18/2013	12:14:19 PM	SiCl4 MFC set to  0.000000
2/18/2013	12:14:19 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	12:14:20 PM	Tube furnace set to 150
2/18/2013	12:14:50 PM	H2 valve closed
2/18/2013	12:14:50 PM	BCl3 valve closed
2/18/2013	12:14:50 PM	PH3 valve closed
2/18/2013	12:14:50 PM	SiCl4 pre valve closed
2/18/2013	12:14:50 PM	SiCl4 post valve closed
2/18/2013	12:14:50 PM	Bypass valve closed
2/18/2013	12:14:50 PM	Bubbler valve closed
2/18/2013	12:14:50 PM	Helium valve opened
2/18/2013	12:14:50 PM	Main Vac valve opened
2/18/2013	12:14:50 PM	Helium MFC set to  20.000000
2/18/2013	12:14:50 PM	H2 MFC set to  0.000000
2/18/2013	12:14:50 PM	BCl3 MFC set to  0.000000
2/18/2013	12:14:50 PM	PH3 MFC set to  0.000000
2/18/2013	12:14:50 PM	SiCl4 MFC set to  0.000000
2/18/2013	12:14:50 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	12:14:50 PM	Tube furnace set to 150
2/18/2013	12:15:20 PM	Helium valve closed
2/18/2013	12:15:20 PM	H2 valve closed
2/18/2013	12:15:20 PM	BCl3 valve closed
2/18/2013	12:15:20 PM	PH3 valve closed
2/18/2013	12:15:20 PM	SiCl4 pre valve closed
2/18/2013	12:15:20 PM	SiCl4 post valve closed
2/18/2013	12:15:20 PM	Bypass valve closed
2/18/2013	12:15:20 PM	Bubbler valve closed
2/18/2013	12:15:20 PM	Main Vac valve opened
2/18/2013	12:15:20 PM	Helium MFC set to  0.000000
2/18/2013	12:15:20 PM	H2 MFC set to  0.000000
2/18/2013	12:15:20 PM	BCl3 MFC set to  0.000000
2/18/2013	12:15:20 PM	PH3 MFC set to  0.000000
2/18/2013	12:15:20 PM	SiCl4 MFC set to  0.000000
2/18/2013	12:15:20 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	12:15:20 PM	Tube furnace set to 150
2/18/2013	12:15:50 PM	H2 valve closed
2/18/2013	12:15:50 PM	BCl3 valve closed
2/18/2013	12:15:50 PM	PH3 valve closed
2/18/2013	12:15:50 PM	SiCl4 pre valve closed
2/18/2013	12:15:50 PM	SiCl4 post valve closed
2/18/2013	12:15:50 PM	Bypass valve closed
2/18/2013	12:15:50 PM	Bubbler valve closed
2/18/2013	12:15:50 PM	Helium valve opened
2/18/2013	12:15:50 PM	Main Vac valve opened
2/18/2013	12:15:50 PM	Helium MFC set to  20.000000
2/18/2013	12:15:50 PM	H2 MFC set to  0.000000
2/18/2013	12:15:50 PM	BCl3 MFC set to  0.000000
2/18/2013	12:15:50 PM	PH3 MFC set to  0.000000
2/18/2013	12:15:50 PM	SiCl4 MFC set to  0.000000
2/18/2013	12:15:50 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	12:15:50 PM	Tube furnace set to 150
2/18/2013	12:17:50 PM	Helium valve closed
2/18/2013	12:17:50 PM	H2 valve closed
2/18/2013	12:17:50 PM	BCl3 valve closed
2/18/2013	12:17:50 PM	PH3 valve closed
2/18/2013	12:17:50 PM	SiCl4 pre valve closed
2/18/2013	12:17:50 PM	SiCl4 post valve closed
2/18/2013	12:17:50 PM	Bypass valve closed
2/18/2013	12:17:50 PM	Bubbler valve closed
2/18/2013	12:17:50 PM	Main Vac valve opened
2/18/2013	12:17:50 PM	Helium MFC set to  0.000000
2/18/2013	12:17:50 PM	H2 MFC set to  0.000000
2/18/2013	12:17:50 PM	BCl3 MFC set to  0.000000
2/18/2013	12:17:50 PM	PH3 MFC set to  0.000000
2/18/2013	12:17:50 PM	SiCl4 MFC set to  0.000000
2/18/2013	12:17:50 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	12:17:50 PM	Tube furnace set to 150
2/18/2013	12:18:21 PM	H2 valve closed
2/18/2013	12:18:21 PM	BCl3 valve closed
2/18/2013	12:18:21 PM	PH3 valve closed
2/18/2013	12:18:21 PM	SiCl4 pre valve closed
2/18/2013	12:18:21 PM	SiCl4 post valve closed
2/18/2013	12:18:21 PM	Bypass valve closed
2/18/2013	12:18:21 PM	Bubbler valve closed
2/18/2013	12:18:21 PM	Helium valve opened
2/18/2013	12:18:21 PM	Main Vac valve opened
2/18/2013	12:18:21 PM	Helium MFC set to  20.000000
2/18/2013	12:18:21 PM	H2 MFC set to  0.000000
2/18/2013	12:18:21 PM	BCl3 MFC set to  0.000000
2/18/2013	12:18:21 PM	PH3 MFC set to  0.000000
2/18/2013	12:18:21 PM	SiCl4 MFC set to  0.000000
2/18/2013	12:18:21 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	12:18:21 PM	Tube furnace set to 150
2/18/2013	12:18:51 PM	Helium valve closed
2/18/2013	12:18:51 PM	H2 valve closed
2/18/2013	12:18:51 PM	BCl3 valve closed
2/18/2013	12:18:51 PM	PH3 valve closed
2/18/2013	12:18:51 PM	SiCl4 pre valve closed
2/18/2013	12:18:51 PM	SiCl4 post valve closed
2/18/2013	12:18:51 PM	Bypass valve closed
2/18/2013	12:18:51 PM	Bubbler valve closed
2/18/2013	12:18:51 PM	Main Vac valve opened
2/18/2013	12:18:51 PM	Helium MFC set to  0.000000
2/18/2013	12:18:51 PM	H2 MFC set to  0.000000
2/18/2013	12:18:51 PM	BCl3 MFC set to  0.000000
2/18/2013	12:18:51 PM	PH3 MFC set to  0.000000
2/18/2013	12:18:51 PM	SiCl4 MFC set to  0.000000
2/18/2013	12:18:51 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	12:18:51 PM	Tube furnace set to 150
2/18/2013	12:19:21 PM	H2 valve closed
2/18/2013	12:19:21 PM	BCl3 valve closed
2/18/2013	12:19:21 PM	PH3 valve closed
2/18/2013	12:19:21 PM	SiCl4 pre valve closed
2/18/2013	12:19:21 PM	SiCl4 post valve closed
2/18/2013	12:19:21 PM	Bypass valve closed
2/18/2013	12:19:21 PM	Bubbler valve closed
2/18/2013	12:19:21 PM	Helium valve opened
2/18/2013	12:19:21 PM	Main Vac valve opened
2/18/2013	12:19:21 PM	Helium MFC set to  20.000000
2/18/2013	12:19:21 PM	H2 MFC set to  0.000000
2/18/2013	12:19:21 PM	BCl3 MFC set to  0.000000
2/18/2013	12:19:21 PM	PH3 MFC set to  0.000000
2/18/2013	12:19:21 PM	SiCl4 MFC set to  0.000000
2/18/2013	12:19:21 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	12:19:21 PM	Tube furnace set to 150
2/18/2013	12:19:51 PM	Helium valve closed
2/18/2013	12:19:51 PM	H2 valve closed
2/18/2013	12:19:51 PM	BCl3 valve closed
2/18/2013	12:19:51 PM	PH3 valve closed
2/18/2013	12:19:51 PM	SiCl4 pre valve closed
2/18/2013	12:19:51 PM	SiCl4 post valve closed
2/18/2013	12:19:51 PM	Bypass valve closed
2/18/2013	12:19:51 PM	Bubbler valve closed
2/18/2013	12:19:51 PM	Main Vac valve opened
2/18/2013	12:19:51 PM	Helium MFC set to  0.000000
2/18/2013	12:19:51 PM	H2 MFC set to  0.000000
2/18/2013	12:19:51 PM	BCl3 MFC set to  0.000000
2/18/2013	12:19:51 PM	PH3 MFC set to  0.000000
2/18/2013	12:19:51 PM	SiCl4 MFC set to  0.000000
2/18/2013	12:19:51 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	12:19:51 PM	Tube furnace set to 150
2/18/2013	12:20:22 PM	H2 valve closed
2/18/2013	12:20:22 PM	BCl3 valve closed
2/18/2013	12:20:22 PM	PH3 valve closed
2/18/2013	12:20:22 PM	SiCl4 pre valve closed
2/18/2013	12:20:22 PM	SiCl4 post valve closed
2/18/2013	12:20:22 PM	Bypass valve closed
2/18/2013	12:20:22 PM	Bubbler valve closed
2/18/2013	12:20:22 PM	Helium valve opened
2/18/2013	12:20:22 PM	Main Vac valve opened
2/18/2013	12:20:22 PM	Helium MFC set to  20.000000
2/18/2013	12:20:22 PM	H2 MFC set to  0.000000
2/18/2013	12:20:22 PM	BCl3 MFC set to  0.000000
2/18/2013	12:20:22 PM	PH3 MFC set to  0.000000
2/18/2013	12:20:22 PM	SiCl4 MFC set to  0.000000
2/18/2013	12:20:22 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	12:20:22 PM	Tube furnace set to 150
2/18/2013	12:22:22 PM	Helium valve closed
2/18/2013	12:22:22 PM	H2 valve closed
2/18/2013	12:22:22 PM	BCl3 valve closed
2/18/2013	12:22:22 PM	PH3 valve closed
2/18/2013	12:22:22 PM	SiCl4 pre valve closed
2/18/2013	12:22:22 PM	SiCl4 post valve closed
2/18/2013	12:22:22 PM	Bypass valve closed
2/18/2013	12:22:22 PM	Bubbler valve closed
2/18/2013	12:22:22 PM	Main Vac valve opened
2/18/2013	12:22:22 PM	Helium MFC set to  0.000000
2/18/2013	12:22:22 PM	H2 MFC set to  0.000000
2/18/2013	12:22:22 PM	BCl3 MFC set to  0.000000
2/18/2013	12:22:22 PM	PH3 MFC set to  0.000000
2/18/2013	12:22:22 PM	SiCl4 MFC set to  0.000000
2/18/2013	12:22:22 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	12:22:22 PM	Tube furnace set to 150
2/18/2013	12:22:52 PM	H2 valve closed
2/18/2013	12:22:52 PM	BCl3 valve closed
2/18/2013	12:22:52 PM	PH3 valve closed
2/18/2013	12:22:52 PM	SiCl4 pre valve closed
2/18/2013	12:22:52 PM	SiCl4 post valve closed
2/18/2013	12:22:52 PM	Bypass valve closed
2/18/2013	12:22:52 PM	Bubbler valve closed
2/18/2013	12:22:52 PM	Helium valve opened
2/18/2013	12:22:52 PM	Main Vac valve opened
2/18/2013	12:22:52 PM	Helium MFC set to  20.000000
2/18/2013	12:22:52 PM	H2 MFC set to  0.000000
2/18/2013	12:22:52 PM	BCl3 MFC set to  0.000000
2/18/2013	12:22:52 PM	PH3 MFC set to  0.000000
2/18/2013	12:22:52 PM	SiCl4 MFC set to  0.000000
2/18/2013	12:22:52 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	12:22:52 PM	Tube furnace set to 150
2/18/2013	12:23:22 PM	Helium valve closed
2/18/2013	12:23:22 PM	H2 valve closed
2/18/2013	12:23:22 PM	BCl3 valve closed
2/18/2013	12:23:22 PM	PH3 valve closed
2/18/2013	12:23:22 PM	SiCl4 pre valve closed
2/18/2013	12:23:22 PM	SiCl4 post valve closed
2/18/2013	12:23:22 PM	Bypass valve closed
2/18/2013	12:23:22 PM	Bubbler valve closed
2/18/2013	12:23:22 PM	Main Vac valve opened
2/18/2013	12:23:22 PM	Helium MFC set to  0.000000
2/18/2013	12:23:22 PM	H2 MFC set to  0.000000
2/18/2013	12:23:22 PM	BCl3 MFC set to  0.000000
2/18/2013	12:23:22 PM	PH3 MFC set to  0.000000
2/18/2013	12:23:22 PM	SiCl4 MFC set to  0.000000
2/18/2013	12:23:22 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	12:23:22 PM	Tube furnace set to 150
2/18/2013	12:23:52 PM	H2 valve closed
2/18/2013	12:23:52 PM	BCl3 valve closed
2/18/2013	12:23:53 PM	PH3 valve closed
2/18/2013	12:23:53 PM	SiCl4 pre valve closed
2/18/2013	12:23:53 PM	SiCl4 post valve closed
2/18/2013	12:23:53 PM	Bypass valve closed
2/18/2013	12:23:53 PM	Bubbler valve closed
2/18/2013	12:23:53 PM	Helium valve opened
2/18/2013	12:23:53 PM	Main Vac valve opened
2/18/2013	12:23:53 PM	Helium MFC set to  20.000000
2/18/2013	12:23:53 PM	H2 MFC set to  0.000000
2/18/2013	12:23:53 PM	BCl3 MFC set to  0.000000
2/18/2013	12:23:53 PM	PH3 MFC set to  0.000000
2/18/2013	12:23:53 PM	SiCl4 MFC set to  0.000000
2/18/2013	12:23:53 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	12:23:53 PM	Tube furnace set to 150
2/18/2013	12:25:53 PM	Helium valve closed
2/18/2013	12:25:53 PM	H2 valve closed
2/18/2013	12:25:53 PM	BCl3 valve closed
2/18/2013	12:25:53 PM	PH3 valve closed
2/18/2013	12:25:53 PM	SiCl4 pre valve closed
2/18/2013	12:25:53 PM	SiCl4 post valve closed
2/18/2013	12:25:53 PM	Bypass valve closed
2/18/2013	12:25:53 PM	Bubbler valve closed
2/18/2013	12:25:53 PM	Main Vac valve opened
2/18/2013	12:25:53 PM	Helium MFC set to  0.000000
2/18/2013	12:25:53 PM	H2 MFC set to  0.000000
2/18/2013	12:25:53 PM	BCl3 MFC set to  0.000000
2/18/2013	12:25:53 PM	PH3 MFC set to  0.000000
2/18/2013	12:25:53 PM	SiCl4 MFC set to  0.000000
2/18/2013	12:25:53 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	12:25:53 PM	Tube furnace set to 150
2/18/2013	12:26:23 PM	H2 valve closed
2/18/2013	12:26:23 PM	BCl3 valve closed
2/18/2013	12:26:23 PM	PH3 valve closed
2/18/2013	12:26:23 PM	SiCl4 pre valve closed
2/18/2013	12:26:23 PM	SiCl4 post valve closed
2/18/2013	12:26:23 PM	Bypass valve closed
2/18/2013	12:26:23 PM	Bubbler valve closed
2/18/2013	12:26:23 PM	Helium valve opened
2/18/2013	12:26:23 PM	Main Vac valve opened
2/18/2013	12:26:23 PM	Helium MFC set to  20.000000
2/18/2013	12:26:23 PM	H2 MFC set to  0.000000
2/18/2013	12:26:23 PM	BCl3 MFC set to  0.000000
2/18/2013	12:26:23 PM	PH3 MFC set to  0.000000
2/18/2013	12:26:23 PM	SiCl4 MFC set to  0.000000
2/18/2013	12:26:23 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	12:26:23 PM	Tube furnace set to 150
2/18/2013	12:26:53 PM	Helium valve closed
2/18/2013	12:26:53 PM	H2 valve closed
2/18/2013	12:26:53 PM	BCl3 valve closed
2/18/2013	12:26:53 PM	PH3 valve closed
2/18/2013	12:26:53 PM	SiCl4 pre valve closed
2/18/2013	12:26:53 PM	SiCl4 post valve closed
2/18/2013	12:26:53 PM	Bypass valve closed
2/18/2013	12:26:53 PM	Bubbler valve closed
2/18/2013	12:26:53 PM	Main Vac valve opened
2/18/2013	12:26:53 PM	Helium MFC set to  0.000000
2/18/2013	12:26:53 PM	H2 MFC set to  0.000000
2/18/2013	12:26:53 PM	BCl3 MFC set to  0.000000
2/18/2013	12:26:53 PM	PH3 MFC set to  0.000000
2/18/2013	12:26:53 PM	SiCl4 MFC set to  0.000000
2/18/2013	12:26:53 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	12:26:53 PM	Tube furnace set to 150
2/18/2013	12:27:23 PM	H2 valve closed
2/18/2013	12:27:23 PM	BCl3 valve closed
2/18/2013	12:27:24 PM	PH3 valve closed
2/18/2013	12:27:24 PM	SiCl4 pre valve closed
2/18/2013	12:27:24 PM	SiCl4 post valve closed
2/18/2013	12:27:24 PM	Bypass valve closed
2/18/2013	12:27:24 PM	Bubbler valve closed
2/18/2013	12:27:24 PM	Helium valve opened
2/18/2013	12:27:24 PM	Main Vac valve opened
2/18/2013	12:27:24 PM	Helium MFC set to  20.000000
2/18/2013	12:27:24 PM	H2 MFC set to  0.000000
2/18/2013	12:27:24 PM	BCl3 MFC set to  0.000000
2/18/2013	12:27:24 PM	PH3 MFC set to  0.000000
2/18/2013	12:27:24 PM	SiCl4 MFC set to  0.000000
2/18/2013	12:27:24 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	12:27:24 PM	Tube furnace set to 150
2/18/2013	12:29:24 PM	Helium valve closed
2/18/2013	12:29:24 PM	H2 valve closed
2/18/2013	12:29:24 PM	BCl3 valve closed
2/18/2013	12:29:24 PM	PH3 valve closed
2/18/2013	12:29:24 PM	SiCl4 pre valve closed
2/18/2013	12:29:24 PM	SiCl4 post valve closed
2/18/2013	12:29:24 PM	Bypass valve closed
2/18/2013	12:29:24 PM	Bubbler valve closed
2/18/2013	12:29:24 PM	Main Vac valve opened
2/18/2013	12:29:24 PM	Helium MFC set to  0.000000
2/18/2013	12:29:24 PM	H2 MFC set to  0.000000
2/18/2013	12:29:24 PM	BCl3 MFC set to  0.000000
2/18/2013	12:29:24 PM	PH3 MFC set to  0.000000
2/18/2013	12:29:24 PM	SiCl4 MFC set to  0.000000
2/18/2013	12:29:24 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	12:29:24 PM	Tube furnace set to 150
2/18/2013	12:29:25 PM	Run finished at 12:29 PM
2/18/2013	1:09:54 PM	Recipe started at 1:09 PM
2/18/2013	1:09:54 PM	Helium valve closed
2/18/2013	1:09:54 PM	H2 valve closed
2/18/2013	1:09:54 PM	BCl3 valve closed
2/18/2013	1:09:54 PM	PH3 valve closed
2/18/2013	1:09:54 PM	SiCl4 pre valve closed
2/18/2013	1:09:54 PM	SiCl4 post valve closed
2/18/2013	1:09:54 PM	Bypass valve closed
2/18/2013	1:09:54 PM	Bubbler valve closed
2/18/2013	1:09:54 PM	Main Vac valve opened
2/18/2013	1:09:54 PM	Helium MFC set to  0.000000
2/18/2013	1:09:54 PM	H2 MFC set to  0.000000
2/18/2013	1:09:54 PM	BCl3 MFC set to  0.000000
2/18/2013	1:09:54 PM	PH3 MFC set to  0.000000
2/18/2013	1:09:54 PM	SiCl4 MFC set to  0.000000
2/18/2013	1:09:54 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	1:09:54 PM	Tube furnace set to 150
2/18/2013	1:10:24 PM	H2 valve closed
2/18/2013	1:10:24 PM	BCl3 valve closed
2/18/2013	1:10:24 PM	PH3 valve closed
2/18/2013	1:10:24 PM	SiCl4 pre valve closed
2/18/2013	1:10:24 PM	SiCl4 post valve closed
2/18/2013	1:10:24 PM	Bypass valve closed
2/18/2013	1:10:24 PM	Bubbler valve closed
2/18/2013	1:10:24 PM	Helium valve opened
2/18/2013	1:10:24 PM	Main Vac valve opened
2/18/2013	1:10:24 PM	Helium MFC set to  20.000000
2/18/2013	1:10:24 PM	H2 MFC set to  0.000000
2/18/2013	1:10:24 PM	BCl3 MFC set to  0.000000
2/18/2013	1:10:24 PM	PH3 MFC set to  0.000000
2/18/2013	1:10:24 PM	SiCl4 MFC set to  0.000000
2/18/2013	1:10:24 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	1:10:24 PM	Tube furnace set to 150
2/18/2013	1:10:54 PM	Helium valve closed
2/18/2013	1:10:54 PM	H2 valve closed
2/18/2013	1:10:54 PM	BCl3 valve closed
2/18/2013	1:10:54 PM	PH3 valve closed
2/18/2013	1:10:54 PM	SiCl4 pre valve closed
2/18/2013	1:10:54 PM	SiCl4 post valve closed
2/18/2013	1:10:54 PM	Bypass valve closed
2/18/2013	1:10:54 PM	Bubbler valve closed
2/18/2013	1:10:54 PM	Main Vac valve opened
2/18/2013	1:10:54 PM	Helium MFC set to  0.000000
2/18/2013	1:10:54 PM	H2 MFC set to  0.000000
2/18/2013	1:10:54 PM	BCl3 MFC set to  0.000000
2/18/2013	1:10:54 PM	PH3 MFC set to  0.000000
2/18/2013	1:10:54 PM	SiCl4 MFC set to  0.000000
2/18/2013	1:10:54 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	1:10:55 PM	Tube furnace set to 150
2/18/2013	1:11:25 PM	H2 valve closed
2/18/2013	1:11:25 PM	BCl3 valve closed
2/18/2013	1:11:25 PM	PH3 valve closed
2/18/2013	1:11:25 PM	SiCl4 pre valve closed
2/18/2013	1:11:25 PM	SiCl4 post valve closed
2/18/2013	1:11:25 PM	Bypass valve closed
2/18/2013	1:11:25 PM	Bubbler valve closed
2/18/2013	1:11:25 PM	Helium valve opened
2/18/2013	1:11:25 PM	Main Vac valve opened
2/18/2013	1:11:25 PM	Helium MFC set to  20.000000
2/18/2013	1:11:25 PM	H2 MFC set to  0.000000
2/18/2013	1:11:25 PM	BCl3 MFC set to  0.000000
2/18/2013	1:11:25 PM	PH3 MFC set to  0.000000
2/18/2013	1:11:25 PM	SiCl4 MFC set to  0.000000
2/18/2013	1:11:25 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	1:11:25 PM	Tube furnace set to 150
2/18/2013	1:11:55 PM	Helium valve closed
2/18/2013	1:11:55 PM	H2 valve closed
2/18/2013	1:11:55 PM	BCl3 valve closed
2/18/2013	1:11:55 PM	PH3 valve closed
2/18/2013	1:11:55 PM	SiCl4 pre valve closed
2/18/2013	1:11:55 PM	SiCl4 post valve closed
2/18/2013	1:11:55 PM	Bypass valve closed
2/18/2013	1:11:55 PM	Bubbler valve closed
2/18/2013	1:11:55 PM	Main Vac valve opened
2/18/2013	1:11:55 PM	Helium MFC set to  0.000000
2/18/2013	1:11:55 PM	H2 MFC set to  0.000000
2/18/2013	1:11:55 PM	BCl3 MFC set to  0.000000
2/18/2013	1:11:55 PM	PH3 MFC set to  0.000000
2/18/2013	1:11:55 PM	SiCl4 MFC set to  0.000000
2/18/2013	1:11:55 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	1:11:55 PM	Tube furnace set to 150
2/18/2013	1:12:25 PM	H2 valve closed
2/18/2013	1:12:25 PM	BCl3 valve closed
2/18/2013	1:12:25 PM	PH3 valve closed
2/18/2013	1:12:25 PM	SiCl4 pre valve closed
2/18/2013	1:12:25 PM	SiCl4 post valve closed
2/18/2013	1:12:25 PM	Bypass valve closed
2/18/2013	1:12:25 PM	Bubbler valve closed
2/18/2013	1:12:25 PM	Helium valve opened
2/18/2013	1:12:25 PM	Main Vac valve opened
2/18/2013	1:12:25 PM	Helium MFC set to  20.000000
2/18/2013	1:12:25 PM	H2 MFC set to  0.000000
2/18/2013	1:12:25 PM	BCl3 MFC set to  0.000000
2/18/2013	1:12:25 PM	PH3 MFC set to  0.000000
2/18/2013	1:12:25 PM	SiCl4 MFC set to  0.000000
2/18/2013	1:12:25 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	1:12:25 PM	Tube furnace set to 150
2/18/2013	1:14:25 PM	Helium valve closed
2/18/2013	1:14:25 PM	H2 valve closed
2/18/2013	1:14:25 PM	BCl3 valve closed
2/18/2013	1:14:25 PM	PH3 valve closed
2/18/2013	1:14:25 PM	SiCl4 pre valve closed
2/18/2013	1:14:25 PM	SiCl4 post valve closed
2/18/2013	1:14:25 PM	Bypass valve closed
2/18/2013	1:14:25 PM	Bubbler valve closed
2/18/2013	1:14:25 PM	Main Vac valve opened
2/18/2013	1:14:25 PM	Helium MFC set to  0.000000
2/18/2013	1:14:25 PM	H2 MFC set to  0.000000
2/18/2013	1:14:25 PM	BCl3 MFC set to  0.000000
2/18/2013	1:14:25 PM	PH3 MFC set to  0.000000
2/18/2013	1:14:25 PM	SiCl4 MFC set to  0.000000
2/18/2013	1:14:25 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	1:14:26 PM	Tube furnace set to 150
2/18/2013	1:14:56 PM	H2 valve closed
2/18/2013	1:14:56 PM	BCl3 valve closed
2/18/2013	1:14:56 PM	PH3 valve closed
2/18/2013	1:14:56 PM	SiCl4 pre valve closed
2/18/2013	1:14:56 PM	SiCl4 post valve closed
2/18/2013	1:14:56 PM	Bypass valve closed
2/18/2013	1:14:56 PM	Bubbler valve closed
2/18/2013	1:14:56 PM	Helium valve opened
2/18/2013	1:14:56 PM	Main Vac valve opened
2/18/2013	1:14:56 PM	Helium MFC set to  20.000000
2/18/2013	1:14:56 PM	H2 MFC set to  0.000000
2/18/2013	1:14:56 PM	BCl3 MFC set to  0.000000
2/18/2013	1:14:56 PM	PH3 MFC set to  0.000000
2/18/2013	1:14:56 PM	SiCl4 MFC set to  0.000000
2/18/2013	1:14:56 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	1:14:56 PM	Tube furnace set to 150
2/18/2013	1:15:26 PM	Helium valve closed
2/18/2013	1:15:26 PM	H2 valve closed
2/18/2013	1:15:26 PM	BCl3 valve closed
2/18/2013	1:15:26 PM	PH3 valve closed
2/18/2013	1:15:26 PM	SiCl4 pre valve closed
2/18/2013	1:15:26 PM	SiCl4 post valve closed
2/18/2013	1:15:26 PM	Bypass valve closed
2/18/2013	1:15:26 PM	Bubbler valve closed
2/18/2013	1:15:26 PM	Main Vac valve opened
2/18/2013	1:15:26 PM	Helium MFC set to  0.000000
2/18/2013	1:15:26 PM	H2 MFC set to  0.000000
2/18/2013	1:15:26 PM	BCl3 MFC set to  0.000000
2/18/2013	1:15:26 PM	PH3 MFC set to  0.000000
2/18/2013	1:15:26 PM	SiCl4 MFC set to  0.000000
2/18/2013	1:15:26 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	1:15:26 PM	Tube furnace set to 150
2/18/2013	1:15:56 PM	H2 valve closed
2/18/2013	1:15:56 PM	BCl3 valve closed
2/18/2013	1:15:56 PM	PH3 valve closed
2/18/2013	1:15:56 PM	SiCl4 pre valve closed
2/18/2013	1:15:56 PM	SiCl4 post valve closed
2/18/2013	1:15:56 PM	Bypass valve closed
2/18/2013	1:15:56 PM	Bubbler valve closed
2/18/2013	1:15:56 PM	Helium valve opened
2/18/2013	1:15:56 PM	Main Vac valve opened
2/18/2013	1:15:56 PM	Helium MFC set to  20.000000
2/18/2013	1:15:56 PM	H2 MFC set to  0.000000
2/18/2013	1:15:56 PM	BCl3 MFC set to  0.000000
2/18/2013	1:15:56 PM	PH3 MFC set to  0.000000
2/18/2013	1:15:56 PM	SiCl4 MFC set to  0.000000
2/18/2013	1:15:56 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	1:15:56 PM	Tube furnace set to 150
2/18/2013	1:16:26 PM	Helium valve closed
2/18/2013	1:16:26 PM	H2 valve closed
2/18/2013	1:16:26 PM	BCl3 valve closed
2/18/2013	1:16:26 PM	PH3 valve closed
2/18/2013	1:16:26 PM	SiCl4 pre valve closed
2/18/2013	1:16:26 PM	SiCl4 post valve closed
2/18/2013	1:16:26 PM	Bypass valve closed
2/18/2013	1:16:26 PM	Bubbler valve closed
2/18/2013	1:16:26 PM	Main Vac valve opened
2/18/2013	1:16:26 PM	Helium MFC set to  0.000000
2/18/2013	1:16:26 PM	H2 MFC set to  0.000000
2/18/2013	1:16:26 PM	BCl3 MFC set to  0.000000
2/18/2013	1:16:26 PM	PH3 MFC set to  0.000000
2/18/2013	1:16:26 PM	SiCl4 MFC set to  0.000000
2/18/2013	1:16:26 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	1:16:27 PM	Tube furnace set to 150
2/18/2013	1:16:57 PM	H2 valve closed
2/18/2013	1:16:57 PM	BCl3 valve closed
2/18/2013	1:16:57 PM	PH3 valve closed
2/18/2013	1:16:57 PM	SiCl4 pre valve closed
2/18/2013	1:16:57 PM	SiCl4 post valve closed
2/18/2013	1:16:57 PM	Bypass valve closed
2/18/2013	1:16:57 PM	Bubbler valve closed
2/18/2013	1:16:57 PM	Helium valve opened
2/18/2013	1:16:57 PM	Main Vac valve opened
2/18/2013	1:16:57 PM	Helium MFC set to  20.000000
2/18/2013	1:16:57 PM	H2 MFC set to  0.000000
2/18/2013	1:16:57 PM	BCl3 MFC set to  0.000000
2/18/2013	1:16:57 PM	PH3 MFC set to  0.000000
2/18/2013	1:16:57 PM	SiCl4 MFC set to  0.000000
2/18/2013	1:16:57 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	1:16:57 PM	Tube furnace set to 150
2/18/2013	1:18:57 PM	Helium valve closed
2/18/2013	1:18:57 PM	H2 valve closed
2/18/2013	1:18:57 PM	BCl3 valve closed
2/18/2013	1:18:57 PM	PH3 valve closed
2/18/2013	1:18:57 PM	SiCl4 pre valve closed
2/18/2013	1:18:57 PM	SiCl4 post valve closed
2/18/2013	1:18:57 PM	Bypass valve closed
2/18/2013	1:18:57 PM	Bubbler valve closed
2/18/2013	1:18:57 PM	Main Vac valve opened
2/18/2013	1:18:57 PM	Helium MFC set to  0.000000
2/18/2013	1:18:57 PM	H2 MFC set to  0.000000
2/18/2013	1:18:57 PM	BCl3 MFC set to  0.000000
2/18/2013	1:18:57 PM	PH3 MFC set to  0.000000
2/18/2013	1:18:57 PM	SiCl4 MFC set to  0.000000
2/18/2013	1:18:57 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	1:18:57 PM	Tube furnace set to 150
2/18/2013	1:19:27 PM	H2 valve closed
2/18/2013	1:19:27 PM	BCl3 valve closed
2/18/2013	1:19:27 PM	PH3 valve closed
2/18/2013	1:19:27 PM	SiCl4 pre valve closed
2/18/2013	1:19:27 PM	SiCl4 post valve closed
2/18/2013	1:19:27 PM	Bypass valve closed
2/18/2013	1:19:27 PM	Bubbler valve closed
2/18/2013	1:19:27 PM	Helium valve opened
2/18/2013	1:19:27 PM	Main Vac valve opened
2/18/2013	1:19:27 PM	Helium MFC set to  20.000000
2/18/2013	1:19:27 PM	H2 MFC set to  0.000000
2/18/2013	1:19:27 PM	BCl3 MFC set to  0.000000
2/18/2013	1:19:27 PM	PH3 MFC set to  0.000000
2/18/2013	1:19:27 PM	SiCl4 MFC set to  0.000000
2/18/2013	1:19:27 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	1:19:27 PM	Tube furnace set to 150
2/18/2013	1:19:57 PM	Helium valve closed
2/18/2013	1:19:57 PM	H2 valve closed
2/18/2013	1:19:57 PM	BCl3 valve closed
2/18/2013	1:19:57 PM	PH3 valve closed
2/18/2013	1:19:57 PM	SiCl4 pre valve closed
2/18/2013	1:19:57 PM	SiCl4 post valve closed
2/18/2013	1:19:57 PM	Bypass valve closed
2/18/2013	1:19:57 PM	Bubbler valve closed
2/18/2013	1:19:57 PM	Main Vac valve opened
2/18/2013	1:19:57 PM	Helium MFC set to  0.000000
2/18/2013	1:19:57 PM	H2 MFC set to  0.000000
2/18/2013	1:19:57 PM	BCl3 MFC set to  0.000000
2/18/2013	1:19:57 PM	PH3 MFC set to  0.000000
2/18/2013	1:19:57 PM	SiCl4 MFC set to  0.000000
2/18/2013	1:19:57 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	1:19:58 PM	Tube furnace set to 150
2/18/2013	1:20:28 PM	H2 valve closed
2/18/2013	1:20:28 PM	BCl3 valve closed
2/18/2013	1:20:28 PM	PH3 valve closed
2/18/2013	1:20:28 PM	SiCl4 pre valve closed
2/18/2013	1:20:28 PM	SiCl4 post valve closed
2/18/2013	1:20:28 PM	Bypass valve closed
2/18/2013	1:20:28 PM	Bubbler valve closed
2/18/2013	1:20:28 PM	Helium valve opened
2/18/2013	1:20:28 PM	Main Vac valve opened
2/18/2013	1:20:28 PM	Helium MFC set to  20.000000
2/18/2013	1:20:28 PM	H2 MFC set to  0.000000
2/18/2013	1:20:28 PM	BCl3 MFC set to  0.000000
2/18/2013	1:20:28 PM	PH3 MFC set to  0.000000
2/18/2013	1:20:28 PM	SiCl4 MFC set to  0.000000
2/18/2013	1:20:28 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	1:20:28 PM	Tube furnace set to 150
2/18/2013	1:22:28 PM	Helium valve closed
2/18/2013	1:22:28 PM	H2 valve closed
2/18/2013	1:22:28 PM	BCl3 valve closed
2/18/2013	1:22:28 PM	PH3 valve closed
2/18/2013	1:22:28 PM	SiCl4 pre valve closed
2/18/2013	1:22:28 PM	SiCl4 post valve closed
2/18/2013	1:22:28 PM	Bypass valve closed
2/18/2013	1:22:28 PM	Bubbler valve closed
2/18/2013	1:22:28 PM	Main Vac valve opened
2/18/2013	1:22:28 PM	Helium MFC set to  0.000000
2/18/2013	1:22:28 PM	H2 MFC set to  0.000000
2/18/2013	1:22:28 PM	BCl3 MFC set to  0.000000
2/18/2013	1:22:28 PM	PH3 MFC set to  0.000000
2/18/2013	1:22:28 PM	SiCl4 MFC set to  0.000000
2/18/2013	1:22:28 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	1:22:28 PM	Tube furnace set to 150
2/18/2013	1:22:58 PM	H2 valve closed
2/18/2013	1:22:58 PM	BCl3 valve closed
2/18/2013	1:22:58 PM	PH3 valve closed
2/18/2013	1:22:58 PM	SiCl4 pre valve closed
2/18/2013	1:22:58 PM	SiCl4 post valve closed
2/18/2013	1:22:58 PM	Bypass valve closed
2/18/2013	1:22:58 PM	Bubbler valve closed
2/18/2013	1:22:58 PM	Helium valve opened
2/18/2013	1:22:58 PM	Main Vac valve opened
2/18/2013	1:22:58 PM	Helium MFC set to  20.000000
2/18/2013	1:22:58 PM	H2 MFC set to  0.000000
2/18/2013	1:22:58 PM	BCl3 MFC set to  0.000000
2/18/2013	1:22:58 PM	PH3 MFC set to  0.000000
2/18/2013	1:22:58 PM	SiCl4 MFC set to  0.000000
2/18/2013	1:22:58 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	1:22:58 PM	Tube furnace set to 150
2/18/2013	1:23:28 PM	Helium valve closed
2/18/2013	1:23:28 PM	H2 valve closed
2/18/2013	1:23:28 PM	BCl3 valve closed
2/18/2013	1:23:28 PM	PH3 valve closed
2/18/2013	1:23:28 PM	SiCl4 pre valve closed
2/18/2013	1:23:28 PM	SiCl4 post valve closed
2/18/2013	1:23:28 PM	Bypass valve closed
2/18/2013	1:23:28 PM	Bubbler valve closed
2/18/2013	1:23:28 PM	Main Vac valve opened
2/18/2013	1:23:28 PM	Helium MFC set to  0.000000
2/18/2013	1:23:28 PM	H2 MFC set to  0.000000
2/18/2013	1:23:28 PM	BCl3 MFC set to  0.000000
2/18/2013	1:23:28 PM	PH3 MFC set to  0.000000
2/18/2013	1:23:28 PM	SiCl4 MFC set to  0.000000
2/18/2013	1:23:28 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	1:23:29 PM	Tube furnace set to 150
2/18/2013	1:23:59 PM	H2 valve closed
2/18/2013	1:23:59 PM	BCl3 valve closed
2/18/2013	1:23:59 PM	PH3 valve closed
2/18/2013	1:23:59 PM	SiCl4 pre valve closed
2/18/2013	1:23:59 PM	SiCl4 post valve closed
2/18/2013	1:23:59 PM	Bypass valve closed
2/18/2013	1:23:59 PM	Bubbler valve closed
2/18/2013	1:23:59 PM	Helium valve opened
2/18/2013	1:23:59 PM	Main Vac valve opened
2/18/2013	1:23:59 PM	Helium MFC set to  20.000000
2/18/2013	1:23:59 PM	H2 MFC set to  0.000000
2/18/2013	1:23:59 PM	BCl3 MFC set to  0.000000
2/18/2013	1:23:59 PM	PH3 MFC set to  0.000000
2/18/2013	1:23:59 PM	SiCl4 MFC set to  0.000000
2/18/2013	1:23:59 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	1:23:59 PM	Tube furnace set to 150
2/18/2013	1:25:59 PM	Helium valve closed
2/18/2013	1:25:59 PM	H2 valve closed
2/18/2013	1:25:59 PM	BCl3 valve closed
2/18/2013	1:25:59 PM	PH3 valve closed
2/18/2013	1:25:59 PM	SiCl4 pre valve closed
2/18/2013	1:25:59 PM	SiCl4 post valve closed
2/18/2013	1:25:59 PM	Bypass valve closed
2/18/2013	1:25:59 PM	Bubbler valve closed
2/18/2013	1:25:59 PM	Main Vac valve opened
2/18/2013	1:25:59 PM	Helium MFC set to  0.000000
2/18/2013	1:25:59 PM	H2 MFC set to  0.000000
2/18/2013	1:25:59 PM	BCl3 MFC set to  0.000000
2/18/2013	1:25:59 PM	PH3 MFC set to  0.000000
2/18/2013	1:25:59 PM	SiCl4 MFC set to  0.000000
2/18/2013	1:25:59 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	1:25:59 PM	Tube furnace set to 150
2/18/2013	1:26:00 PM	Run finished at 1:26 PM
2/18/2013	1:26:33 PM	Main Vac valve closed
2/18/2013	1:26:37 PM	Main Vac valve opened
2/18/2013	1:28:05 PM	Recipe started at 1:28 PM
2/18/2013	1:28:05 PM	Helium valve closed
2/18/2013	1:28:05 PM	H2 valve closed
2/18/2013	1:28:05 PM	BCl3 valve closed
2/18/2013	1:28:05 PM	PH3 valve closed
2/18/2013	1:28:05 PM	SiCl4 pre valve closed
2/18/2013	1:28:05 PM	SiCl4 post valve closed
2/18/2013	1:28:05 PM	Main Vac valve closed
2/18/2013	1:28:05 PM	Bypass valve closed
2/18/2013	1:28:05 PM	Bubbler valve closed
2/18/2013	1:28:05 PM	Helium MFC set to  0.000000
2/18/2013	1:28:05 PM	H2 MFC set to  0.000000
2/18/2013	1:28:05 PM	BCl3 MFC set to  0.000000
2/18/2013	1:28:05 PM	PH3 MFC set to  0.000000
2/18/2013	1:28:05 PM	SiCl4 MFC set to  0.000000
2/18/2013	1:28:05 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	1:28:05 PM	Tube furnace set to 0
2/18/2013	1:28:08 PM	Helium valve closed
2/18/2013	1:28:08 PM	BCl3 valve closed
2/18/2013	1:28:08 PM	PH3 valve closed
2/18/2013	1:28:08 PM	SiCl4 pre valve closed
2/18/2013	1:28:08 PM	SiCl4 post valve closed
2/18/2013	1:28:08 PM	Main Vac valve closed
2/18/2013	1:28:08 PM	Bypass valve closed
2/18/2013	1:28:08 PM	Bubbler valve closed
2/18/2013	1:28:08 PM	H2 valve opened
2/18/2013	1:28:08 PM	Helium MFC set to  0.000000
2/18/2013	1:28:08 PM	H2 MFC set to  500.000000
2/18/2013	1:28:08 PM	BCl3 MFC set to  0.000000
2/18/2013	1:28:08 PM	PH3 MFC set to  0.000000
2/18/2013	1:28:08 PM	SiCl4 MFC set to  0.000000
2/18/2013	1:28:08 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	1:28:08 PM	Tube furnace set to 0
2/18/2013	1:29:19 PM	Helium valve closed
2/18/2013	1:29:19 PM	BCl3 valve closed
2/18/2013	1:29:19 PM	PH3 valve closed
2/18/2013	1:29:19 PM	SiCl4 pre valve closed
2/18/2013	1:29:19 PM	SiCl4 post valve closed
2/18/2013	1:29:19 PM	Main Vac valve closed
2/18/2013	1:29:19 PM	Bypass valve closed
2/18/2013	1:29:19 PM	H2 valve opened
2/18/2013	1:29:19 PM	Bubbler valve opened
2/18/2013	1:29:19 PM	Helium MFC set to  0.000000
2/18/2013	1:29:19 PM	H2 MFC set to  500.000000
2/18/2013	1:29:19 PM	BCl3 MFC set to  0.000000
2/18/2013	1:29:19 PM	PH3 MFC set to  0.000000
2/18/2013	1:29:19 PM	SiCl4 MFC set to  0.000000
2/18/2013	1:29:19 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	1:29:19 PM	Tube furnace set to 0
2/18/2013	1:29:20 PM	Helium valve closed
2/18/2013	1:29:20 PM	BCl3 valve closed
2/18/2013	1:29:20 PM	PH3 valve closed
2/18/2013	1:29:20 PM	SiCl4 pre valve closed
2/18/2013	1:29:20 PM	SiCl4 post valve closed
2/18/2013	1:29:20 PM	Main Vac valve closed
2/18/2013	1:29:20 PM	Bypass valve closed
2/18/2013	1:29:20 PM	H2 valve opened
2/18/2013	1:29:20 PM	Bubbler valve opened
2/18/2013	1:29:20 PM	Helium MFC set to  0.000000
2/18/2013	1:29:20 PM	H2 MFC set to  500.000000
2/18/2013	1:29:20 PM	BCl3 MFC set to  0.000000
2/18/2013	1:29:20 PM	PH3 MFC set to  0.000000
2/18/2013	1:29:20 PM	SiCl4 MFC set to  0.000000
2/18/2013	1:29:20 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	1:29:20 PM	Tube furnace set to 1000
2/18/2013	1:49:20 PM	Helium valve closed
2/18/2013	1:49:20 PM	PH3 valve closed
2/18/2013	1:49:20 PM	Main Vac valve closed
2/18/2013	1:49:20 PM	Bypass valve closed
2/18/2013	1:49:20 PM	H2 valve opened
2/18/2013	1:49:20 PM	BCl3 valve opened
2/18/2013	1:49:20 PM	SiCl4 pre valve opened
2/18/2013	1:49:20 PM	SiCl4 post valve opened
2/18/2013	1:49:20 PM	Bubbler valve opened
2/18/2013	1:49:20 PM	Helium MFC set to  0.000000
2/18/2013	1:49:20 PM	H2 MFC set to  500.000000
2/18/2013	1:49:20 PM	BCl3 MFC set to  1.000000
2/18/2013	1:49:20 PM	PH3 MFC set to  0.000000
2/18/2013	1:49:20 PM	SiCl4 MFC set to  50.000000
2/18/2013	1:49:20 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	1:49:20 PM	Tube furnace set to 1000
2/18/2013	2:04:20 PM	Helium valve closed
2/18/2013	2:04:20 PM	BCl3 valve closed
2/18/2013	2:04:20 PM	PH3 valve closed
2/18/2013	2:04:20 PM	SiCl4 pre valve closed
2/18/2013	2:04:21 PM	SiCl4 post valve closed
2/18/2013	2:04:21 PM	Main Vac valve closed
2/18/2013	2:04:21 PM	Bypass valve closed
2/18/2013	2:04:21 PM	H2 valve opened
2/18/2013	2:04:21 PM	Bubbler valve opened
2/18/2013	2:04:21 PM	Helium MFC set to  0.000000
2/18/2013	2:04:21 PM	H2 MFC set to  500.000000
2/18/2013	2:04:21 PM	BCl3 MFC set to  0.000000
2/18/2013	2:04:21 PM	PH3 MFC set to  0.000000
2/18/2013	2:04:21 PM	SiCl4 MFC set to  0.000000
2/18/2013	2:04:21 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	2:04:21 PM	Tube furnace set to 750
2/18/2013	2:09:21 PM	H2 valve closed
2/18/2013	2:09:21 PM	BCl3 valve closed
2/18/2013	2:09:21 PM	PH3 valve closed
2/18/2013	2:09:21 PM	SiCl4 pre valve closed
2/18/2013	2:09:21 PM	SiCl4 post valve closed
2/18/2013	2:09:21 PM	Main Vac valve closed
2/18/2013	2:09:21 PM	Bypass valve closed
2/18/2013	2:09:21 PM	Helium valve opened
2/18/2013	2:09:21 PM	Bubbler valve opened
2/18/2013	2:09:21 PM	Helium MFC set to  500.000000
2/18/2013	2:09:21 PM	H2 MFC set to  0.000000
2/18/2013	2:09:21 PM	BCl3 MFC set to  0.000000
2/18/2013	2:09:21 PM	PH3 MFC set to  0.000000
2/18/2013	2:09:21 PM	SiCl4 MFC set to  0.000000
2/18/2013	2:09:21 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	2:09:21 PM	Tube furnace set to 0
2/18/2013	2:13:11 PM	Helium valve closed
2/18/2013	2:13:11 PM	H2 valve closed
2/18/2013	2:13:11 PM	BCl3 valve closed
2/18/2013	2:13:11 PM	PH3 valve closed
2/18/2013	2:13:11 PM	SiCl4 pre valve closed
2/18/2013	2:13:11 PM	SiCl4 post valve closed
2/18/2013	2:13:11 PM	Main Vac valve closed
2/18/2013	2:13:11 PM	Bypass valve closed
2/18/2013	2:13:11 PM	Bubbler valve closed
2/18/2013	2:13:11 PM	Helium MFC set to  0.000000
2/18/2013	2:13:11 PM	H2 MFC set to  0.000000
2/18/2013	2:13:11 PM	BCl3 MFC set to  0.000000
2/18/2013	2:13:11 PM	PH3 MFC set to  0.000000
2/18/2013	2:13:11 PM	SiCl4 MFC set to  0.000000
2/18/2013	2:13:11 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	2:13:11 PM	Tube furnace set to 0
2/18/2013	2:13:12 PM	Run finished at 2:13 PM
2/18/2013	2:13:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/18/2013	2:13:16 PM	Recipe started at 2:13 PM
2/18/2013	2:13:16 PM	Helium valve closed
2/18/2013	2:13:16 PM	H2 valve closed
2/18/2013	2:13:16 PM	BCl3 valve closed
2/18/2013	2:13:16 PM	PH3 valve closed
2/18/2013	2:13:16 PM	SiCl4 pre valve closed
2/18/2013	2:13:16 PM	SiCl4 post valve closed
2/18/2013	2:13:16 PM	Main Vac valve closed
2/18/2013	2:13:16 PM	Bypass valve closed
2/18/2013	2:13:16 PM	Bubbler valve closed
2/18/2013	2:13:16 PM	Helium MFC set to  0.000000
2/18/2013	2:13:16 PM	H2 MFC set to  0.000000
2/18/2013	2:13:16 PM	BCl3 MFC set to  0.000000
2/18/2013	2:13:16 PM	PH3 MFC set to  0.000000
2/18/2013	2:13:16 PM	SiCl4 MFC set to  0.000000
2/18/2013	2:13:16 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	2:13:16 PM	Tube furnace set to 0
2/18/2013	2:13:19 PM	H2 valve closed
2/18/2013	2:13:19 PM	BCl3 valve closed
2/18/2013	2:13:19 PM	PH3 valve closed
2/18/2013	2:13:19 PM	SiCl4 pre valve closed
2/18/2013	2:13:19 PM	SiCl4 post valve closed
2/18/2013	2:13:19 PM	Main Vac valve closed
2/18/2013	2:13:19 PM	Bypass valve closed
2/18/2013	2:13:19 PM	Bubbler valve closed
2/18/2013	2:13:19 PM	Helium valve opened
2/18/2013	2:13:19 PM	Helium MFC set to  500.000000
2/18/2013	2:13:19 PM	H2 MFC set to  0.000000
2/18/2013	2:13:19 PM	BCl3 MFC set to  0.000000
2/18/2013	2:13:19 PM	PH3 MFC set to  0.000000
2/18/2013	2:13:19 PM	SiCl4 MFC set to  0.000000
2/18/2013	2:13:19 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	2:13:19 PM	Tube furnace set to 0
2/18/2013	2:13:19 PM	Helium valve closed
2/18/2013	2:13:19 PM	H2 valve closed
2/18/2013	2:13:19 PM	BCl3 valve closed
2/18/2013	2:13:19 PM	PH3 valve closed
2/18/2013	2:13:19 PM	SiCl4 pre valve closed
2/18/2013	2:13:19 PM	SiCl4 post valve closed
2/18/2013	2:13:19 PM	Main Vac valve closed
2/18/2013	2:13:19 PM	Bypass valve closed
2/18/2013	2:13:19 PM	Bubbler valve closed
2/18/2013	2:13:19 PM	Helium MFC set to  0.000000
2/18/2013	2:13:19 PM	H2 MFC set to  0.000000
2/18/2013	2:13:19 PM	BCl3 MFC set to  0.000000
2/18/2013	2:13:19 PM	PH3 MFC set to  0.000000
2/18/2013	2:13:19 PM	SiCl4 MFC set to  0.000000
2/18/2013	2:13:19 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	2:13:20 PM	Tube furnace set to 0
2/18/2013	2:13:21 PM	Run finished at 2:13 PM
2/18/2013	2:13:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/18/2013	2:15:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/18/2013	2:15:23 PM	Recipe started at 2:15 PM
2/18/2013	2:15:23 PM	Helium valve closed
2/18/2013	2:15:23 PM	H2 valve closed
2/18/2013	2:15:23 PM	BCl3 valve closed
2/18/2013	2:15:23 PM	PH3 valve closed
2/18/2013	2:15:23 PM	SiCl4 pre valve closed
2/18/2013	2:15:23 PM	SiCl4 post valve closed
2/18/2013	2:15:23 PM	Main Vac valve closed
2/18/2013	2:15:23 PM	Bubbler valve closed
2/18/2013	2:15:23 PM	Bypass valve opened
2/18/2013	2:15:23 PM	Helium MFC set to  0.000000
2/18/2013	2:15:23 PM	H2 MFC set to  0.000000
2/18/2013	2:15:23 PM	BCl3 MFC set to  0.000000
2/18/2013	2:15:23 PM	PH3 MFC set to  0.000000
2/18/2013	2:15:23 PM	SiCl4 MFC set to  0.000000
2/18/2013	2:15:23 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	2:15:23 PM	Tube furnace set to 0
2/18/2013	2:16:28 PM	Helium valve closed
2/18/2013	2:16:28 PM	H2 valve closed
2/18/2013	2:16:28 PM	BCl3 valve closed
2/18/2013	2:16:28 PM	PH3 valve closed
2/18/2013	2:16:28 PM	SiCl4 pre valve closed
2/18/2013	2:16:28 PM	SiCl4 post valve closed
2/18/2013	2:16:28 PM	Main Vac valve closed
2/18/2013	2:16:28 PM	Bubbler valve closed
2/18/2013	2:16:28 PM	Bypass valve opened
2/18/2013	2:16:28 PM	Helium MFC set to  0.000000
2/18/2013	2:16:28 PM	H2 MFC set to  0.000000
2/18/2013	2:16:28 PM	BCl3 MFC set to  0.000000
2/18/2013	2:16:28 PM	PH3 MFC set to  0.000000
2/18/2013	2:16:28 PM	SiCl4 MFC set to  0.000000
2/18/2013	2:16:28 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	2:16:29 PM	Tube furnace set to 0
2/18/2013	2:17:29 PM	Helium valve closed
2/18/2013	2:17:29 PM	H2 valve closed
2/18/2013	2:17:29 PM	BCl3 valve closed
2/18/2013	2:17:29 PM	PH3 valve closed
2/18/2013	2:17:29 PM	SiCl4 pre valve closed
2/18/2013	2:17:29 PM	SiCl4 post valve closed
2/18/2013	2:17:29 PM	Bypass valve closed
2/18/2013	2:17:29 PM	Bubbler valve closed
2/18/2013	2:17:29 PM	Main Vac valve opened
2/18/2013	2:17:29 PM	Helium MFC set to  0.000000
2/18/2013	2:17:29 PM	H2 MFC set to  0.000000
2/18/2013	2:17:29 PM	BCl3 MFC set to  0.000000
2/18/2013	2:17:29 PM	PH3 MFC set to  0.000000
2/18/2013	2:17:29 PM	SiCl4 MFC set to  0.000000
2/18/2013	2:17:29 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	2:17:29 PM	Tube furnace set to 0
2/18/2013	2:17:30 PM	Run finished at 2:17 PM
2/18/2013	2:17:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/18/2013	2:20:08 PM	Recipe started at 2:20 PM
2/18/2013	2:20:08 PM	Helium valve closed
2/18/2013	2:20:08 PM	H2 valve closed
2/18/2013	2:20:08 PM	BCl3 valve closed
2/18/2013	2:20:08 PM	PH3 valve closed
2/18/2013	2:20:08 PM	SiCl4 pre valve closed
2/18/2013	2:20:08 PM	SiCl4 post valve closed
2/18/2013	2:20:08 PM	Bypass valve closed
2/18/2013	2:20:08 PM	Bubbler valve closed
2/18/2013	2:20:08 PM	Main Vac valve opened
2/18/2013	2:20:08 PM	Helium MFC set to  0.000000
2/18/2013	2:20:08 PM	H2 MFC set to  0.000000
2/18/2013	2:20:08 PM	BCl3 MFC set to  0.000000
2/18/2013	2:20:08 PM	PH3 MFC set to  0.000000
2/18/2013	2:20:08 PM	SiCl4 MFC set to  0.000000
2/18/2013	2:20:08 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	2:20:08 PM	Tube furnace set to 150
2/18/2013	2:20:38 PM	H2 valve closed
2/18/2013	2:20:38 PM	BCl3 valve closed
2/18/2013	2:20:38 PM	PH3 valve closed
2/18/2013	2:20:38 PM	SiCl4 pre valve closed
2/18/2013	2:20:38 PM	SiCl4 post valve closed
2/18/2013	2:20:38 PM	Bypass valve closed
2/18/2013	2:20:38 PM	Bubbler valve closed
2/18/2013	2:20:38 PM	Helium valve opened
2/18/2013	2:20:38 PM	Main Vac valve opened
2/18/2013	2:20:38 PM	Helium MFC set to  20.000000
2/18/2013	2:20:38 PM	H2 MFC set to  0.000000
2/18/2013	2:20:38 PM	BCl3 MFC set to  0.000000
2/18/2013	2:20:38 PM	PH3 MFC set to  0.000000
2/18/2013	2:20:38 PM	SiCl4 MFC set to  0.000000
2/18/2013	2:20:38 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	2:20:38 PM	Tube furnace set to 150
2/18/2013	2:21:08 PM	Helium valve closed
2/18/2013	2:21:08 PM	H2 valve closed
2/18/2013	2:21:08 PM	BCl3 valve closed
2/18/2013	2:21:08 PM	PH3 valve closed
2/18/2013	2:21:08 PM	SiCl4 pre valve closed
2/18/2013	2:21:08 PM	SiCl4 post valve closed
2/18/2013	2:21:08 PM	Bypass valve closed
2/18/2013	2:21:08 PM	Bubbler valve closed
2/18/2013	2:21:08 PM	Main Vac valve opened
2/18/2013	2:21:08 PM	Helium MFC set to  0.000000
2/18/2013	2:21:08 PM	H2 MFC set to  0.000000
2/18/2013	2:21:08 PM	BCl3 MFC set to  0.000000
2/18/2013	2:21:08 PM	PH3 MFC set to  0.000000
2/18/2013	2:21:08 PM	SiCl4 MFC set to  0.000000
2/18/2013	2:21:08 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	2:21:08 PM	Tube furnace set to 150
2/18/2013	2:21:38 PM	H2 valve closed
2/18/2013	2:21:38 PM	BCl3 valve closed
2/18/2013	2:21:38 PM	PH3 valve closed
2/18/2013	2:21:38 PM	SiCl4 pre valve closed
2/18/2013	2:21:38 PM	SiCl4 post valve closed
2/18/2013	2:21:38 PM	Bypass valve closed
2/18/2013	2:21:38 PM	Bubbler valve closed
2/18/2013	2:21:38 PM	Helium valve opened
2/18/2013	2:21:38 PM	Main Vac valve opened
2/18/2013	2:21:38 PM	Helium MFC set to  20.000000
2/18/2013	2:21:38 PM	H2 MFC set to  0.000000
2/18/2013	2:21:38 PM	BCl3 MFC set to  0.000000
2/18/2013	2:21:38 PM	PH3 MFC set to  0.000000
2/18/2013	2:21:38 PM	SiCl4 MFC set to  0.000000
2/18/2013	2:21:38 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	2:21:39 PM	Tube furnace set to 150
2/18/2013	2:22:09 PM	Helium valve closed
2/18/2013	2:22:09 PM	H2 valve closed
2/18/2013	2:22:09 PM	BCl3 valve closed
2/18/2013	2:22:09 PM	PH3 valve closed
2/18/2013	2:22:09 PM	SiCl4 pre valve closed
2/18/2013	2:22:09 PM	SiCl4 post valve closed
2/18/2013	2:22:09 PM	Bypass valve closed
2/18/2013	2:22:09 PM	Bubbler valve closed
2/18/2013	2:22:09 PM	Main Vac valve opened
2/18/2013	2:22:09 PM	Helium MFC set to  0.000000
2/18/2013	2:22:09 PM	H2 MFC set to  0.000000
2/18/2013	2:22:09 PM	BCl3 MFC set to  0.000000
2/18/2013	2:22:09 PM	PH3 MFC set to  0.000000
2/18/2013	2:22:09 PM	SiCl4 MFC set to  0.000000
2/18/2013	2:22:09 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	2:22:09 PM	Tube furnace set to 150
2/18/2013	2:22:39 PM	H2 valve closed
2/18/2013	2:22:39 PM	BCl3 valve closed
2/18/2013	2:22:39 PM	PH3 valve closed
2/18/2013	2:22:39 PM	SiCl4 pre valve closed
2/18/2013	2:22:39 PM	SiCl4 post valve closed
2/18/2013	2:22:39 PM	Bypass valve closed
2/18/2013	2:22:39 PM	Bubbler valve closed
2/18/2013	2:22:39 PM	Helium valve opened
2/18/2013	2:22:39 PM	Main Vac valve opened
2/18/2013	2:22:39 PM	Helium MFC set to  20.000000
2/18/2013	2:22:39 PM	H2 MFC set to  0.000000
2/18/2013	2:22:39 PM	BCl3 MFC set to  0.000000
2/18/2013	2:22:39 PM	PH3 MFC set to  0.000000
2/18/2013	2:22:39 PM	SiCl4 MFC set to  0.000000
2/18/2013	2:22:39 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	2:22:39 PM	Tube furnace set to 150
2/18/2013	2:24:39 PM	Helium valve closed
2/18/2013	2:24:39 PM	H2 valve closed
2/18/2013	2:24:39 PM	BCl3 valve closed
2/18/2013	2:24:39 PM	PH3 valve closed
2/18/2013	2:24:39 PM	SiCl4 pre valve closed
2/18/2013	2:24:39 PM	SiCl4 post valve closed
2/18/2013	2:24:39 PM	Bypass valve closed
2/18/2013	2:24:39 PM	Bubbler valve closed
2/18/2013	2:24:39 PM	Main Vac valve opened
2/18/2013	2:24:39 PM	Helium MFC set to  0.000000
2/18/2013	2:24:39 PM	H2 MFC set to  0.000000
2/18/2013	2:24:39 PM	BCl3 MFC set to  0.000000
2/18/2013	2:24:39 PM	PH3 MFC set to  0.000000
2/18/2013	2:24:39 PM	SiCl4 MFC set to  0.000000
2/18/2013	2:24:39 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	2:24:39 PM	Tube furnace set to 150
2/18/2013	2:25:09 PM	H2 valve closed
2/18/2013	2:25:09 PM	BCl3 valve closed
2/18/2013	2:25:09 PM	PH3 valve closed
2/18/2013	2:25:09 PM	SiCl4 pre valve closed
2/18/2013	2:25:09 PM	SiCl4 post valve closed
2/18/2013	2:25:09 PM	Bypass valve closed
2/18/2013	2:25:09 PM	Bubbler valve closed
2/18/2013	2:25:09 PM	Helium valve opened
2/18/2013	2:25:09 PM	Main Vac valve opened
2/18/2013	2:25:09 PM	Helium MFC set to  20.000000
2/18/2013	2:25:09 PM	H2 MFC set to  0.000000
2/18/2013	2:25:09 PM	BCl3 MFC set to  0.000000
2/18/2013	2:25:09 PM	PH3 MFC set to  0.000000
2/18/2013	2:25:09 PM	SiCl4 MFC set to  0.000000
2/18/2013	2:25:09 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	2:25:10 PM	Tube furnace set to 150
2/18/2013	2:25:40 PM	Helium valve closed
2/18/2013	2:25:40 PM	H2 valve closed
2/18/2013	2:25:40 PM	BCl3 valve closed
2/18/2013	2:25:40 PM	PH3 valve closed
2/18/2013	2:25:40 PM	SiCl4 pre valve closed
2/18/2013	2:25:40 PM	SiCl4 post valve closed
2/18/2013	2:25:40 PM	Bypass valve closed
2/18/2013	2:25:40 PM	Bubbler valve closed
2/18/2013	2:25:40 PM	Main Vac valve opened
2/18/2013	2:25:40 PM	Helium MFC set to  0.000000
2/18/2013	2:25:40 PM	H2 MFC set to  0.000000
2/18/2013	2:25:40 PM	BCl3 MFC set to  0.000000
2/18/2013	2:25:40 PM	PH3 MFC set to  0.000000
2/18/2013	2:25:40 PM	SiCl4 MFC set to  0.000000
2/18/2013	2:25:40 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	2:25:40 PM	Tube furnace set to 150
2/18/2013	2:26:10 PM	H2 valve closed
2/18/2013	2:26:10 PM	BCl3 valve closed
2/18/2013	2:26:10 PM	PH3 valve closed
2/18/2013	2:26:10 PM	SiCl4 pre valve closed
2/18/2013	2:26:10 PM	SiCl4 post valve closed
2/18/2013	2:26:10 PM	Bypass valve closed
2/18/2013	2:26:10 PM	Bubbler valve closed
2/18/2013	2:26:10 PM	Helium valve opened
2/18/2013	2:26:10 PM	Main Vac valve opened
2/18/2013	2:26:10 PM	Helium MFC set to  20.000000
2/18/2013	2:26:10 PM	H2 MFC set to  0.000000
2/18/2013	2:26:10 PM	BCl3 MFC set to  0.000000
2/18/2013	2:26:10 PM	PH3 MFC set to  0.000000
2/18/2013	2:26:10 PM	SiCl4 MFC set to  0.000000
2/18/2013	2:26:10 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	2:26:10 PM	Tube furnace set to 150
2/18/2013	2:26:40 PM	Helium valve closed
2/18/2013	2:26:40 PM	H2 valve closed
2/18/2013	2:26:40 PM	BCl3 valve closed
2/18/2013	2:26:40 PM	PH3 valve closed
2/18/2013	2:26:40 PM	SiCl4 pre valve closed
2/18/2013	2:26:40 PM	SiCl4 post valve closed
2/18/2013	2:26:40 PM	Bypass valve closed
2/18/2013	2:26:40 PM	Bubbler valve closed
2/18/2013	2:26:40 PM	Main Vac valve opened
2/18/2013	2:26:40 PM	Helium MFC set to  0.000000
2/18/2013	2:26:40 PM	H2 MFC set to  0.000000
2/18/2013	2:26:40 PM	BCl3 MFC set to  0.000000
2/18/2013	2:26:40 PM	PH3 MFC set to  0.000000
2/18/2013	2:26:40 PM	SiCl4 MFC set to  0.000000
2/18/2013	2:26:40 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	2:26:40 PM	Tube furnace set to 150
2/18/2013	2:27:10 PM	H2 valve closed
2/18/2013	2:27:10 PM	BCl3 valve closed
2/18/2013	2:27:10 PM	PH3 valve closed
2/18/2013	2:27:10 PM	SiCl4 pre valve closed
2/18/2013	2:27:10 PM	SiCl4 post valve closed
2/18/2013	2:27:10 PM	Bypass valve closed
2/18/2013	2:27:10 PM	Bubbler valve closed
2/18/2013	2:27:10 PM	Helium valve opened
2/18/2013	2:27:10 PM	Main Vac valve opened
2/18/2013	2:27:10 PM	Helium MFC set to  20.000000
2/18/2013	2:27:10 PM	H2 MFC set to  0.000000
2/18/2013	2:27:10 PM	BCl3 MFC set to  0.000000
2/18/2013	2:27:10 PM	PH3 MFC set to  0.000000
2/18/2013	2:27:10 PM	SiCl4 MFC set to  0.000000
2/18/2013	2:27:10 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	2:27:11 PM	Tube furnace set to 150
2/18/2013	2:29:11 PM	Helium valve closed
2/18/2013	2:29:11 PM	H2 valve closed
2/18/2013	2:29:11 PM	BCl3 valve closed
2/18/2013	2:29:11 PM	PH3 valve closed
2/18/2013	2:29:11 PM	SiCl4 pre valve closed
2/18/2013	2:29:11 PM	SiCl4 post valve closed
2/18/2013	2:29:11 PM	Bypass valve closed
2/18/2013	2:29:11 PM	Bubbler valve closed
2/18/2013	2:29:11 PM	Main Vac valve opened
2/18/2013	2:29:11 PM	Helium MFC set to  0.000000
2/18/2013	2:29:11 PM	H2 MFC set to  0.000000
2/18/2013	2:29:11 PM	BCl3 MFC set to  0.000000
2/18/2013	2:29:11 PM	PH3 MFC set to  0.000000
2/18/2013	2:29:11 PM	SiCl4 MFC set to  0.000000
2/18/2013	2:29:11 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	2:29:11 PM	Tube furnace set to 150
2/18/2013	2:29:41 PM	H2 valve closed
2/18/2013	2:29:41 PM	BCl3 valve closed
2/18/2013	2:29:41 PM	PH3 valve closed
2/18/2013	2:29:41 PM	SiCl4 pre valve closed
2/18/2013	2:29:41 PM	SiCl4 post valve closed
2/18/2013	2:29:41 PM	Bypass valve closed
2/18/2013	2:29:41 PM	Bubbler valve closed
2/18/2013	2:29:41 PM	Helium valve opened
2/18/2013	2:29:41 PM	Main Vac valve opened
2/18/2013	2:29:41 PM	Helium MFC set to  20.000000
2/18/2013	2:29:41 PM	H2 MFC set to  0.000000
2/18/2013	2:29:41 PM	BCl3 MFC set to  0.000000
2/18/2013	2:29:41 PM	PH3 MFC set to  0.000000
2/18/2013	2:29:41 PM	SiCl4 MFC set to  0.000000
2/18/2013	2:29:41 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	2:29:41 PM	Tube furnace set to 150
2/18/2013	2:30:11 PM	Helium valve closed
2/18/2013	2:30:11 PM	H2 valve closed
2/18/2013	2:30:11 PM	BCl3 valve closed
2/18/2013	2:30:11 PM	PH3 valve closed
2/18/2013	2:30:11 PM	SiCl4 pre valve closed
2/18/2013	2:30:11 PM	SiCl4 post valve closed
2/18/2013	2:30:11 PM	Bypass valve closed
2/18/2013	2:30:11 PM	Bubbler valve closed
2/18/2013	2:30:11 PM	Main Vac valve opened
2/18/2013	2:30:11 PM	Helium MFC set to  0.000000
2/18/2013	2:30:11 PM	H2 MFC set to  0.000000
2/18/2013	2:30:11 PM	BCl3 MFC set to  0.000000
2/18/2013	2:30:11 PM	PH3 MFC set to  0.000000
2/18/2013	2:30:11 PM	SiCl4 MFC set to  0.000000
2/18/2013	2:30:11 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	2:30:11 PM	Tube furnace set to 150
2/18/2013	2:30:41 PM	H2 valve closed
2/18/2013	2:30:41 PM	BCl3 valve closed
2/18/2013	2:30:41 PM	PH3 valve closed
2/18/2013	2:30:41 PM	SiCl4 pre valve closed
2/18/2013	2:30:41 PM	SiCl4 post valve closed
2/18/2013	2:30:41 PM	Bypass valve closed
2/18/2013	2:30:41 PM	Bubbler valve closed
2/18/2013	2:30:41 PM	Helium valve opened
2/18/2013	2:30:41 PM	Main Vac valve opened
2/18/2013	2:30:41 PM	Helium MFC set to  20.000000
2/18/2013	2:30:41 PM	H2 MFC set to  0.000000
2/18/2013	2:30:41 PM	BCl3 MFC set to  0.000000
2/18/2013	2:30:41 PM	PH3 MFC set to  0.000000
2/18/2013	2:30:41 PM	SiCl4 MFC set to  0.000000
2/18/2013	2:30:41 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	2:30:42 PM	Tube furnace set to 150
2/18/2013	2:32:42 PM	Helium valve closed
2/18/2013	2:32:42 PM	H2 valve closed
2/18/2013	2:32:42 PM	BCl3 valve closed
2/18/2013	2:32:42 PM	PH3 valve closed
2/18/2013	2:32:42 PM	SiCl4 pre valve closed
2/18/2013	2:32:42 PM	SiCl4 post valve closed
2/18/2013	2:32:42 PM	Bypass valve closed
2/18/2013	2:32:42 PM	Bubbler valve closed
2/18/2013	2:32:42 PM	Main Vac valve opened
2/18/2013	2:32:42 PM	Helium MFC set to  0.000000
2/18/2013	2:32:42 PM	H2 MFC set to  0.000000
2/18/2013	2:32:42 PM	BCl3 MFC set to  0.000000
2/18/2013	2:32:42 PM	PH3 MFC set to  0.000000
2/18/2013	2:32:42 PM	SiCl4 MFC set to  0.000000
2/18/2013	2:32:42 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	2:32:42 PM	Tube furnace set to 150
2/18/2013	2:33:12 PM	H2 valve closed
2/18/2013	2:33:12 PM	BCl3 valve closed
2/18/2013	2:33:12 PM	PH3 valve closed
2/18/2013	2:33:12 PM	SiCl4 pre valve closed
2/18/2013	2:33:12 PM	SiCl4 post valve closed
2/18/2013	2:33:12 PM	Bypass valve closed
2/18/2013	2:33:12 PM	Bubbler valve closed
2/18/2013	2:33:12 PM	Helium valve opened
2/18/2013	2:33:12 PM	Main Vac valve opened
2/18/2013	2:33:12 PM	Helium MFC set to  20.000000
2/18/2013	2:33:12 PM	H2 MFC set to  0.000000
2/18/2013	2:33:12 PM	BCl3 MFC set to  0.000000
2/18/2013	2:33:12 PM	PH3 MFC set to  0.000000
2/18/2013	2:33:12 PM	SiCl4 MFC set to  0.000000
2/18/2013	2:33:12 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	2:33:12 PM	Tube furnace set to 150
2/18/2013	2:33:42 PM	Helium valve closed
2/18/2013	2:33:42 PM	H2 valve closed
2/18/2013	2:33:42 PM	BCl3 valve closed
2/18/2013	2:33:42 PM	PH3 valve closed
2/18/2013	2:33:42 PM	SiCl4 pre valve closed
2/18/2013	2:33:42 PM	SiCl4 post valve closed
2/18/2013	2:33:42 PM	Bypass valve closed
2/18/2013	2:33:42 PM	Bubbler valve closed
2/18/2013	2:33:42 PM	Main Vac valve opened
2/18/2013	2:33:42 PM	Helium MFC set to  0.000000
2/18/2013	2:33:42 PM	H2 MFC set to  0.000000
2/18/2013	2:33:42 PM	BCl3 MFC set to  0.000000
2/18/2013	2:33:42 PM	PH3 MFC set to  0.000000
2/18/2013	2:33:42 PM	SiCl4 MFC set to  0.000000
2/18/2013	2:33:42 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	2:33:42 PM	Tube furnace set to 150
2/18/2013	2:34:12 PM	H2 valve closed
2/18/2013	2:34:12 PM	BCl3 valve closed
2/18/2013	2:34:12 PM	PH3 valve closed
2/18/2013	2:34:12 PM	SiCl4 pre valve closed
2/18/2013	2:34:12 PM	SiCl4 post valve closed
2/18/2013	2:34:12 PM	Bypass valve closed
2/18/2013	2:34:12 PM	Bubbler valve closed
2/18/2013	2:34:12 PM	Helium valve opened
2/18/2013	2:34:12 PM	Main Vac valve opened
2/18/2013	2:34:12 PM	Helium MFC set to  20.000000
2/18/2013	2:34:12 PM	H2 MFC set to  0.000000
2/18/2013	2:34:12 PM	BCl3 MFC set to  0.000000
2/18/2013	2:34:12 PM	PH3 MFC set to  0.000000
2/18/2013	2:34:12 PM	SiCl4 MFC set to  0.000000
2/18/2013	2:34:12 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	2:34:13 PM	Tube furnace set to 150
2/18/2013	2:36:13 PM	Helium valve closed
2/18/2013	2:36:13 PM	H2 valve closed
2/18/2013	2:36:13 PM	BCl3 valve closed
2/18/2013	2:36:13 PM	PH3 valve closed
2/18/2013	2:36:13 PM	SiCl4 pre valve closed
2/18/2013	2:36:13 PM	SiCl4 post valve closed
2/18/2013	2:36:13 PM	Bypass valve closed
2/18/2013	2:36:13 PM	Bubbler valve closed
2/18/2013	2:36:13 PM	Main Vac valve opened
2/18/2013	2:36:13 PM	Helium MFC set to  0.000000
2/18/2013	2:36:13 PM	H2 MFC set to  0.000000
2/18/2013	2:36:13 PM	BCl3 MFC set to  0.000000
2/18/2013	2:36:13 PM	PH3 MFC set to  0.000000
2/18/2013	2:36:13 PM	SiCl4 MFC set to  0.000000
2/18/2013	2:36:13 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	2:36:13 PM	Tube furnace set to 150
2/18/2013	2:36:14 PM	Run finished at 2:36 PM
2/18/2013	2:46:41 PM	Recipe started at 2:46 PM
2/18/2013	2:46:41 PM	Helium valve closed
2/18/2013	2:46:41 PM	H2 valve closed
2/18/2013	2:46:41 PM	BCl3 valve closed
2/18/2013	2:46:41 PM	PH3 valve closed
2/18/2013	2:46:41 PM	SiCl4 pre valve closed
2/18/2013	2:46:41 PM	SiCl4 post valve closed
2/18/2013	2:46:41 PM	Bypass valve closed
2/18/2013	2:46:41 PM	Bubbler valve closed
2/18/2013	2:46:41 PM	Main Vac valve opened
2/18/2013	2:46:41 PM	Helium MFC set to  0.000000
2/18/2013	2:46:41 PM	H2 MFC set to  0.000000
2/18/2013	2:46:41 PM	BCl3 MFC set to  0.000000
2/18/2013	2:46:41 PM	PH3 MFC set to  0.000000
2/18/2013	2:46:41 PM	SiCl4 MFC set to  0.000000
2/18/2013	2:46:41 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	2:46:41 PM	Tube furnace set to 150
2/18/2013	2:47:11 PM	H2 valve closed
2/18/2013	2:47:11 PM	BCl3 valve closed
2/18/2013	2:47:11 PM	PH3 valve closed
2/18/2013	2:47:11 PM	SiCl4 pre valve closed
2/18/2013	2:47:11 PM	SiCl4 post valve closed
2/18/2013	2:47:11 PM	Bypass valve closed
2/18/2013	2:47:11 PM	Bubbler valve closed
2/18/2013	2:47:11 PM	Helium valve opened
2/18/2013	2:47:11 PM	Main Vac valve opened
2/18/2013	2:47:11 PM	Helium MFC set to  20.000000
2/18/2013	2:47:11 PM	H2 MFC set to  0.000000
2/18/2013	2:47:11 PM	BCl3 MFC set to  0.000000
2/18/2013	2:47:11 PM	PH3 MFC set to  0.000000
2/18/2013	2:47:11 PM	SiCl4 MFC set to  0.000000
2/18/2013	2:47:11 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	2:47:11 PM	Tube furnace set to 150
2/18/2013	2:47:41 PM	Helium valve closed
2/18/2013	2:47:41 PM	H2 valve closed
2/18/2013	2:47:41 PM	BCl3 valve closed
2/18/2013	2:47:41 PM	PH3 valve closed
2/18/2013	2:47:41 PM	SiCl4 pre valve closed
2/18/2013	2:47:41 PM	SiCl4 post valve closed
2/18/2013	2:47:41 PM	Bypass valve closed
2/18/2013	2:47:41 PM	Bubbler valve closed
2/18/2013	2:47:41 PM	Main Vac valve opened
2/18/2013	2:47:41 PM	Helium MFC set to  0.000000
2/18/2013	2:47:41 PM	H2 MFC set to  0.000000
2/18/2013	2:47:41 PM	BCl3 MFC set to  0.000000
2/18/2013	2:47:41 PM	PH3 MFC set to  0.000000
2/18/2013	2:47:41 PM	SiCl4 MFC set to  0.000000
2/18/2013	2:47:41 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	2:47:41 PM	Tube furnace set to 150
2/18/2013	2:48:11 PM	H2 valve closed
2/18/2013	2:48:11 PM	BCl3 valve closed
2/18/2013	2:48:11 PM	PH3 valve closed
2/18/2013	2:48:11 PM	SiCl4 pre valve closed
2/18/2013	2:48:11 PM	SiCl4 post valve closed
2/18/2013	2:48:11 PM	Bypass valve closed
2/18/2013	2:48:11 PM	Bubbler valve closed
2/18/2013	2:48:11 PM	Helium valve opened
2/18/2013	2:48:11 PM	Main Vac valve opened
2/18/2013	2:48:11 PM	Helium MFC set to  20.000000
2/18/2013	2:48:11 PM	H2 MFC set to  0.000000
2/18/2013	2:48:11 PM	BCl3 MFC set to  0.000000
2/18/2013	2:48:11 PM	PH3 MFC set to  0.000000
2/18/2013	2:48:11 PM	SiCl4 MFC set to  0.000000
2/18/2013	2:48:11 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	2:48:12 PM	Tube furnace set to 150
2/18/2013	2:48:42 PM	Helium valve closed
2/18/2013	2:48:42 PM	H2 valve closed
2/18/2013	2:48:42 PM	BCl3 valve closed
2/18/2013	2:48:42 PM	PH3 valve closed
2/18/2013	2:48:42 PM	SiCl4 pre valve closed
2/18/2013	2:48:42 PM	SiCl4 post valve closed
2/18/2013	2:48:42 PM	Bypass valve closed
2/18/2013	2:48:42 PM	Bubbler valve closed
2/18/2013	2:48:42 PM	Main Vac valve opened
2/18/2013	2:48:42 PM	Helium MFC set to  0.000000
2/18/2013	2:48:42 PM	H2 MFC set to  0.000000
2/18/2013	2:48:42 PM	BCl3 MFC set to  0.000000
2/18/2013	2:48:42 PM	PH3 MFC set to  0.000000
2/18/2013	2:48:42 PM	SiCl4 MFC set to  0.000000
2/18/2013	2:48:42 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	2:48:42 PM	Tube furnace set to 150
2/18/2013	2:49:12 PM	H2 valve closed
2/18/2013	2:49:12 PM	BCl3 valve closed
2/18/2013	2:49:12 PM	PH3 valve closed
2/18/2013	2:49:12 PM	SiCl4 pre valve closed
2/18/2013	2:49:12 PM	SiCl4 post valve closed
2/18/2013	2:49:12 PM	Bypass valve closed
2/18/2013	2:49:12 PM	Bubbler valve closed
2/18/2013	2:49:12 PM	Helium valve opened
2/18/2013	2:49:12 PM	Main Vac valve opened
2/18/2013	2:49:12 PM	Helium MFC set to  20.000000
2/18/2013	2:49:12 PM	H2 MFC set to  0.000000
2/18/2013	2:49:12 PM	BCl3 MFC set to  0.000000
2/18/2013	2:49:12 PM	PH3 MFC set to  0.000000
2/18/2013	2:49:12 PM	SiCl4 MFC set to  0.000000
2/18/2013	2:49:12 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	2:49:12 PM	Tube furnace set to 150
2/18/2013	2:51:12 PM	Helium valve closed
2/18/2013	2:51:12 PM	H2 valve closed
2/18/2013	2:51:12 PM	BCl3 valve closed
2/18/2013	2:51:12 PM	PH3 valve closed
2/18/2013	2:51:12 PM	SiCl4 pre valve closed
2/18/2013	2:51:12 PM	SiCl4 post valve closed
2/18/2013	2:51:12 PM	Bypass valve closed
2/18/2013	2:51:12 PM	Bubbler valve closed
2/18/2013	2:51:12 PM	Main Vac valve opened
2/18/2013	2:51:12 PM	Helium MFC set to  0.000000
2/18/2013	2:51:12 PM	H2 MFC set to  0.000000
2/18/2013	2:51:12 PM	BCl3 MFC set to  0.000000
2/18/2013	2:51:12 PM	PH3 MFC set to  0.000000
2/18/2013	2:51:12 PM	SiCl4 MFC set to  0.000000
2/18/2013	2:51:12 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	2:51:12 PM	Tube furnace set to 150
2/18/2013	2:51:42 PM	H2 valve closed
2/18/2013	2:51:42 PM	BCl3 valve closed
2/18/2013	2:51:42 PM	PH3 valve closed
2/18/2013	2:51:42 PM	SiCl4 pre valve closed
2/18/2013	2:51:42 PM	SiCl4 post valve closed
2/18/2013	2:51:42 PM	Bypass valve closed
2/18/2013	2:51:42 PM	Bubbler valve closed
2/18/2013	2:51:42 PM	Helium valve opened
2/18/2013	2:51:42 PM	Main Vac valve opened
2/18/2013	2:51:42 PM	Helium MFC set to  20.000000
2/18/2013	2:51:42 PM	H2 MFC set to  0.000000
2/18/2013	2:51:42 PM	BCl3 MFC set to  0.000000
2/18/2013	2:51:42 PM	PH3 MFC set to  0.000000
2/18/2013	2:51:42 PM	SiCl4 MFC set to  0.000000
2/18/2013	2:51:42 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	2:51:43 PM	Tube furnace set to 150
2/18/2013	2:52:13 PM	Helium valve closed
2/18/2013	2:52:13 PM	H2 valve closed
2/18/2013	2:52:13 PM	BCl3 valve closed
2/18/2013	2:52:13 PM	PH3 valve closed
2/18/2013	2:52:13 PM	SiCl4 pre valve closed
2/18/2013	2:52:13 PM	SiCl4 post valve closed
2/18/2013	2:52:13 PM	Bypass valve closed
2/18/2013	2:52:13 PM	Bubbler valve closed
2/18/2013	2:52:13 PM	Main Vac valve opened
2/18/2013	2:52:13 PM	Helium MFC set to  0.000000
2/18/2013	2:52:13 PM	H2 MFC set to  0.000000
2/18/2013	2:52:13 PM	BCl3 MFC set to  0.000000
2/18/2013	2:52:13 PM	PH3 MFC set to  0.000000
2/18/2013	2:52:13 PM	SiCl4 MFC set to  0.000000
2/18/2013	2:52:13 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	2:52:13 PM	Tube furnace set to 150
2/18/2013	2:52:38 PM	Run aborted at 2:52 PM
2/18/2013	2:52:38 PM	Helium valve closed
2/18/2013	2:52:38 PM	H2 valve closed
2/18/2013	2:52:38 PM	BCl3 valve closed
2/18/2013	2:52:38 PM	PH3 valve closed
2/18/2013	2:52:38 PM	SiCl4 pre valve closed
2/18/2013	2:52:38 PM	SiCl4 post valve closed
2/18/2013	2:52:38 PM	Bypass valve closed
2/18/2013	2:52:38 PM	Main Vac valve closed
2/18/2013	2:52:38 PM	Bubbler valve closed
2/18/2013	2:52:38 PM	Helium MFC set to  0.000000
2/18/2013	2:52:38 PM	H2 MFC set to  0.000000
2/18/2013	2:52:38 PM	BCl3 MFC set to  0.000000
2/18/2013	2:52:38 PM	PH3 MFC set to  0.000000
2/18/2013	2:52:38 PM	SiCl4 MFC set to  0.000000
2/18/2013	2:52:39 PM	Tube furnace set to 0
2/18/2013	2:52:45 PM	Main Vac valve opened
2/18/2013	2:53:13 PM	Recipe started at 2:53 PM
2/18/2013	2:53:13 PM	Helium valve closed
2/18/2013	2:53:13 PM	H2 valve closed
2/18/2013	2:53:13 PM	BCl3 valve closed
2/18/2013	2:53:13 PM	PH3 valve closed
2/18/2013	2:53:13 PM	SiCl4 pre valve closed
2/18/2013	2:53:13 PM	SiCl4 post valve closed
2/18/2013	2:53:13 PM	Bypass valve closed
2/18/2013	2:53:13 PM	Bubbler valve closed
2/18/2013	2:53:13 PM	Main Vac valve opened
2/18/2013	2:53:13 PM	Helium MFC set to  0.000000
2/18/2013	2:53:13 PM	H2 MFC set to  0.000000
2/18/2013	2:53:13 PM	BCl3 MFC set to  0.000000
2/18/2013	2:53:13 PM	PH3 MFC set to  0.000000
2/18/2013	2:53:13 PM	SiCl4 MFC set to  0.000000
2/18/2013	2:53:13 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	2:53:13 PM	Tube furnace set to 150
2/18/2013	2:53:43 PM	H2 valve closed
2/18/2013	2:53:43 PM	BCl3 valve closed
2/18/2013	2:53:43 PM	PH3 valve closed
2/18/2013	2:53:43 PM	SiCl4 pre valve closed
2/18/2013	2:53:43 PM	SiCl4 post valve closed
2/18/2013	2:53:43 PM	Bypass valve closed
2/18/2013	2:53:43 PM	Bubbler valve closed
2/18/2013	2:53:43 PM	Helium valve opened
2/18/2013	2:53:43 PM	Main Vac valve opened
2/18/2013	2:53:43 PM	Helium MFC set to  20.000000
2/18/2013	2:53:43 PM	H2 MFC set to  0.000000
2/18/2013	2:53:43 PM	BCl3 MFC set to  0.000000
2/18/2013	2:53:43 PM	PH3 MFC set to  0.000000
2/18/2013	2:53:43 PM	SiCl4 MFC set to  0.000000
2/18/2013	2:53:43 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	2:53:43 PM	Tube furnace set to 150
2/18/2013	2:54:13 PM	Helium valve closed
2/18/2013	2:54:13 PM	H2 valve closed
2/18/2013	2:54:13 PM	BCl3 valve closed
2/18/2013	2:54:13 PM	PH3 valve closed
2/18/2013	2:54:13 PM	SiCl4 pre valve closed
2/18/2013	2:54:13 PM	SiCl4 post valve closed
2/18/2013	2:54:13 PM	Bypass valve closed
2/18/2013	2:54:13 PM	Bubbler valve closed
2/18/2013	2:54:13 PM	Main Vac valve opened
2/18/2013	2:54:13 PM	Helium MFC set to  0.000000
2/18/2013	2:54:13 PM	H2 MFC set to  0.000000
2/18/2013	2:54:13 PM	BCl3 MFC set to  0.000000
2/18/2013	2:54:13 PM	PH3 MFC set to  0.000000
2/18/2013	2:54:13 PM	SiCl4 MFC set to  0.000000
2/18/2013	2:54:13 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	2:54:13 PM	Tube furnace set to 150
2/18/2013	2:54:43 PM	H2 valve closed
2/18/2013	2:54:43 PM	BCl3 valve closed
2/18/2013	2:54:43 PM	PH3 valve closed
2/18/2013	2:54:43 PM	SiCl4 pre valve closed
2/18/2013	2:54:44 PM	SiCl4 post valve closed
2/18/2013	2:54:44 PM	Bypass valve closed
2/18/2013	2:54:44 PM	Bubbler valve closed
2/18/2013	2:54:44 PM	Helium valve opened
2/18/2013	2:54:44 PM	Main Vac valve opened
2/18/2013	2:54:44 PM	Helium MFC set to  20.000000
2/18/2013	2:54:44 PM	H2 MFC set to  0.000000
2/18/2013	2:54:44 PM	BCl3 MFC set to  0.000000
2/18/2013	2:54:44 PM	PH3 MFC set to  0.000000
2/18/2013	2:54:44 PM	SiCl4 MFC set to  0.000000
2/18/2013	2:54:44 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	2:54:44 PM	Tube furnace set to 150
2/18/2013	2:55:14 PM	Helium valve closed
2/18/2013	2:55:14 PM	H2 valve closed
2/18/2013	2:55:14 PM	BCl3 valve closed
2/18/2013	2:55:14 PM	PH3 valve closed
2/18/2013	2:55:14 PM	SiCl4 pre valve closed
2/18/2013	2:55:14 PM	SiCl4 post valve closed
2/18/2013	2:55:14 PM	Bypass valve closed
2/18/2013	2:55:14 PM	Bubbler valve closed
2/18/2013	2:55:14 PM	Main Vac valve opened
2/18/2013	2:55:14 PM	Helium MFC set to  0.000000
2/18/2013	2:55:14 PM	H2 MFC set to  0.000000
2/18/2013	2:55:14 PM	BCl3 MFC set to  0.000000
2/18/2013	2:55:14 PM	PH3 MFC set to  0.000000
2/18/2013	2:55:14 PM	SiCl4 MFC set to  0.000000
2/18/2013	2:55:14 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	2:55:14 PM	Tube furnace set to 150
2/18/2013	2:55:44 PM	H2 valve closed
2/18/2013	2:55:44 PM	BCl3 valve closed
2/18/2013	2:55:44 PM	PH3 valve closed
2/18/2013	2:55:44 PM	SiCl4 pre valve closed
2/18/2013	2:55:44 PM	SiCl4 post valve closed
2/18/2013	2:55:44 PM	Bypass valve closed
2/18/2013	2:55:44 PM	Bubbler valve closed
2/18/2013	2:55:44 PM	Helium valve opened
2/18/2013	2:55:44 PM	Main Vac valve opened
2/18/2013	2:55:44 PM	Helium MFC set to  20.000000
2/18/2013	2:55:44 PM	H2 MFC set to  0.000000
2/18/2013	2:55:44 PM	BCl3 MFC set to  0.000000
2/18/2013	2:55:44 PM	PH3 MFC set to  0.000000
2/18/2013	2:55:44 PM	SiCl4 MFC set to  0.000000
2/18/2013	2:55:44 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	2:55:44 PM	Tube furnace set to 150
2/18/2013	2:57:44 PM	Helium valve closed
2/18/2013	2:57:44 PM	H2 valve closed
2/18/2013	2:57:44 PM	BCl3 valve closed
2/18/2013	2:57:44 PM	PH3 valve closed
2/18/2013	2:57:44 PM	SiCl4 pre valve closed
2/18/2013	2:57:44 PM	SiCl4 post valve closed
2/18/2013	2:57:44 PM	Bypass valve closed
2/18/2013	2:57:44 PM	Bubbler valve closed
2/18/2013	2:57:44 PM	Main Vac valve opened
2/18/2013	2:57:44 PM	Helium MFC set to  0.000000
2/18/2013	2:57:44 PM	H2 MFC set to  0.000000
2/18/2013	2:57:44 PM	BCl3 MFC set to  0.000000
2/18/2013	2:57:44 PM	PH3 MFC set to  0.000000
2/18/2013	2:57:44 PM	SiCl4 MFC set to  0.000000
2/18/2013	2:57:44 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	2:57:44 PM	Tube furnace set to 150
2/18/2013	2:58:14 PM	H2 valve closed
2/18/2013	2:58:14 PM	BCl3 valve closed
2/18/2013	2:58:14 PM	PH3 valve closed
2/18/2013	2:58:15 PM	SiCl4 pre valve closed
2/18/2013	2:58:15 PM	SiCl4 post valve closed
2/18/2013	2:58:15 PM	Bypass valve closed
2/18/2013	2:58:15 PM	Bubbler valve closed
2/18/2013	2:58:15 PM	Helium valve opened
2/18/2013	2:58:15 PM	Main Vac valve opened
2/18/2013	2:58:15 PM	Helium MFC set to  20.000000
2/18/2013	2:58:15 PM	H2 MFC set to  0.000000
2/18/2013	2:58:15 PM	BCl3 MFC set to  0.000000
2/18/2013	2:58:15 PM	PH3 MFC set to  0.000000
2/18/2013	2:58:15 PM	SiCl4 MFC set to  0.000000
2/18/2013	2:58:15 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	2:58:15 PM	Tube furnace set to 150
2/18/2013	2:58:45 PM	Helium valve closed
2/18/2013	2:58:45 PM	H2 valve closed
2/18/2013	2:58:45 PM	BCl3 valve closed
2/18/2013	2:58:45 PM	PH3 valve closed
2/18/2013	2:58:45 PM	SiCl4 pre valve closed
2/18/2013	2:58:45 PM	SiCl4 post valve closed
2/18/2013	2:58:45 PM	Bypass valve closed
2/18/2013	2:58:45 PM	Bubbler valve closed
2/18/2013	2:58:45 PM	Main Vac valve opened
2/18/2013	2:58:45 PM	Helium MFC set to  0.000000
2/18/2013	2:58:45 PM	H2 MFC set to  0.000000
2/18/2013	2:58:45 PM	BCl3 MFC set to  0.000000
2/18/2013	2:58:45 PM	PH3 MFC set to  0.000000
2/18/2013	2:58:45 PM	SiCl4 MFC set to  0.000000
2/18/2013	2:58:45 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	2:58:45 PM	Tube furnace set to 150
2/18/2013	2:59:15 PM	H2 valve closed
2/18/2013	2:59:15 PM	BCl3 valve closed
2/18/2013	2:59:15 PM	PH3 valve closed
2/18/2013	2:59:15 PM	SiCl4 pre valve closed
2/18/2013	2:59:15 PM	SiCl4 post valve closed
2/18/2013	2:59:15 PM	Bypass valve closed
2/18/2013	2:59:15 PM	Bubbler valve closed
2/18/2013	2:59:15 PM	Helium valve opened
2/18/2013	2:59:15 PM	Main Vac valve opened
2/18/2013	2:59:15 PM	Helium MFC set to  20.000000
2/18/2013	2:59:15 PM	H2 MFC set to  0.000000
2/18/2013	2:59:15 PM	BCl3 MFC set to  0.000000
2/18/2013	2:59:15 PM	PH3 MFC set to  0.000000
2/18/2013	2:59:15 PM	SiCl4 MFC set to  0.000000
2/18/2013	2:59:15 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	2:59:15 PM	Tube furnace set to 150
2/18/2013	2:59:17 PM	Helium valve closed
2/18/2013	2:59:17 PM	H2 valve closed
2/18/2013	2:59:17 PM	BCl3 valve closed
2/18/2013	2:59:17 PM	PH3 valve closed
2/18/2013	2:59:17 PM	SiCl4 pre valve closed
2/18/2013	2:59:17 PM	SiCl4 post valve closed
2/18/2013	2:59:17 PM	Bypass valve closed
2/18/2013	2:59:17 PM	Bubbler valve closed
2/18/2013	2:59:17 PM	Main Vac valve opened
2/18/2013	2:59:17 PM	Helium MFC set to  0.000000
2/18/2013	2:59:17 PM	H2 MFC set to  0.000000
2/18/2013	2:59:17 PM	BCl3 MFC set to  0.000000
2/18/2013	2:59:17 PM	PH3 MFC set to  0.000000
2/18/2013	2:59:17 PM	SiCl4 MFC set to  0.000000
2/18/2013	2:59:17 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	2:59:17 PM	Tube furnace set to 150
2/18/2013	2:59:18 PM	H2 valve closed
2/18/2013	2:59:18 PM	BCl3 valve closed
2/18/2013	2:59:18 PM	PH3 valve closed
2/18/2013	2:59:18 PM	SiCl4 pre valve closed
2/18/2013	2:59:18 PM	SiCl4 post valve closed
2/18/2013	2:59:18 PM	Bypass valve closed
2/18/2013	2:59:18 PM	Bubbler valve closed
2/18/2013	2:59:18 PM	Helium valve opened
2/18/2013	2:59:18 PM	Main Vac valve opened
2/18/2013	2:59:18 PM	Helium MFC set to  20.000000
2/18/2013	2:59:18 PM	H2 MFC set to  0.000000
2/18/2013	2:59:18 PM	BCl3 MFC set to  0.000000
2/18/2013	2:59:18 PM	PH3 MFC set to  0.000000
2/18/2013	2:59:18 PM	SiCl4 MFC set to  0.000000
2/18/2013	2:59:18 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	2:59:18 PM	Tube furnace set to 150
2/18/2013	2:59:20 PM	Helium valve closed
2/18/2013	2:59:20 PM	H2 valve closed
2/18/2013	2:59:20 PM	BCl3 valve closed
2/18/2013	2:59:20 PM	PH3 valve closed
2/18/2013	2:59:20 PM	SiCl4 pre valve closed
2/18/2013	2:59:20 PM	SiCl4 post valve closed
2/18/2013	2:59:20 PM	Bypass valve closed
2/18/2013	2:59:20 PM	Bubbler valve closed
2/18/2013	2:59:20 PM	Main Vac valve opened
2/18/2013	2:59:20 PM	Helium MFC set to  0.000000
2/18/2013	2:59:20 PM	H2 MFC set to  0.000000
2/18/2013	2:59:20 PM	BCl3 MFC set to  0.000000
2/18/2013	2:59:20 PM	PH3 MFC set to  0.000000
2/18/2013	2:59:20 PM	SiCl4 MFC set to  0.000000
2/18/2013	2:59:20 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	2:59:20 PM	Tube furnace set to 150
2/18/2013	2:59:21 PM	H2 valve closed
2/18/2013	2:59:21 PM	BCl3 valve closed
2/18/2013	2:59:21 PM	PH3 valve closed
2/18/2013	2:59:21 PM	SiCl4 pre valve closed
2/18/2013	2:59:21 PM	SiCl4 post valve closed
2/18/2013	2:59:21 PM	Bypass valve closed
2/18/2013	2:59:21 PM	Bubbler valve closed
2/18/2013	2:59:21 PM	Helium valve opened
2/18/2013	2:59:21 PM	Main Vac valve opened
2/18/2013	2:59:21 PM	Helium MFC set to  20.000000
2/18/2013	2:59:21 PM	H2 MFC set to  0.000000
2/18/2013	2:59:21 PM	BCl3 MFC set to  0.000000
2/18/2013	2:59:21 PM	PH3 MFC set to  0.000000
2/18/2013	2:59:21 PM	SiCl4 MFC set to  0.000000
2/18/2013	2:59:21 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	2:59:21 PM	Tube furnace set to 150
2/18/2013	2:59:24 PM	Helium valve closed
2/18/2013	2:59:24 PM	H2 valve closed
2/18/2013	2:59:24 PM	BCl3 valve closed
2/18/2013	2:59:24 PM	PH3 valve closed
2/18/2013	2:59:24 PM	SiCl4 pre valve closed
2/18/2013	2:59:24 PM	SiCl4 post valve closed
2/18/2013	2:59:24 PM	Bypass valve closed
2/18/2013	2:59:24 PM	Bubbler valve closed
2/18/2013	2:59:24 PM	Main Vac valve opened
2/18/2013	2:59:24 PM	Helium MFC set to  0.000000
2/18/2013	2:59:24 PM	H2 MFC set to  0.000000
2/18/2013	2:59:24 PM	BCl3 MFC set to  0.000000
2/18/2013	2:59:24 PM	PH3 MFC set to  0.000000
2/18/2013	2:59:24 PM	SiCl4 MFC set to  0.000000
2/18/2013	2:59:24 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	2:59:24 PM	Tube furnace set to 150
2/18/2013	2:59:24 PM	H2 valve closed
2/18/2013	2:59:24 PM	BCl3 valve closed
2/18/2013	2:59:24 PM	PH3 valve closed
2/18/2013	2:59:24 PM	SiCl4 pre valve closed
2/18/2013	2:59:24 PM	SiCl4 post valve closed
2/18/2013	2:59:24 PM	Bypass valve closed
2/18/2013	2:59:24 PM	Bubbler valve closed
2/18/2013	2:59:24 PM	Helium valve opened
2/18/2013	2:59:24 PM	Main Vac valve opened
2/18/2013	2:59:24 PM	Helium MFC set to  20.000000
2/18/2013	2:59:24 PM	H2 MFC set to  0.000000
2/18/2013	2:59:24 PM	BCl3 MFC set to  0.000000
2/18/2013	2:59:24 PM	PH3 MFC set to  0.000000
2/18/2013	2:59:24 PM	SiCl4 MFC set to  0.000000
2/18/2013	2:59:24 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	2:59:24 PM	Tube furnace set to 150
2/18/2013	2:59:25 PM	Helium valve closed
2/18/2013	2:59:25 PM	H2 valve closed
2/18/2013	2:59:25 PM	BCl3 valve closed
2/18/2013	2:59:25 PM	PH3 valve closed
2/18/2013	2:59:25 PM	SiCl4 pre valve closed
2/18/2013	2:59:25 PM	SiCl4 post valve closed
2/18/2013	2:59:25 PM	Bypass valve closed
2/18/2013	2:59:25 PM	Bubbler valve closed
2/18/2013	2:59:25 PM	Main Vac valve opened
2/18/2013	2:59:25 PM	Helium MFC set to  0.000000
2/18/2013	2:59:25 PM	H2 MFC set to  0.000000
2/18/2013	2:59:25 PM	BCl3 MFC set to  0.000000
2/18/2013	2:59:25 PM	PH3 MFC set to  0.000000
2/18/2013	2:59:25 PM	SiCl4 MFC set to  0.000000
2/18/2013	2:59:25 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	2:59:25 PM	Tube furnace set to 150
2/18/2013	2:59:27 PM	H2 valve closed
2/18/2013	2:59:27 PM	BCl3 valve closed
2/18/2013	2:59:27 PM	PH3 valve closed
2/18/2013	2:59:27 PM	SiCl4 pre valve closed
2/18/2013	2:59:27 PM	SiCl4 post valve closed
2/18/2013	2:59:27 PM	Bypass valve closed
2/18/2013	2:59:27 PM	Bubbler valve closed
2/18/2013	2:59:27 PM	Helium valve opened
2/18/2013	2:59:27 PM	Main Vac valve opened
2/18/2013	2:59:27 PM	Helium MFC set to  20.000000
2/18/2013	2:59:27 PM	H2 MFC set to  0.000000
2/18/2013	2:59:27 PM	BCl3 MFC set to  0.000000
2/18/2013	2:59:27 PM	PH3 MFC set to  0.000000
2/18/2013	2:59:27 PM	SiCl4 MFC set to  0.000000
2/18/2013	2:59:27 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	2:59:27 PM	Tube furnace set to 150
2/18/2013	2:59:27 PM	Helium valve closed
2/18/2013	2:59:27 PM	H2 valve closed
2/18/2013	2:59:27 PM	BCl3 valve closed
2/18/2013	2:59:27 PM	PH3 valve closed
2/18/2013	2:59:27 PM	SiCl4 pre valve closed
2/18/2013	2:59:27 PM	SiCl4 post valve closed
2/18/2013	2:59:27 PM	Bypass valve closed
2/18/2013	2:59:27 PM	Bubbler valve closed
2/18/2013	2:59:27 PM	Main Vac valve opened
2/18/2013	2:59:27 PM	Helium MFC set to  0.000000
2/18/2013	2:59:27 PM	H2 MFC set to  0.000000
2/18/2013	2:59:27 PM	BCl3 MFC set to  0.000000
2/18/2013	2:59:27 PM	PH3 MFC set to  0.000000
2/18/2013	2:59:27 PM	SiCl4 MFC set to  0.000000
2/18/2013	2:59:27 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	2:59:27 PM	Tube furnace set to 150
2/18/2013	2:59:28 PM	H2 valve closed
2/18/2013	2:59:28 PM	BCl3 valve closed
2/18/2013	2:59:28 PM	PH3 valve closed
2/18/2013	2:59:28 PM	SiCl4 pre valve closed
2/18/2013	2:59:28 PM	SiCl4 post valve closed
2/18/2013	2:59:28 PM	Bypass valve closed
2/18/2013	2:59:28 PM	Bubbler valve closed
2/18/2013	2:59:28 PM	Helium valve opened
2/18/2013	2:59:28 PM	Main Vac valve opened
2/18/2013	2:59:28 PM	Helium MFC set to  20.000000
2/18/2013	2:59:28 PM	H2 MFC set to  0.000000
2/18/2013	2:59:28 PM	BCl3 MFC set to  0.000000
2/18/2013	2:59:28 PM	PH3 MFC set to  0.000000
2/18/2013	2:59:28 PM	SiCl4 MFC set to  0.000000
2/18/2013	2:59:28 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	2:59:28 PM	Tube furnace set to 150
2/18/2013	3:01:28 PM	Helium valve closed
2/18/2013	3:01:28 PM	H2 valve closed
2/18/2013	3:01:28 PM	BCl3 valve closed
2/18/2013	3:01:28 PM	PH3 valve closed
2/18/2013	3:01:28 PM	SiCl4 pre valve closed
2/18/2013	3:01:28 PM	SiCl4 post valve closed
2/18/2013	3:01:28 PM	Bypass valve closed
2/18/2013	3:01:28 PM	Bubbler valve closed
2/18/2013	3:01:28 PM	Main Vac valve opened
2/18/2013	3:01:28 PM	Helium MFC set to  0.000000
2/18/2013	3:01:28 PM	H2 MFC set to  0.000000
2/18/2013	3:01:28 PM	BCl3 MFC set to  0.000000
2/18/2013	3:01:28 PM	PH3 MFC set to  0.000000
2/18/2013	3:01:28 PM	SiCl4 MFC set to  0.000000
2/18/2013	3:01:28 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	3:01:28 PM	Tube furnace set to 150
2/18/2013	3:01:29 PM	Run finished at 3:01 PM
2/18/2013	3:01:56 PM	Recipe started at 3:01 PM
2/18/2013	3:01:56 PM	Helium valve closed
2/18/2013	3:01:56 PM	H2 valve closed
2/18/2013	3:01:56 PM	BCl3 valve closed
2/18/2013	3:01:56 PM	PH3 valve closed
2/18/2013	3:01:56 PM	SiCl4 pre valve closed
2/18/2013	3:01:56 PM	SiCl4 post valve closed
2/18/2013	3:01:56 PM	Main Vac valve closed
2/18/2013	3:01:56 PM	Bypass valve closed
2/18/2013	3:01:56 PM	Bubbler valve closed
2/18/2013	3:01:56 PM	Helium MFC set to  0.000000
2/18/2013	3:01:56 PM	H2 MFC set to  0.000000
2/18/2013	3:01:56 PM	BCl3 MFC set to  0.000000
2/18/2013	3:01:56 PM	PH3 MFC set to  0.000000
2/18/2013	3:01:56 PM	SiCl4 MFC set to  0.000000
2/18/2013	3:01:56 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	3:01:57 PM	Tube furnace set to 0
2/18/2013	3:02:00 PM	Helium valve closed
2/18/2013	3:02:00 PM	BCl3 valve closed
2/18/2013	3:02:00 PM	PH3 valve closed
2/18/2013	3:02:00 PM	SiCl4 pre valve closed
2/18/2013	3:02:00 PM	SiCl4 post valve closed
2/18/2013	3:02:00 PM	Main Vac valve closed
2/18/2013	3:02:00 PM	Bypass valve closed
2/18/2013	3:02:00 PM	Bubbler valve closed
2/18/2013	3:02:00 PM	H2 valve opened
2/18/2013	3:02:00 PM	Helium MFC set to  0.000000
2/18/2013	3:02:00 PM	H2 MFC set to  500.000000
2/18/2013	3:02:00 PM	BCl3 MFC set to  0.000000
2/18/2013	3:02:00 PM	PH3 MFC set to  0.000000
2/18/2013	3:02:00 PM	SiCl4 MFC set to  0.000000
2/18/2013	3:02:00 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	3:02:00 PM	Tube furnace set to 0
2/18/2013	3:03:09 PM	Helium valve closed
2/18/2013	3:03:09 PM	BCl3 valve closed
2/18/2013	3:03:09 PM	PH3 valve closed
2/18/2013	3:03:09 PM	SiCl4 pre valve closed
2/18/2013	3:03:09 PM	SiCl4 post valve closed
2/18/2013	3:03:09 PM	Main Vac valve closed
2/18/2013	3:03:09 PM	Bypass valve closed
2/18/2013	3:03:09 PM	H2 valve opened
2/18/2013	3:03:09 PM	Bubbler valve opened
2/18/2013	3:03:09 PM	Helium MFC set to  0.000000
2/18/2013	3:03:09 PM	H2 MFC set to  500.000000
2/18/2013	3:03:09 PM	BCl3 MFC set to  0.000000
2/18/2013	3:03:09 PM	PH3 MFC set to  0.000000
2/18/2013	3:03:09 PM	SiCl4 MFC set to  0.000000
2/18/2013	3:03:09 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	3:03:09 PM	Tube furnace set to 0
2/18/2013	3:03:10 PM	Helium valve closed
2/18/2013	3:03:10 PM	BCl3 valve closed
2/18/2013	3:03:10 PM	PH3 valve closed
2/18/2013	3:03:10 PM	SiCl4 pre valve closed
2/18/2013	3:03:10 PM	SiCl4 post valve closed
2/18/2013	3:03:10 PM	Main Vac valve closed
2/18/2013	3:03:10 PM	Bypass valve closed
2/18/2013	3:03:10 PM	H2 valve opened
2/18/2013	3:03:10 PM	Bubbler valve opened
2/18/2013	3:03:10 PM	Helium MFC set to  0.000000
2/18/2013	3:03:10 PM	H2 MFC set to  500.000000
2/18/2013	3:03:10 PM	BCl3 MFC set to  0.000000
2/18/2013	3:03:10 PM	PH3 MFC set to  0.000000
2/18/2013	3:03:11 PM	SiCl4 MFC set to  0.000000
2/18/2013	3:03:11 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	3:03:11 PM	Tube furnace set to 1000
2/18/2013	3:23:11 PM	Helium valve closed
2/18/2013	3:23:11 PM	PH3 valve closed
2/18/2013	3:23:11 PM	Main Vac valve closed
2/18/2013	3:23:11 PM	Bypass valve closed
2/18/2013	3:23:11 PM	H2 valve opened
2/18/2013	3:23:11 PM	BCl3 valve opened
2/18/2013	3:23:11 PM	SiCl4 pre valve opened
2/18/2013	3:23:11 PM	SiCl4 post valve opened
2/18/2013	3:23:11 PM	Bubbler valve opened
2/18/2013	3:23:11 PM	Helium MFC set to  0.000000
2/18/2013	3:23:11 PM	H2 MFC set to  500.000000
2/18/2013	3:23:11 PM	BCl3 MFC set to  1.000000
2/18/2013	3:23:11 PM	PH3 MFC set to  0.000000
2/18/2013	3:23:11 PM	SiCl4 MFC set to  50.000000
2/18/2013	3:23:11 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	3:23:11 PM	Tube furnace set to 1000
2/18/2013	3:38:11 PM	Helium valve closed
2/18/2013	3:38:11 PM	BCl3 valve closed
2/18/2013	3:38:11 PM	PH3 valve closed
2/18/2013	3:38:11 PM	SiCl4 pre valve closed
2/18/2013	3:38:11 PM	SiCl4 post valve closed
2/18/2013	3:38:11 PM	Main Vac valve closed
2/18/2013	3:38:11 PM	Bypass valve closed
2/18/2013	3:38:11 PM	H2 valve opened
2/18/2013	3:38:11 PM	Bubbler valve opened
2/18/2013	3:38:11 PM	Helium MFC set to  0.000000
2/18/2013	3:38:11 PM	H2 MFC set to  500.000000
2/18/2013	3:38:11 PM	BCl3 MFC set to  0.000000
2/18/2013	3:38:11 PM	PH3 MFC set to  0.000000
2/18/2013	3:38:11 PM	SiCl4 MFC set to  0.000000
2/18/2013	3:38:11 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	3:38:11 PM	Tube furnace set to 750
2/18/2013	3:43:11 PM	H2 valve closed
2/18/2013	3:43:11 PM	BCl3 valve closed
2/18/2013	3:43:11 PM	PH3 valve closed
2/18/2013	3:43:11 PM	SiCl4 pre valve closed
2/18/2013	3:43:11 PM	SiCl4 post valve closed
2/18/2013	3:43:11 PM	Main Vac valve closed
2/18/2013	3:43:11 PM	Bypass valve closed
2/18/2013	3:43:11 PM	Helium valve opened
2/18/2013	3:43:11 PM	Bubbler valve opened
2/18/2013	3:43:11 PM	Helium MFC set to  500.000000
2/18/2013	3:43:11 PM	H2 MFC set to  0.000000
2/18/2013	3:43:11 PM	BCl3 MFC set to  0.000000
2/18/2013	3:43:11 PM	PH3 MFC set to  0.000000
2/18/2013	3:43:11 PM	SiCl4 MFC set to  0.000000
2/18/2013	3:43:11 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	3:43:11 PM	Tube furnace set to 0
2/18/2013	3:57:34 PM	Run aborted at 3:57 PM
2/18/2013	3:57:34 PM	Helium valve closed
2/18/2013	3:57:34 PM	H2 valve closed
2/18/2013	3:57:34 PM	BCl3 valve closed
2/18/2013	3:57:34 PM	PH3 valve closed
2/18/2013	3:57:34 PM	SiCl4 pre valve closed
2/18/2013	3:57:34 PM	SiCl4 post valve closed
2/18/2013	3:57:34 PM	Bypass valve closed
2/18/2013	3:57:34 PM	Main Vac valve closed
2/18/2013	3:57:34 PM	Bubbler valve closed
2/18/2013	3:57:34 PM	Helium MFC set to  0.000000
2/18/2013	3:57:34 PM	H2 MFC set to  0.000000
2/18/2013	3:57:34 PM	BCl3 MFC set to  0.000000
2/18/2013	3:57:34 PM	PH3 MFC set to  0.000000
2/18/2013	3:57:34 PM	SiCl4 MFC set to  0.000000
2/18/2013	3:57:35 PM	Tube furnace set to 0
2/18/2013	3:57:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/18/2013	3:57:37 PM	Recipe started at 3:57 PM
2/18/2013	3:57:37 PM	Helium valve closed
2/18/2013	3:57:37 PM	H2 valve closed
2/18/2013	3:57:37 PM	BCl3 valve closed
2/18/2013	3:57:38 PM	PH3 valve closed
2/18/2013	3:57:38 PM	SiCl4 pre valve closed
2/18/2013	3:57:38 PM	SiCl4 post valve closed
2/18/2013	3:57:38 PM	Main Vac valve closed
2/18/2013	3:57:38 PM	Bypass valve closed
2/18/2013	3:57:38 PM	Bubbler valve closed
2/18/2013	3:57:38 PM	Helium MFC set to  0.000000
2/18/2013	3:57:38 PM	H2 MFC set to  0.000000
2/18/2013	3:57:38 PM	BCl3 MFC set to  0.000000
2/18/2013	3:57:38 PM	PH3 MFC set to  0.000000
2/18/2013	3:57:38 PM	SiCl4 MFC set to  0.000000
2/18/2013	3:57:38 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	3:57:38 PM	Tube furnace set to 0
2/18/2013	3:57:41 PM	H2 valve closed
2/18/2013	3:57:41 PM	BCl3 valve closed
2/18/2013	3:57:41 PM	PH3 valve closed
2/18/2013	3:57:41 PM	SiCl4 pre valve closed
2/18/2013	3:57:41 PM	SiCl4 post valve closed
2/18/2013	3:57:41 PM	Main Vac valve closed
2/18/2013	3:57:41 PM	Bypass valve closed
2/18/2013	3:57:41 PM	Bubbler valve closed
2/18/2013	3:57:41 PM	Helium valve opened
2/18/2013	3:57:41 PM	Helium MFC set to  500.000000
2/18/2013	3:57:41 PM	H2 MFC set to  0.000000
2/18/2013	3:57:41 PM	BCl3 MFC set to  0.000000
2/18/2013	3:57:41 PM	PH3 MFC set to  0.000000
2/18/2013	3:57:41 PM	SiCl4 MFC set to  0.000000
2/18/2013	3:57:41 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	3:57:41 PM	Tube furnace set to 0
2/18/2013	3:57:41 PM	Helium valve closed
2/18/2013	3:57:41 PM	H2 valve closed
2/18/2013	3:57:41 PM	BCl3 valve closed
2/18/2013	3:57:41 PM	PH3 valve closed
2/18/2013	3:57:41 PM	SiCl4 pre valve closed
2/18/2013	3:57:41 PM	SiCl4 post valve closed
2/18/2013	3:57:41 PM	Main Vac valve closed
2/18/2013	3:57:41 PM	Bypass valve closed
2/18/2013	3:57:41 PM	Bubbler valve closed
2/18/2013	3:57:41 PM	Helium MFC set to  0.000000
2/18/2013	3:57:41 PM	H2 MFC set to  0.000000
2/18/2013	3:57:41 PM	BCl3 MFC set to  0.000000
2/18/2013	3:57:41 PM	PH3 MFC set to  0.000000
2/18/2013	3:57:41 PM	SiCl4 MFC set to  0.000000
2/18/2013	3:57:41 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	3:57:41 PM	Tube furnace set to 0
2/18/2013	3:57:42 PM	Run finished at 3:57 PM
2/18/2013	3:57:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/18/2013	4:02:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/18/2013	4:02:20 PM	Recipe started at 4:02 PM
2/18/2013	4:02:20 PM	Helium valve closed
2/18/2013	4:02:20 PM	H2 valve closed
2/18/2013	4:02:20 PM	BCl3 valve closed
2/18/2013	4:02:20 PM	PH3 valve closed
2/18/2013	4:02:20 PM	SiCl4 pre valve closed
2/18/2013	4:02:20 PM	SiCl4 post valve closed
2/18/2013	4:02:20 PM	Main Vac valve closed
2/18/2013	4:02:20 PM	Bubbler valve closed
2/18/2013	4:02:20 PM	Bypass valve opened
2/18/2013	4:02:20 PM	Helium MFC set to  0.000000
2/18/2013	4:02:20 PM	H2 MFC set to  0.000000
2/18/2013	4:02:20 PM	BCl3 MFC set to  0.000000
2/18/2013	4:02:20 PM	PH3 MFC set to  0.000000
2/18/2013	4:02:20 PM	SiCl4 MFC set to  0.000000
2/18/2013	4:02:20 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	4:02:20 PM	Tube furnace set to 0
2/18/2013	4:03:34 PM	Helium valve closed
2/18/2013	4:03:34 PM	H2 valve closed
2/18/2013	4:03:34 PM	BCl3 valve closed
2/18/2013	4:03:34 PM	PH3 valve closed
2/18/2013	4:03:34 PM	SiCl4 pre valve closed
2/18/2013	4:03:34 PM	SiCl4 post valve closed
2/18/2013	4:03:34 PM	Main Vac valve closed
2/18/2013	4:03:34 PM	Bubbler valve closed
2/18/2013	4:03:34 PM	Bypass valve opened
2/18/2013	4:03:34 PM	Helium MFC set to  0.000000
2/18/2013	4:03:34 PM	H2 MFC set to  0.000000
2/18/2013	4:03:34 PM	BCl3 MFC set to  0.000000
2/18/2013	4:03:34 PM	PH3 MFC set to  0.000000
2/18/2013	4:03:34 PM	SiCl4 MFC set to  0.000000
2/18/2013	4:03:34 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	4:03:34 PM	Tube furnace set to 0
2/18/2013	4:04:34 PM	Helium valve closed
2/18/2013	4:04:34 PM	H2 valve closed
2/18/2013	4:04:34 PM	BCl3 valve closed
2/18/2013	4:04:34 PM	PH3 valve closed
2/18/2013	4:04:34 PM	SiCl4 pre valve closed
2/18/2013	4:04:34 PM	SiCl4 post valve closed
2/18/2013	4:04:34 PM	Bypass valve closed
2/18/2013	4:04:34 PM	Bubbler valve closed
2/18/2013	4:04:34 PM	Main Vac valve opened
2/18/2013	4:04:34 PM	Helium MFC set to  0.000000
2/18/2013	4:04:34 PM	H2 MFC set to  0.000000
2/18/2013	4:04:34 PM	BCl3 MFC set to  0.000000
2/18/2013	4:04:34 PM	PH3 MFC set to  0.000000
2/18/2013	4:04:34 PM	SiCl4 MFC set to  0.000000
2/18/2013	4:04:34 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	4:04:34 PM	Tube furnace set to 0
2/18/2013	4:04:35 PM	Run finished at 4:04 PM
2/18/2013	4:04:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/18/2013	4:07:37 PM	Recipe started at 4:07 PM
2/18/2013	4:07:37 PM	Helium valve closed
2/18/2013	4:07:37 PM	H2 valve closed
2/18/2013	4:07:37 PM	BCl3 valve closed
2/18/2013	4:07:37 PM	PH3 valve closed
2/18/2013	4:07:37 PM	SiCl4 pre valve closed
2/18/2013	4:07:37 PM	SiCl4 post valve closed
2/18/2013	4:07:37 PM	Bypass valve closed
2/18/2013	4:07:37 PM	Bubbler valve closed
2/18/2013	4:07:37 PM	Main Vac valve opened
2/18/2013	4:07:37 PM	Helium MFC set to  0.000000
2/18/2013	4:07:37 PM	H2 MFC set to  0.000000
2/18/2013	4:07:37 PM	BCl3 MFC set to  0.000000
2/18/2013	4:07:37 PM	PH3 MFC set to  0.000000
2/18/2013	4:07:37 PM	SiCl4 MFC set to  0.000000
2/18/2013	4:07:37 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	4:07:37 PM	Tube furnace set to 150
2/18/2013	4:08:07 PM	H2 valve closed
2/18/2013	4:08:07 PM	BCl3 valve closed
2/18/2013	4:08:07 PM	PH3 valve closed
2/18/2013	4:08:07 PM	SiCl4 pre valve closed
2/18/2013	4:08:07 PM	SiCl4 post valve closed
2/18/2013	4:08:07 PM	Bypass valve closed
2/18/2013	4:08:07 PM	Bubbler valve closed
2/18/2013	4:08:07 PM	Helium valve opened
2/18/2013	4:08:07 PM	Main Vac valve opened
2/18/2013	4:08:07 PM	Helium MFC set to  20.000000
2/18/2013	4:08:07 PM	H2 MFC set to  0.000000
2/18/2013	4:08:07 PM	BCl3 MFC set to  0.000000
2/18/2013	4:08:07 PM	PH3 MFC set to  0.000000
2/18/2013	4:08:07 PM	SiCl4 MFC set to  0.000000
2/18/2013	4:08:07 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	4:08:07 PM	Tube furnace set to 150
2/18/2013	4:08:37 PM	Helium valve closed
2/18/2013	4:08:37 PM	H2 valve closed
2/18/2013	4:08:37 PM	BCl3 valve closed
2/18/2013	4:08:37 PM	PH3 valve closed
2/18/2013	4:08:37 PM	SiCl4 pre valve closed
2/18/2013	4:08:37 PM	SiCl4 post valve closed
2/18/2013	4:08:37 PM	Bypass valve closed
2/18/2013	4:08:37 PM	Bubbler valve closed
2/18/2013	4:08:37 PM	Main Vac valve opened
2/18/2013	4:08:37 PM	Helium MFC set to  0.000000
2/18/2013	4:08:37 PM	H2 MFC set to  0.000000
2/18/2013	4:08:37 PM	BCl3 MFC set to  0.000000
2/18/2013	4:08:37 PM	PH3 MFC set to  0.000000
2/18/2013	4:08:37 PM	SiCl4 MFC set to  0.000000
2/18/2013	4:08:37 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	4:08:37 PM	Tube furnace set to 150
2/18/2013	4:09:07 PM	H2 valve closed
2/18/2013	4:09:07 PM	BCl3 valve closed
2/18/2013	4:09:07 PM	PH3 valve closed
2/18/2013	4:09:07 PM	SiCl4 pre valve closed
2/18/2013	4:09:07 PM	SiCl4 post valve closed
2/18/2013	4:09:07 PM	Bypass valve closed
2/18/2013	4:09:07 PM	Bubbler valve closed
2/18/2013	4:09:07 PM	Helium valve opened
2/18/2013	4:09:07 PM	Main Vac valve opened
2/18/2013	4:09:07 PM	Helium MFC set to  20.000000
2/18/2013	4:09:07 PM	H2 MFC set to  0.000000
2/18/2013	4:09:07 PM	BCl3 MFC set to  0.000000
2/18/2013	4:09:07 PM	PH3 MFC set to  0.000000
2/18/2013	4:09:07 PM	SiCl4 MFC set to  0.000000
2/18/2013	4:09:07 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	4:09:08 PM	Tube furnace set to 150
2/18/2013	4:09:38 PM	Helium valve closed
2/18/2013	4:09:38 PM	H2 valve closed
2/18/2013	4:09:38 PM	BCl3 valve closed
2/18/2013	4:09:38 PM	PH3 valve closed
2/18/2013	4:09:38 PM	SiCl4 pre valve closed
2/18/2013	4:09:38 PM	SiCl4 post valve closed
2/18/2013	4:09:38 PM	Bypass valve closed
2/18/2013	4:09:38 PM	Bubbler valve closed
2/18/2013	4:09:38 PM	Main Vac valve opened
2/18/2013	4:09:38 PM	Helium MFC set to  0.000000
2/18/2013	4:09:38 PM	H2 MFC set to  0.000000
2/18/2013	4:09:38 PM	BCl3 MFC set to  0.000000
2/18/2013	4:09:38 PM	PH3 MFC set to  0.000000
2/18/2013	4:09:38 PM	SiCl4 MFC set to  0.000000
2/18/2013	4:09:38 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	4:09:38 PM	Tube furnace set to 150
2/18/2013	4:10:08 PM	H2 valve closed
2/18/2013	4:10:08 PM	BCl3 valve closed
2/18/2013	4:10:08 PM	PH3 valve closed
2/18/2013	4:10:08 PM	SiCl4 pre valve closed
2/18/2013	4:10:08 PM	SiCl4 post valve closed
2/18/2013	4:10:08 PM	Bypass valve closed
2/18/2013	4:10:08 PM	Bubbler valve closed
2/18/2013	4:10:08 PM	Helium valve opened
2/18/2013	4:10:08 PM	Main Vac valve opened
2/18/2013	4:10:08 PM	Helium MFC set to  20.000000
2/18/2013	4:10:08 PM	H2 MFC set to  0.000000
2/18/2013	4:10:08 PM	BCl3 MFC set to  0.000000
2/18/2013	4:10:08 PM	PH3 MFC set to  0.000000
2/18/2013	4:10:08 PM	SiCl4 MFC set to  0.000000
2/18/2013	4:10:08 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	4:10:08 PM	Tube furnace set to 150
2/18/2013	4:12:08 PM	Helium valve closed
2/18/2013	4:12:08 PM	H2 valve closed
2/18/2013	4:12:08 PM	BCl3 valve closed
2/18/2013	4:12:08 PM	PH3 valve closed
2/18/2013	4:12:08 PM	SiCl4 pre valve closed
2/18/2013	4:12:08 PM	SiCl4 post valve closed
2/18/2013	4:12:08 PM	Bypass valve closed
2/18/2013	4:12:08 PM	Bubbler valve closed
2/18/2013	4:12:08 PM	Main Vac valve opened
2/18/2013	4:12:08 PM	Helium MFC set to  0.000000
2/18/2013	4:12:08 PM	H2 MFC set to  0.000000
2/18/2013	4:12:08 PM	BCl3 MFC set to  0.000000
2/18/2013	4:12:08 PM	PH3 MFC set to  0.000000
2/18/2013	4:12:08 PM	SiCl4 MFC set to  0.000000
2/18/2013	4:12:08 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	4:12:08 PM	Tube furnace set to 150
2/18/2013	4:12:38 PM	H2 valve closed
2/18/2013	4:12:38 PM	BCl3 valve closed
2/18/2013	4:12:38 PM	PH3 valve closed
2/18/2013	4:12:38 PM	SiCl4 pre valve closed
2/18/2013	4:12:38 PM	SiCl4 post valve closed
2/18/2013	4:12:38 PM	Bypass valve closed
2/18/2013	4:12:38 PM	Bubbler valve closed
2/18/2013	4:12:38 PM	Helium valve opened
2/18/2013	4:12:38 PM	Main Vac valve opened
2/18/2013	4:12:38 PM	Helium MFC set to  20.000000
2/18/2013	4:12:38 PM	H2 MFC set to  0.000000
2/18/2013	4:12:38 PM	BCl3 MFC set to  0.000000
2/18/2013	4:12:38 PM	PH3 MFC set to  0.000000
2/18/2013	4:12:38 PM	SiCl4 MFC set to  0.000000
2/18/2013	4:12:38 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	4:12:39 PM	Tube furnace set to 150
2/18/2013	4:13:09 PM	Helium valve closed
2/18/2013	4:13:09 PM	H2 valve closed
2/18/2013	4:13:09 PM	BCl3 valve closed
2/18/2013	4:13:09 PM	PH3 valve closed
2/18/2013	4:13:09 PM	SiCl4 pre valve closed
2/18/2013	4:13:09 PM	SiCl4 post valve closed
2/18/2013	4:13:09 PM	Bypass valve closed
2/18/2013	4:13:09 PM	Bubbler valve closed
2/18/2013	4:13:09 PM	Main Vac valve opened
2/18/2013	4:13:09 PM	Helium MFC set to  0.000000
2/18/2013	4:13:09 PM	H2 MFC set to  0.000000
2/18/2013	4:13:09 PM	BCl3 MFC set to  0.000000
2/18/2013	4:13:09 PM	PH3 MFC set to  0.000000
2/18/2013	4:13:09 PM	SiCl4 MFC set to  0.000000
2/18/2013	4:13:09 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	4:13:09 PM	Tube furnace set to 150
2/18/2013	4:13:39 PM	H2 valve closed
2/18/2013	4:13:39 PM	BCl3 valve closed
2/18/2013	4:13:39 PM	PH3 valve closed
2/18/2013	4:13:39 PM	SiCl4 pre valve closed
2/18/2013	4:13:39 PM	SiCl4 post valve closed
2/18/2013	4:13:39 PM	Bypass valve closed
2/18/2013	4:13:39 PM	Bubbler valve closed
2/18/2013	4:13:39 PM	Helium valve opened
2/18/2013	4:13:39 PM	Main Vac valve opened
2/18/2013	4:13:39 PM	Helium MFC set to  20.000000
2/18/2013	4:13:39 PM	H2 MFC set to  0.000000
2/18/2013	4:13:39 PM	BCl3 MFC set to  0.000000
2/18/2013	4:13:39 PM	PH3 MFC set to  0.000000
2/18/2013	4:13:39 PM	SiCl4 MFC set to  0.000000
2/18/2013	4:13:39 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	4:13:39 PM	Tube furnace set to 150
2/18/2013	4:14:09 PM	Helium valve closed
2/18/2013	4:14:09 PM	H2 valve closed
2/18/2013	4:14:09 PM	BCl3 valve closed
2/18/2013	4:14:09 PM	PH3 valve closed
2/18/2013	4:14:09 PM	SiCl4 pre valve closed
2/18/2013	4:14:09 PM	SiCl4 post valve closed
2/18/2013	4:14:09 PM	Bypass valve closed
2/18/2013	4:14:09 PM	Bubbler valve closed
2/18/2013	4:14:09 PM	Main Vac valve opened
2/18/2013	4:14:09 PM	Helium MFC set to  0.000000
2/18/2013	4:14:09 PM	H2 MFC set to  0.000000
2/18/2013	4:14:09 PM	BCl3 MFC set to  0.000000
2/18/2013	4:14:09 PM	PH3 MFC set to  0.000000
2/18/2013	4:14:09 PM	SiCl4 MFC set to  0.000000
2/18/2013	4:14:09 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	4:14:09 PM	Tube furnace set to 150
2/18/2013	4:14:39 PM	H2 valve closed
2/18/2013	4:14:39 PM	BCl3 valve closed
2/18/2013	4:14:39 PM	PH3 valve closed
2/18/2013	4:14:39 PM	SiCl4 pre valve closed
2/18/2013	4:14:39 PM	SiCl4 post valve closed
2/18/2013	4:14:39 PM	Bypass valve closed
2/18/2013	4:14:39 PM	Bubbler valve closed
2/18/2013	4:14:39 PM	Helium valve opened
2/18/2013	4:14:39 PM	Main Vac valve opened
2/18/2013	4:14:39 PM	Helium MFC set to  20.000000
2/18/2013	4:14:39 PM	H2 MFC set to  0.000000
2/18/2013	4:14:39 PM	BCl3 MFC set to  0.000000
2/18/2013	4:14:39 PM	PH3 MFC set to  0.000000
2/18/2013	4:14:39 PM	SiCl4 MFC set to  0.000000
2/18/2013	4:14:39 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	4:14:40 PM	Tube furnace set to 150
2/18/2013	4:16:40 PM	Helium valve closed
2/18/2013	4:16:40 PM	H2 valve closed
2/18/2013	4:16:40 PM	BCl3 valve closed
2/18/2013	4:16:40 PM	PH3 valve closed
2/18/2013	4:16:40 PM	SiCl4 pre valve closed
2/18/2013	4:16:40 PM	SiCl4 post valve closed
2/18/2013	4:16:40 PM	Bypass valve closed
2/18/2013	4:16:40 PM	Bubbler valve closed
2/18/2013	4:16:40 PM	Main Vac valve opened
2/18/2013	4:16:40 PM	Helium MFC set to  0.000000
2/18/2013	4:16:40 PM	H2 MFC set to  0.000000
2/18/2013	4:16:40 PM	BCl3 MFC set to  0.000000
2/18/2013	4:16:40 PM	PH3 MFC set to  0.000000
2/18/2013	4:16:40 PM	SiCl4 MFC set to  0.000000
2/18/2013	4:16:40 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	4:16:40 PM	Tube furnace set to 150
2/18/2013	4:17:10 PM	H2 valve closed
2/18/2013	4:17:10 PM	BCl3 valve closed
2/18/2013	4:17:10 PM	PH3 valve closed
2/18/2013	4:17:10 PM	SiCl4 pre valve closed
2/18/2013	4:17:10 PM	SiCl4 post valve closed
2/18/2013	4:17:10 PM	Bypass valve closed
2/18/2013	4:17:10 PM	Bubbler valve closed
2/18/2013	4:17:10 PM	Helium valve opened
2/18/2013	4:17:10 PM	Main Vac valve opened
2/18/2013	4:17:10 PM	Helium MFC set to  20.000000
2/18/2013	4:17:10 PM	H2 MFC set to  0.000000
2/18/2013	4:17:10 PM	BCl3 MFC set to  0.000000
2/18/2013	4:17:10 PM	PH3 MFC set to  0.000000
2/18/2013	4:17:10 PM	SiCl4 MFC set to  0.000000
2/18/2013	4:17:10 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	4:17:10 PM	Tube furnace set to 150
2/18/2013	4:17:40 PM	Helium valve closed
2/18/2013	4:17:40 PM	H2 valve closed
2/18/2013	4:17:40 PM	BCl3 valve closed
2/18/2013	4:17:40 PM	PH3 valve closed
2/18/2013	4:17:40 PM	SiCl4 pre valve closed
2/18/2013	4:17:40 PM	SiCl4 post valve closed
2/18/2013	4:17:40 PM	Bypass valve closed
2/18/2013	4:17:40 PM	Bubbler valve closed
2/18/2013	4:17:40 PM	Main Vac valve opened
2/18/2013	4:17:40 PM	Helium MFC set to  0.000000
2/18/2013	4:17:40 PM	H2 MFC set to  0.000000
2/18/2013	4:17:40 PM	BCl3 MFC set to  0.000000
2/18/2013	4:17:40 PM	PH3 MFC set to  0.000000
2/18/2013	4:17:40 PM	SiCl4 MFC set to  0.000000
2/18/2013	4:17:40 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	4:17:40 PM	Tube furnace set to 150
2/18/2013	4:18:10 PM	H2 valve closed
2/18/2013	4:18:10 PM	BCl3 valve closed
2/18/2013	4:18:10 PM	PH3 valve closed
2/18/2013	4:18:10 PM	SiCl4 pre valve closed
2/18/2013	4:18:10 PM	SiCl4 post valve closed
2/18/2013	4:18:10 PM	Bypass valve closed
2/18/2013	4:18:10 PM	Bubbler valve closed
2/18/2013	4:18:10 PM	Helium valve opened
2/18/2013	4:18:10 PM	Main Vac valve opened
2/18/2013	4:18:10 PM	Helium MFC set to  20.000000
2/18/2013	4:18:10 PM	H2 MFC set to  0.000000
2/18/2013	4:18:10 PM	BCl3 MFC set to  0.000000
2/18/2013	4:18:10 PM	PH3 MFC set to  0.000000
2/18/2013	4:18:10 PM	SiCl4 MFC set to  0.000000
2/18/2013	4:18:10 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	4:18:11 PM	Tube furnace set to 150
2/18/2013	4:20:11 PM	Helium valve closed
2/18/2013	4:20:11 PM	H2 valve closed
2/18/2013	4:20:11 PM	BCl3 valve closed
2/18/2013	4:20:11 PM	PH3 valve closed
2/18/2013	4:20:11 PM	SiCl4 pre valve closed
2/18/2013	4:20:11 PM	SiCl4 post valve closed
2/18/2013	4:20:11 PM	Bypass valve closed
2/18/2013	4:20:11 PM	Bubbler valve closed
2/18/2013	4:20:11 PM	Main Vac valve opened
2/18/2013	4:20:11 PM	Helium MFC set to  0.000000
2/18/2013	4:20:11 PM	H2 MFC set to  0.000000
2/18/2013	4:20:11 PM	BCl3 MFC set to  0.000000
2/18/2013	4:20:11 PM	PH3 MFC set to  0.000000
2/18/2013	4:20:11 PM	SiCl4 MFC set to  0.000000
2/18/2013	4:20:11 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	4:20:11 PM	Tube furnace set to 150
2/18/2013	4:20:41 PM	H2 valve closed
2/18/2013	4:20:41 PM	BCl3 valve closed
2/18/2013	4:20:41 PM	PH3 valve closed
2/18/2013	4:20:41 PM	SiCl4 pre valve closed
2/18/2013	4:20:41 PM	SiCl4 post valve closed
2/18/2013	4:20:41 PM	Bypass valve closed
2/18/2013	4:20:41 PM	Bubbler valve closed
2/18/2013	4:20:41 PM	Helium valve opened
2/18/2013	4:20:41 PM	Main Vac valve opened
2/18/2013	4:20:41 PM	Helium MFC set to  20.000000
2/18/2013	4:20:41 PM	H2 MFC set to  0.000000
2/18/2013	4:20:41 PM	BCl3 MFC set to  0.000000
2/18/2013	4:20:41 PM	PH3 MFC set to  0.000000
2/18/2013	4:20:41 PM	SiCl4 MFC set to  0.000000
2/18/2013	4:20:41 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	4:20:41 PM	Tube furnace set to 150
2/18/2013	4:21:11 PM	Helium valve closed
2/18/2013	4:21:11 PM	H2 valve closed
2/18/2013	4:21:11 PM	BCl3 valve closed
2/18/2013	4:21:11 PM	PH3 valve closed
2/18/2013	4:21:11 PM	SiCl4 pre valve closed
2/18/2013	4:21:11 PM	SiCl4 post valve closed
2/18/2013	4:21:11 PM	Bypass valve closed
2/18/2013	4:21:11 PM	Bubbler valve closed
2/18/2013	4:21:11 PM	Main Vac valve opened
2/18/2013	4:21:11 PM	Helium MFC set to  0.000000
2/18/2013	4:21:11 PM	H2 MFC set to  0.000000
2/18/2013	4:21:11 PM	BCl3 MFC set to  0.000000
2/18/2013	4:21:11 PM	PH3 MFC set to  0.000000
2/18/2013	4:21:11 PM	SiCl4 MFC set to  0.000000
2/18/2013	4:21:11 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	4:21:11 PM	Tube furnace set to 150
2/18/2013	4:21:41 PM	H2 valve closed
2/18/2013	4:21:41 PM	BCl3 valve closed
2/18/2013	4:21:41 PM	PH3 valve closed
2/18/2013	4:21:41 PM	SiCl4 pre valve closed
2/18/2013	4:21:41 PM	SiCl4 post valve closed
2/18/2013	4:21:41 PM	Bypass valve closed
2/18/2013	4:21:41 PM	Bubbler valve closed
2/18/2013	4:21:41 PM	Helium valve opened
2/18/2013	4:21:41 PM	Main Vac valve opened
2/18/2013	4:21:41 PM	Helium MFC set to  20.000000
2/18/2013	4:21:41 PM	H2 MFC set to  0.000000
2/18/2013	4:21:41 PM	BCl3 MFC set to  0.000000
2/18/2013	4:21:41 PM	PH3 MFC set to  0.000000
2/18/2013	4:21:41 PM	SiCl4 MFC set to  0.000000
2/18/2013	4:21:41 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	4:21:42 PM	Tube furnace set to 150
2/18/2013	4:23:42 PM	Helium valve closed
2/18/2013	4:23:42 PM	H2 valve closed
2/18/2013	4:23:42 PM	BCl3 valve closed
2/18/2013	4:23:42 PM	PH3 valve closed
2/18/2013	4:23:42 PM	SiCl4 pre valve closed
2/18/2013	4:23:42 PM	SiCl4 post valve closed
2/18/2013	4:23:42 PM	Bypass valve closed
2/18/2013	4:23:42 PM	Bubbler valve closed
2/18/2013	4:23:42 PM	Main Vac valve opened
2/18/2013	4:23:42 PM	Helium MFC set to  0.000000
2/18/2013	4:23:42 PM	H2 MFC set to  0.000000
2/18/2013	4:23:42 PM	BCl3 MFC set to  0.000000
2/18/2013	4:23:42 PM	PH3 MFC set to  0.000000
2/18/2013	4:23:42 PM	SiCl4 MFC set to  0.000000
2/18/2013	4:23:42 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	4:23:42 PM	Tube furnace set to 150
2/18/2013	4:23:43 PM	Run finished at 4:23 PM
2/18/2013	4:24:12 PM	Main Vac valve closed
2/18/2013	4:24:17 PM	Main Vac valve opened
2/18/2013	4:24:27 PM	Recipe started at 4:24 PM
2/18/2013	4:24:27 PM	Helium valve closed
2/18/2013	4:24:27 PM	H2 valve closed
2/18/2013	4:24:27 PM	BCl3 valve closed
2/18/2013	4:24:27 PM	PH3 valve closed
2/18/2013	4:24:27 PM	SiCl4 pre valve closed
2/18/2013	4:24:27 PM	SiCl4 post valve closed
2/18/2013	4:24:27 PM	Bypass valve closed
2/18/2013	4:24:27 PM	Bubbler valve closed
2/18/2013	4:24:27 PM	Main Vac valve opened
2/18/2013	4:24:27 PM	Helium MFC set to  0.000000
2/18/2013	4:24:27 PM	H2 MFC set to  0.000000
2/18/2013	4:24:27 PM	BCl3 MFC set to  0.000000
2/18/2013	4:24:27 PM	PH3 MFC set to  0.000000
2/18/2013	4:24:27 PM	SiCl4 MFC set to  0.000000
2/18/2013	4:24:27 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	4:24:27 PM	Tube furnace set to 150
2/18/2013	4:24:57 PM	H2 valve closed
2/18/2013	4:24:57 PM	BCl3 valve closed
2/18/2013	4:24:57 PM	PH3 valve closed
2/18/2013	4:24:57 PM	SiCl4 pre valve closed
2/18/2013	4:24:57 PM	SiCl4 post valve closed
2/18/2013	4:24:57 PM	Bypass valve closed
2/18/2013	4:24:57 PM	Bubbler valve closed
2/18/2013	4:24:57 PM	Helium valve opened
2/18/2013	4:24:57 PM	Main Vac valve opened
2/18/2013	4:24:57 PM	Helium MFC set to  20.000000
2/18/2013	4:24:57 PM	H2 MFC set to  0.000000
2/18/2013	4:24:57 PM	BCl3 MFC set to  0.000000
2/18/2013	4:24:57 PM	PH3 MFC set to  0.000000
2/18/2013	4:24:57 PM	SiCl4 MFC set to  0.000000
2/18/2013	4:24:57 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	4:24:57 PM	Tube furnace set to 150
2/18/2013	4:25:27 PM	Helium valve closed
2/18/2013	4:25:27 PM	H2 valve closed
2/18/2013	4:25:27 PM	BCl3 valve closed
2/18/2013	4:25:27 PM	PH3 valve closed
2/18/2013	4:25:27 PM	SiCl4 pre valve closed
2/18/2013	4:25:27 PM	SiCl4 post valve closed
2/18/2013	4:25:28 PM	Bypass valve closed
2/18/2013	4:25:28 PM	Bubbler valve closed
2/18/2013	4:25:28 PM	Main Vac valve opened
2/18/2013	4:25:28 PM	Helium MFC set to  0.000000
2/18/2013	4:25:28 PM	H2 MFC set to  0.000000
2/18/2013	4:25:28 PM	BCl3 MFC set to  0.000000
2/18/2013	4:25:28 PM	PH3 MFC set to  0.000000
2/18/2013	4:25:28 PM	SiCl4 MFC set to  0.000000
2/18/2013	4:25:28 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	4:25:28 PM	Tube furnace set to 150
2/18/2013	4:25:58 PM	H2 valve closed
2/18/2013	4:25:58 PM	BCl3 valve closed
2/18/2013	4:25:58 PM	PH3 valve closed
2/18/2013	4:25:58 PM	SiCl4 pre valve closed
2/18/2013	4:25:58 PM	SiCl4 post valve closed
2/18/2013	4:25:58 PM	Bypass valve closed
2/18/2013	4:25:58 PM	Bubbler valve closed
2/18/2013	4:25:58 PM	Helium valve opened
2/18/2013	4:25:58 PM	Main Vac valve opened
2/18/2013	4:25:58 PM	Helium MFC set to  20.000000
2/18/2013	4:25:58 PM	H2 MFC set to  0.000000
2/18/2013	4:25:58 PM	BCl3 MFC set to  0.000000
2/18/2013	4:25:58 PM	PH3 MFC set to  0.000000
2/18/2013	4:25:58 PM	SiCl4 MFC set to  0.000000
2/18/2013	4:25:58 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	4:25:58 PM	Tube furnace set to 150
2/18/2013	4:26:28 PM	Helium valve closed
2/18/2013	4:26:28 PM	H2 valve closed
2/18/2013	4:26:28 PM	BCl3 valve closed
2/18/2013	4:26:28 PM	PH3 valve closed
2/18/2013	4:26:28 PM	SiCl4 pre valve closed
2/18/2013	4:26:28 PM	SiCl4 post valve closed
2/18/2013	4:26:28 PM	Bypass valve closed
2/18/2013	4:26:28 PM	Bubbler valve closed
2/18/2013	4:26:28 PM	Main Vac valve opened
2/18/2013	4:26:28 PM	Helium MFC set to  0.000000
2/18/2013	4:26:28 PM	H2 MFC set to  0.000000
2/18/2013	4:26:28 PM	BCl3 MFC set to  0.000000
2/18/2013	4:26:28 PM	PH3 MFC set to  0.000000
2/18/2013	4:26:28 PM	SiCl4 MFC set to  0.000000
2/18/2013	4:26:28 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	4:26:28 PM	Tube furnace set to 150
2/18/2013	4:26:58 PM	H2 valve closed
2/18/2013	4:26:58 PM	BCl3 valve closed
2/18/2013	4:26:58 PM	PH3 valve closed
2/18/2013	4:26:58 PM	SiCl4 pre valve closed
2/18/2013	4:26:58 PM	SiCl4 post valve closed
2/18/2013	4:26:58 PM	Bypass valve closed
2/18/2013	4:26:58 PM	Bubbler valve closed
2/18/2013	4:26:58 PM	Helium valve opened
2/18/2013	4:26:58 PM	Main Vac valve opened
2/18/2013	4:26:58 PM	Helium MFC set to  20.000000
2/18/2013	4:26:58 PM	H2 MFC set to  0.000000
2/18/2013	4:26:58 PM	BCl3 MFC set to  0.000000
2/18/2013	4:26:58 PM	PH3 MFC set to  0.000000
2/18/2013	4:26:58 PM	SiCl4 MFC set to  0.000000
2/18/2013	4:26:58 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	4:26:58 PM	Tube furnace set to 150
2/18/2013	4:28:58 PM	Helium valve closed
2/18/2013	4:28:58 PM	H2 valve closed
2/18/2013	4:28:58 PM	BCl3 valve closed
2/18/2013	4:28:58 PM	PH3 valve closed
2/18/2013	4:28:58 PM	SiCl4 pre valve closed
2/18/2013	4:28:59 PM	SiCl4 post valve closed
2/18/2013	4:28:59 PM	Bypass valve closed
2/18/2013	4:28:59 PM	Bubbler valve closed
2/18/2013	4:28:59 PM	Main Vac valve opened
2/18/2013	4:28:59 PM	Helium MFC set to  0.000000
2/18/2013	4:28:59 PM	H2 MFC set to  0.000000
2/18/2013	4:28:59 PM	BCl3 MFC set to  0.000000
2/18/2013	4:28:59 PM	PH3 MFC set to  0.000000
2/18/2013	4:28:59 PM	SiCl4 MFC set to  0.000000
2/18/2013	4:28:59 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	4:28:59 PM	Tube furnace set to 150
2/18/2013	4:29:29 PM	H2 valve closed
2/18/2013	4:29:29 PM	BCl3 valve closed
2/18/2013	4:29:29 PM	PH3 valve closed
2/18/2013	4:29:29 PM	SiCl4 pre valve closed
2/18/2013	4:29:29 PM	SiCl4 post valve closed
2/18/2013	4:29:29 PM	Bypass valve closed
2/18/2013	4:29:29 PM	Bubbler valve closed
2/18/2013	4:29:29 PM	Helium valve opened
2/18/2013	4:29:29 PM	Main Vac valve opened
2/18/2013	4:29:29 PM	Helium MFC set to  20.000000
2/18/2013	4:29:29 PM	H2 MFC set to  0.000000
2/18/2013	4:29:29 PM	BCl3 MFC set to  0.000000
2/18/2013	4:29:29 PM	PH3 MFC set to  0.000000
2/18/2013	4:29:29 PM	SiCl4 MFC set to  0.000000
2/18/2013	4:29:29 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	4:29:29 PM	Tube furnace set to 150
2/18/2013	4:29:59 PM	Helium valve closed
2/18/2013	4:29:59 PM	H2 valve closed
2/18/2013	4:29:59 PM	BCl3 valve closed
2/18/2013	4:29:59 PM	PH3 valve closed
2/18/2013	4:29:59 PM	SiCl4 pre valve closed
2/18/2013	4:29:59 PM	SiCl4 post valve closed
2/18/2013	4:29:59 PM	Bypass valve closed
2/18/2013	4:29:59 PM	Bubbler valve closed
2/18/2013	4:29:59 PM	Main Vac valve opened
2/18/2013	4:29:59 PM	Helium MFC set to  0.000000
2/18/2013	4:29:59 PM	H2 MFC set to  0.000000
2/18/2013	4:29:59 PM	BCl3 MFC set to  0.000000
2/18/2013	4:29:59 PM	PH3 MFC set to  0.000000
2/18/2013	4:29:59 PM	SiCl4 MFC set to  0.000000
2/18/2013	4:29:59 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	4:29:59 PM	Tube furnace set to 150
2/18/2013	4:30:29 PM	H2 valve closed
2/18/2013	4:30:29 PM	BCl3 valve closed
2/18/2013	4:30:29 PM	PH3 valve closed
2/18/2013	4:30:29 PM	SiCl4 pre valve closed
2/18/2013	4:30:29 PM	SiCl4 post valve closed
2/18/2013	4:30:29 PM	Bypass valve closed
2/18/2013	4:30:29 PM	Bubbler valve closed
2/18/2013	4:30:29 PM	Helium valve opened
2/18/2013	4:30:29 PM	Main Vac valve opened
2/18/2013	4:30:29 PM	Helium MFC set to  20.000000
2/18/2013	4:30:29 PM	H2 MFC set to  0.000000
2/18/2013	4:30:29 PM	BCl3 MFC set to  0.000000
2/18/2013	4:30:29 PM	PH3 MFC set to  0.000000
2/18/2013	4:30:29 PM	SiCl4 MFC set to  0.000000
2/18/2013	4:30:29 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	4:30:29 PM	Tube furnace set to 150
2/18/2013	4:30:59 PM	Helium valve closed
2/18/2013	4:30:59 PM	H2 valve closed
2/18/2013	4:30:59 PM	BCl3 valve closed
2/18/2013	4:31:00 PM	PH3 valve closed
2/18/2013	4:31:00 PM	SiCl4 pre valve closed
2/18/2013	4:31:00 PM	SiCl4 post valve closed
2/18/2013	4:31:00 PM	Bypass valve closed
2/18/2013	4:31:00 PM	Bubbler valve closed
2/18/2013	4:31:00 PM	Main Vac valve opened
2/18/2013	4:31:00 PM	Helium MFC set to  0.000000
2/18/2013	4:31:00 PM	H2 MFC set to  0.000000
2/18/2013	4:31:00 PM	BCl3 MFC set to  0.000000
2/18/2013	4:31:00 PM	PH3 MFC set to  0.000000
2/18/2013	4:31:00 PM	SiCl4 MFC set to  0.000000
2/18/2013	4:31:00 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	4:31:00 PM	Tube furnace set to 150
2/18/2013	4:31:30 PM	H2 valve closed
2/18/2013	4:31:30 PM	BCl3 valve closed
2/18/2013	4:31:30 PM	PH3 valve closed
2/18/2013	4:31:30 PM	SiCl4 pre valve closed
2/18/2013	4:31:30 PM	SiCl4 post valve closed
2/18/2013	4:31:30 PM	Bypass valve closed
2/18/2013	4:31:30 PM	Bubbler valve closed
2/18/2013	4:31:30 PM	Helium valve opened
2/18/2013	4:31:30 PM	Main Vac valve opened
2/18/2013	4:31:30 PM	Helium MFC set to  20.000000
2/18/2013	4:31:30 PM	H2 MFC set to  0.000000
2/18/2013	4:31:30 PM	BCl3 MFC set to  0.000000
2/18/2013	4:31:30 PM	PH3 MFC set to  0.000000
2/18/2013	4:31:30 PM	SiCl4 MFC set to  0.000000
2/18/2013	4:31:30 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	4:31:30 PM	Tube furnace set to 150
2/18/2013	4:33:30 PM	Helium valve closed
2/18/2013	4:33:30 PM	H2 valve closed
2/18/2013	4:33:30 PM	BCl3 valve closed
2/18/2013	4:33:30 PM	PH3 valve closed
2/18/2013	4:33:30 PM	SiCl4 pre valve closed
2/18/2013	4:33:30 PM	SiCl4 post valve closed
2/18/2013	4:33:30 PM	Bypass valve closed
2/18/2013	4:33:30 PM	Bubbler valve closed
2/18/2013	4:33:30 PM	Main Vac valve opened
2/18/2013	4:33:30 PM	Helium MFC set to  0.000000
2/18/2013	4:33:30 PM	H2 MFC set to  0.000000
2/18/2013	4:33:30 PM	BCl3 MFC set to  0.000000
2/18/2013	4:33:30 PM	PH3 MFC set to  0.000000
2/18/2013	4:33:30 PM	SiCl4 MFC set to  0.000000
2/18/2013	4:33:30 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	4:33:30 PM	Tube furnace set to 150
2/18/2013	4:34:00 PM	H2 valve closed
2/18/2013	4:34:00 PM	BCl3 valve closed
2/18/2013	4:34:00 PM	PH3 valve closed
2/18/2013	4:34:00 PM	SiCl4 pre valve closed
2/18/2013	4:34:00 PM	SiCl4 post valve closed
2/18/2013	4:34:00 PM	Bypass valve closed
2/18/2013	4:34:00 PM	Bubbler valve closed
2/18/2013	4:34:00 PM	Helium valve opened
2/18/2013	4:34:00 PM	Main Vac valve opened
2/18/2013	4:34:00 PM	Helium MFC set to  20.000000
2/18/2013	4:34:00 PM	H2 MFC set to  0.000000
2/18/2013	4:34:00 PM	BCl3 MFC set to  0.000000
2/18/2013	4:34:00 PM	PH3 MFC set to  0.000000
2/18/2013	4:34:00 PM	SiCl4 MFC set to  0.000000
2/18/2013	4:34:00 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	4:34:00 PM	Tube furnace set to 150
2/18/2013	4:34:30 PM	Helium valve closed
2/18/2013	4:34:30 PM	H2 valve closed
2/18/2013	4:34:30 PM	BCl3 valve closed
2/18/2013	4:34:31 PM	PH3 valve closed
2/18/2013	4:34:31 PM	SiCl4 pre valve closed
2/18/2013	4:34:31 PM	SiCl4 post valve closed
2/18/2013	4:34:31 PM	Bypass valve closed
2/18/2013	4:34:31 PM	Bubbler valve closed
2/18/2013	4:34:31 PM	Main Vac valve opened
2/18/2013	4:34:31 PM	Helium MFC set to  0.000000
2/18/2013	4:34:31 PM	H2 MFC set to  0.000000
2/18/2013	4:34:31 PM	BCl3 MFC set to  0.000000
2/18/2013	4:34:31 PM	PH3 MFC set to  0.000000
2/18/2013	4:34:31 PM	SiCl4 MFC set to  0.000000
2/18/2013	4:34:31 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	4:34:31 PM	Tube furnace set to 150
2/18/2013	4:35:01 PM	H2 valve closed
2/18/2013	4:35:01 PM	BCl3 valve closed
2/18/2013	4:35:01 PM	PH3 valve closed
2/18/2013	4:35:01 PM	SiCl4 pre valve closed
2/18/2013	4:35:01 PM	SiCl4 post valve closed
2/18/2013	4:35:01 PM	Bypass valve closed
2/18/2013	4:35:01 PM	Bubbler valve closed
2/18/2013	4:35:01 PM	Helium valve opened
2/18/2013	4:35:01 PM	Main Vac valve opened
2/18/2013	4:35:01 PM	Helium MFC set to  20.000000
2/18/2013	4:35:01 PM	H2 MFC set to  0.000000
2/18/2013	4:35:01 PM	BCl3 MFC set to  0.000000
2/18/2013	4:35:01 PM	PH3 MFC set to  0.000000
2/18/2013	4:35:01 PM	SiCl4 MFC set to  0.000000
2/18/2013	4:35:01 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	4:35:01 PM	Tube furnace set to 150
2/18/2013	4:37:01 PM	Helium valve closed
2/18/2013	4:37:01 PM	H2 valve closed
2/18/2013	4:37:01 PM	BCl3 valve closed
2/18/2013	4:37:01 PM	PH3 valve closed
2/18/2013	4:37:01 PM	SiCl4 pre valve closed
2/18/2013	4:37:01 PM	SiCl4 post valve closed
2/18/2013	4:37:01 PM	Bypass valve closed
2/18/2013	4:37:01 PM	Bubbler valve closed
2/18/2013	4:37:01 PM	Main Vac valve opened
2/18/2013	4:37:01 PM	Helium MFC set to  0.000000
2/18/2013	4:37:01 PM	H2 MFC set to  0.000000
2/18/2013	4:37:01 PM	BCl3 MFC set to  0.000000
2/18/2013	4:37:01 PM	PH3 MFC set to  0.000000
2/18/2013	4:37:01 PM	SiCl4 MFC set to  0.000000
2/18/2013	4:37:01 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	4:37:01 PM	Tube furnace set to 150
2/18/2013	4:37:31 PM	H2 valve closed
2/18/2013	4:37:31 PM	BCl3 valve closed
2/18/2013	4:37:31 PM	PH3 valve closed
2/18/2013	4:37:31 PM	SiCl4 pre valve closed
2/18/2013	4:37:31 PM	SiCl4 post valve closed
2/18/2013	4:37:31 PM	Bypass valve closed
2/18/2013	4:37:31 PM	Bubbler valve closed
2/18/2013	4:37:31 PM	Helium valve opened
2/18/2013	4:37:31 PM	Main Vac valve opened
2/18/2013	4:37:31 PM	Helium MFC set to  20.000000
2/18/2013	4:37:31 PM	H2 MFC set to  0.000000
2/18/2013	4:37:31 PM	BCl3 MFC set to  0.000000
2/18/2013	4:37:31 PM	PH3 MFC set to  0.000000
2/18/2013	4:37:31 PM	SiCl4 MFC set to  0.000000
2/18/2013	4:37:31 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	4:37:31 PM	Tube furnace set to 150
2/18/2013	4:38:01 PM	Helium valve closed
2/18/2013	4:38:01 PM	H2 valve closed
2/18/2013	4:38:01 PM	BCl3 valve closed
2/18/2013	4:38:01 PM	PH3 valve closed
2/18/2013	4:38:02 PM	SiCl4 pre valve closed
2/18/2013	4:38:02 PM	SiCl4 post valve closed
2/18/2013	4:38:02 PM	Bypass valve closed
2/18/2013	4:38:02 PM	Bubbler valve closed
2/18/2013	4:38:02 PM	Main Vac valve opened
2/18/2013	4:38:02 PM	Helium MFC set to  0.000000
2/18/2013	4:38:02 PM	H2 MFC set to  0.000000
2/18/2013	4:38:02 PM	BCl3 MFC set to  0.000000
2/18/2013	4:38:02 PM	PH3 MFC set to  0.000000
2/18/2013	4:38:02 PM	SiCl4 MFC set to  0.000000
2/18/2013	4:38:02 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	4:38:02 PM	Tube furnace set to 150
2/18/2013	4:38:32 PM	H2 valve closed
2/18/2013	4:38:32 PM	BCl3 valve closed
2/18/2013	4:38:32 PM	PH3 valve closed
2/18/2013	4:38:32 PM	SiCl4 pre valve closed
2/18/2013	4:38:32 PM	SiCl4 post valve closed
2/18/2013	4:38:32 PM	Bypass valve closed
2/18/2013	4:38:32 PM	Bubbler valve closed
2/18/2013	4:38:32 PM	Helium valve opened
2/18/2013	4:38:32 PM	Main Vac valve opened
2/18/2013	4:38:32 PM	Helium MFC set to  20.000000
2/18/2013	4:38:32 PM	H2 MFC set to  0.000000
2/18/2013	4:38:32 PM	BCl3 MFC set to  0.000000
2/18/2013	4:38:32 PM	PH3 MFC set to  0.000000
2/18/2013	4:38:32 PM	SiCl4 MFC set to  0.000000
2/18/2013	4:38:32 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	4:38:32 PM	Tube furnace set to 150
2/18/2013	4:40:32 PM	Helium valve closed
2/18/2013	4:40:32 PM	H2 valve closed
2/18/2013	4:40:32 PM	BCl3 valve closed
2/18/2013	4:40:32 PM	PH3 valve closed
2/18/2013	4:40:32 PM	SiCl4 pre valve closed
2/18/2013	4:40:32 PM	SiCl4 post valve closed
2/18/2013	4:40:32 PM	Bypass valve closed
2/18/2013	4:40:32 PM	Bubbler valve closed
2/18/2013	4:40:32 PM	Main Vac valve opened
2/18/2013	4:40:32 PM	Helium MFC set to  0.000000
2/18/2013	4:40:32 PM	H2 MFC set to  0.000000
2/18/2013	4:40:32 PM	BCl3 MFC set to  0.000000
2/18/2013	4:40:32 PM	PH3 MFC set to  0.000000
2/18/2013	4:40:32 PM	SiCl4 MFC set to  0.000000
2/18/2013	4:40:32 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	4:40:32 PM	Tube furnace set to 150
2/18/2013	4:40:33 PM	Run finished at 4:40 PM
2/18/2013	4:40:56 PM	Main Vac valve closed
2/18/2013	4:41:01 PM	Main Vac valve opened
2/18/2013	4:41:50 PM	Recipe started at 4:41 PM
2/18/2013	4:41:50 PM	Helium valve closed
2/18/2013	4:41:50 PM	H2 valve closed
2/18/2013	4:41:50 PM	BCl3 valve closed
2/18/2013	4:41:50 PM	PH3 valve closed
2/18/2013	4:41:50 PM	SiCl4 pre valve closed
2/18/2013	4:41:50 PM	SiCl4 post valve closed
2/18/2013	4:41:50 PM	Main Vac valve closed
2/18/2013	4:41:50 PM	Bypass valve closed
2/18/2013	4:41:50 PM	Bubbler valve closed
2/18/2013	4:41:50 PM	Helium MFC set to  0.000000
2/18/2013	4:41:50 PM	H2 MFC set to  0.000000
2/18/2013	4:41:50 PM	BCl3 MFC set to  0.000000
2/18/2013	4:41:50 PM	PH3 MFC set to  0.000000
2/18/2013	4:41:50 PM	SiCl4 MFC set to  0.000000
2/18/2013	4:41:50 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	4:41:50 PM	Tube furnace set to 0
2/18/2013	4:41:53 PM	Helium valve closed
2/18/2013	4:41:53 PM	BCl3 valve closed
2/18/2013	4:41:53 PM	PH3 valve closed
2/18/2013	4:41:53 PM	SiCl4 pre valve closed
2/18/2013	4:41:53 PM	SiCl4 post valve closed
2/18/2013	4:41:53 PM	Main Vac valve closed
2/18/2013	4:41:53 PM	Bypass valve closed
2/18/2013	4:41:53 PM	Bubbler valve closed
2/18/2013	4:41:53 PM	H2 valve opened
2/18/2013	4:41:53 PM	Helium MFC set to  0.000000
2/18/2013	4:41:53 PM	H2 MFC set to  500.000000
2/18/2013	4:41:53 PM	BCl3 MFC set to  0.000000
2/18/2013	4:41:53 PM	PH3 MFC set to  0.000000
2/18/2013	4:41:53 PM	SiCl4 MFC set to  0.000000
2/18/2013	4:41:53 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	4:41:53 PM	Tube furnace set to 0
2/18/2013	4:43:03 PM	Helium valve closed
2/18/2013	4:43:03 PM	BCl3 valve closed
2/18/2013	4:43:03 PM	PH3 valve closed
2/18/2013	4:43:03 PM	SiCl4 pre valve closed
2/18/2013	4:43:03 PM	SiCl4 post valve closed
2/18/2013	4:43:03 PM	Main Vac valve closed
2/18/2013	4:43:03 PM	Bypass valve closed
2/18/2013	4:43:03 PM	H2 valve opened
2/18/2013	4:43:03 PM	Bubbler valve opened
2/18/2013	4:43:03 PM	Helium MFC set to  0.000000
2/18/2013	4:43:03 PM	H2 MFC set to  500.000000
2/18/2013	4:43:03 PM	BCl3 MFC set to  0.000000
2/18/2013	4:43:03 PM	PH3 MFC set to  0.000000
2/18/2013	4:43:03 PM	SiCl4 MFC set to  0.000000
2/18/2013	4:43:03 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	4:43:03 PM	Tube furnace set to 0
2/18/2013	4:43:04 PM	Helium valve closed
2/18/2013	4:43:04 PM	BCl3 valve closed
2/18/2013	4:43:04 PM	PH3 valve closed
2/18/2013	4:43:04 PM	SiCl4 pre valve closed
2/18/2013	4:43:04 PM	SiCl4 post valve closed
2/18/2013	4:43:04 PM	Main Vac valve closed
2/18/2013	4:43:04 PM	Bypass valve closed
2/18/2013	4:43:04 PM	H2 valve opened
2/18/2013	4:43:04 PM	Bubbler valve opened
2/18/2013	4:43:04 PM	Helium MFC set to  0.000000
2/18/2013	4:43:04 PM	H2 MFC set to  500.000000
2/18/2013	4:43:04 PM	BCl3 MFC set to  0.000000
2/18/2013	4:43:04 PM	PH3 MFC set to  0.000000
2/18/2013	4:43:04 PM	SiCl4 MFC set to  0.000000
2/18/2013	4:43:04 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	4:43:05 PM	Tube furnace set to 1000
2/18/2013	5:03:04 PM	Helium valve closed
2/18/2013	5:03:05 PM	PH3 valve closed
2/18/2013	5:03:05 PM	Main Vac valve closed
2/18/2013	5:03:05 PM	Bypass valve closed
2/18/2013	5:03:05 PM	H2 valve opened
2/18/2013	5:03:05 PM	BCl3 valve opened
2/18/2013	5:03:05 PM	SiCl4 pre valve opened
2/18/2013	5:03:05 PM	SiCl4 post valve opened
2/18/2013	5:03:05 PM	Bubbler valve opened
2/18/2013	5:03:05 PM	Helium MFC set to  0.000000
2/18/2013	5:03:05 PM	H2 MFC set to  500.000000
2/18/2013	5:03:05 PM	BCl3 MFC set to  1.000000
2/18/2013	5:03:05 PM	PH3 MFC set to  0.000000
2/18/2013	5:03:05 PM	SiCl4 MFC set to  50.000000
2/18/2013	5:03:05 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	5:03:05 PM	Tube furnace set to 1000
2/18/2013	5:13:05 PM	Helium valve closed
2/18/2013	5:13:05 PM	BCl3 valve closed
2/18/2013	5:13:05 PM	PH3 valve closed
2/18/2013	5:13:05 PM	SiCl4 pre valve closed
2/18/2013	5:13:05 PM	SiCl4 post valve closed
2/18/2013	5:13:05 PM	Main Vac valve closed
2/18/2013	5:13:05 PM	Bypass valve closed
2/18/2013	5:13:05 PM	H2 valve opened
2/18/2013	5:13:05 PM	Bubbler valve opened
2/18/2013	5:13:05 PM	Helium MFC set to  0.000000
2/18/2013	5:13:05 PM	H2 MFC set to  500.000000
2/18/2013	5:13:05 PM	BCl3 MFC set to  0.000000
2/18/2013	5:13:05 PM	PH3 MFC set to  0.000000
2/18/2013	5:13:05 PM	SiCl4 MFC set to  0.000000
2/18/2013	5:13:05 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	5:13:05 PM	Tube furnace set to 750
2/18/2013	5:18:05 PM	H2 valve closed
2/18/2013	5:18:05 PM	BCl3 valve closed
2/18/2013	5:18:05 PM	PH3 valve closed
2/18/2013	5:18:05 PM	SiCl4 pre valve closed
2/18/2013	5:18:05 PM	SiCl4 post valve closed
2/18/2013	5:18:05 PM	Main Vac valve closed
2/18/2013	5:18:05 PM	Bypass valve closed
2/18/2013	5:18:05 PM	Helium valve opened
2/18/2013	5:18:05 PM	Bubbler valve opened
2/18/2013	5:18:05 PM	Helium MFC set to  500.000000
2/18/2013	5:18:05 PM	H2 MFC set to  0.000000
2/18/2013	5:18:05 PM	BCl3 MFC set to  0.000000
2/18/2013	5:18:05 PM	PH3 MFC set to  0.000000
2/18/2013	5:18:05 PM	SiCl4 MFC set to  0.000000
2/18/2013	5:18:05 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	5:18:05 PM	Tube furnace set to 0
2/18/2013	5:38:05 PM	Helium valve closed
2/18/2013	5:38:05 PM	H2 valve closed
2/18/2013	5:38:05 PM	BCl3 valve closed
2/18/2013	5:38:05 PM	PH3 valve closed
2/18/2013	5:38:05 PM	SiCl4 pre valve closed
2/18/2013	5:38:05 PM	SiCl4 post valve closed
2/18/2013	5:38:05 PM	Main Vac valve closed
2/18/2013	5:38:05 PM	Bypass valve closed
2/18/2013	5:38:05 PM	Bubbler valve closed
2/18/2013	5:38:05 PM	Helium MFC set to  0.000000
2/18/2013	5:38:05 PM	H2 MFC set to  0.000000
2/18/2013	5:38:05 PM	BCl3 MFC set to  0.000000
2/18/2013	5:38:05 PM	PH3 MFC set to  0.000000
2/18/2013	5:38:05 PM	SiCl4 MFC set to  0.000000
2/18/2013	5:38:05 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	5:38:05 PM	Tube furnace set to 0
2/18/2013	5:38:06 PM	Run finished at 5:38 PM
2/18/2013	6:10:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/18/2013	6:10:27 PM	Recipe started at 6:10 PM
2/18/2013	6:10:28 PM	Helium valve closed
2/18/2013	6:10:28 PM	H2 valve closed
2/18/2013	6:10:28 PM	BCl3 valve closed
2/18/2013	6:10:28 PM	PH3 valve closed
2/18/2013	6:10:28 PM	SiCl4 pre valve closed
2/18/2013	6:10:28 PM	SiCl4 post valve closed
2/18/2013	6:10:28 PM	Main Vac valve closed
2/18/2013	6:10:28 PM	Bypass valve closed
2/18/2013	6:10:28 PM	Bubbler valve closed
2/18/2013	6:10:28 PM	Helium MFC set to  0.000000
2/18/2013	6:10:28 PM	H2 MFC set to  0.000000
2/18/2013	6:10:28 PM	BCl3 MFC set to  0.000000
2/18/2013	6:10:28 PM	PH3 MFC set to  0.000000
2/18/2013	6:10:28 PM	SiCl4 MFC set to  0.000000
2/18/2013	6:10:28 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	6:10:28 PM	Tube furnace set to 0
2/18/2013	6:10:31 PM	H2 valve closed
2/18/2013	6:10:31 PM	BCl3 valve closed
2/18/2013	6:10:31 PM	PH3 valve closed
2/18/2013	6:10:31 PM	SiCl4 pre valve closed
2/18/2013	6:10:31 PM	SiCl4 post valve closed
2/18/2013	6:10:31 PM	Main Vac valve closed
2/18/2013	6:10:31 PM	Bypass valve closed
2/18/2013	6:10:31 PM	Bubbler valve closed
2/18/2013	6:10:31 PM	Helium valve opened
2/18/2013	6:10:31 PM	Helium MFC set to  500.000000
2/18/2013	6:10:31 PM	H2 MFC set to  0.000000
2/18/2013	6:10:31 PM	BCl3 MFC set to  0.000000
2/18/2013	6:10:31 PM	PH3 MFC set to  0.000000
2/18/2013	6:10:31 PM	SiCl4 MFC set to  0.000000
2/18/2013	6:10:31 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	6:10:31 PM	Tube furnace set to 0
2/18/2013	6:10:32 PM	Helium valve closed
2/18/2013	6:10:32 PM	H2 valve closed
2/18/2013	6:10:32 PM	BCl3 valve closed
2/18/2013	6:10:32 PM	PH3 valve closed
2/18/2013	6:10:32 PM	SiCl4 pre valve closed
2/18/2013	6:10:32 PM	SiCl4 post valve closed
2/18/2013	6:10:32 PM	Main Vac valve closed
2/18/2013	6:10:32 PM	Bypass valve closed
2/18/2013	6:10:32 PM	Bubbler valve closed
2/18/2013	6:10:32 PM	Helium MFC set to  0.000000
2/18/2013	6:10:32 PM	H2 MFC set to  0.000000
2/18/2013	6:10:32 PM	BCl3 MFC set to  0.000000
2/18/2013	6:10:32 PM	PH3 MFC set to  0.000000
2/18/2013	6:10:32 PM	SiCl4 MFC set to  0.000000
2/18/2013	6:10:32 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	6:10:32 PM	Tube furnace set to 0
2/18/2013	6:10:33 PM	Run finished at 6:10 PM
2/18/2013	6:10:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/18/2013	6:12:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/18/2013	6:12:12 PM	Recipe started at 6:12 PM
2/18/2013	6:12:12 PM	Helium valve closed
2/18/2013	6:12:12 PM	H2 valve closed
2/18/2013	6:12:12 PM	BCl3 valve closed
2/18/2013	6:12:12 PM	PH3 valve closed
2/18/2013	6:12:12 PM	SiCl4 pre valve closed
2/18/2013	6:12:12 PM	SiCl4 post valve closed
2/18/2013	6:12:12 PM	Main Vac valve closed
2/18/2013	6:12:12 PM	Bubbler valve closed
2/18/2013	6:12:12 PM	Bypass valve opened
2/18/2013	6:12:12 PM	Helium MFC set to  0.000000
2/18/2013	6:12:12 PM	H2 MFC set to  0.000000
2/18/2013	6:12:12 PM	BCl3 MFC set to  0.000000
2/18/2013	6:12:12 PM	PH3 MFC set to  0.000000
2/18/2013	6:12:12 PM	SiCl4 MFC set to  0.000000
2/18/2013	6:12:12 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	6:12:12 PM	Tube furnace set to 0
2/18/2013	6:13:25 PM	Helium valve closed
2/18/2013	6:13:25 PM	H2 valve closed
2/18/2013	6:13:25 PM	BCl3 valve closed
2/18/2013	6:13:25 PM	PH3 valve closed
2/18/2013	6:13:25 PM	SiCl4 pre valve closed
2/18/2013	6:13:25 PM	SiCl4 post valve closed
2/18/2013	6:13:25 PM	Main Vac valve closed
2/18/2013	6:13:25 PM	Bubbler valve closed
2/18/2013	6:13:25 PM	Bypass valve opened
2/18/2013	6:13:25 PM	Helium MFC set to  0.000000
2/18/2013	6:13:25 PM	H2 MFC set to  0.000000
2/18/2013	6:13:25 PM	BCl3 MFC set to  0.000000
2/18/2013	6:13:25 PM	PH3 MFC set to  0.000000
2/18/2013	6:13:25 PM	SiCl4 MFC set to  0.000000
2/18/2013	6:13:25 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	6:13:25 PM	Tube furnace set to 0
2/18/2013	6:14:25 PM	Helium valve closed
2/18/2013	6:14:25 PM	H2 valve closed
2/18/2013	6:14:25 PM	BCl3 valve closed
2/18/2013	6:14:25 PM	PH3 valve closed
2/18/2013	6:14:25 PM	SiCl4 pre valve closed
2/18/2013	6:14:25 PM	SiCl4 post valve closed
2/18/2013	6:14:25 PM	Bypass valve closed
2/18/2013	6:14:25 PM	Bubbler valve closed
2/18/2013	6:14:25 PM	Main Vac valve opened
2/18/2013	6:14:25 PM	Helium MFC set to  0.000000
2/18/2013	6:14:25 PM	H2 MFC set to  0.000000
2/18/2013	6:14:25 PM	BCl3 MFC set to  0.000000
2/18/2013	6:14:25 PM	PH3 MFC set to  0.000000
2/18/2013	6:14:25 PM	SiCl4 MFC set to  0.000000
2/18/2013	6:14:25 PM	Bypass solenoid MFC set to  0.000000
2/18/2013	6:14:25 PM	Tube furnace set to 0
2/18/2013	6:14:26 PM	Run finished at 6:14 PM
2/18/2013	6:14:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
